Semiconductor package
A semiconductor package includes a connection structure, a semiconductor chip, and an encapsulant. The connection structure includes an insulating layer, a redistribution layer disposed on the insulating layer, and a connection via penetrating through the insulating layer and connected to the redistribution layer. The semiconductor chip has an active surface on which connection pads are disposed and an inactive surface opposing the active surface, and the active surface is disposed on the connection structure to face the connection structure. The encapsulant covers at least a portion of the semiconductor chip. The semiconductor chip includes a groove formed in the active surface and a dam structure disposed around the groove in the active surface.
1. A semiconductor package comprising:
a connection structure including an insulating layer, a redistribution layer disposed on the insulating layer, and a connection via penetrating through the insulating layer and connected to the redistribution layer;
a semiconductor chip having an active surface on which connection pads are disposed and an inactive surface opposing the active surface, and having the active surface disposed on the connection structure to face the connection structure; and
an encapsulant covering at least a portion of the semiconductor chip,
wherein the semiconductor chip includes a groove disposed in the active surface and a dam structure disposed around the groove in the active surface,
wherein the dam structure comprises a first dam segment formed on a first side of the groove and a second dam segment formed on a second side of the groove.
2. The semiconductor package of claim 1 , wherein the groove is disposed between an edge of the semiconductor chip and the connection pads.
3. The semiconductor package of claim 1 , wherein the groove is continuously disposed around a periphery of the active surface of the semiconductor chip.
4. The semiconductor package of claim 1 , wherein the semiconductor chip includes a plurality of grooves, including the groove, each continuously formed along a respective edge of the active surface of the semiconductor chip and disconnected from each other.
5. The semiconductor package of claim 4 , wherein the semiconductor chip includes a passivation layer extending along corner regions of the active surface between adjacent grooves of the plurality of grooves.
6. The semiconductor package of claim 1 , wherein the groove has a plurality of inclined surfaces, inclined at different angles with respect to the active surface.
7. The semiconductor package of claim 1 , wherein the groove is a laser-machined groove penetrating into the active surface.
8. The semiconductor package of claim 7 , wherein the dam structure is a burr formed by laser-machining the semiconductor chip and extends outwardly from the active surface.
9. The semiconductor package of claim 1 , further comprising:
a frame disposed on the connection structure and having a through-hole having the semiconductor chip disposed therein.
10. The semiconductor package of claim 9 , wherein the encapsulant fills the through-hole, and covers the inactive surface and side surfaces of the semiconductor chip.
11. The semiconductor package of claim 10 , wherein the encapsulant extends to a portion of the active surface of the semiconductor chip.
12. The semiconductor package of claim 1 , wherein the encapsulant is filled in at least a portion of the groove.
13. A semiconductor chip comprising:
a body having a planar surface;
a plurality of connection pads disposed along the planar surface and electrically connected to electrical circuits in the body;
a groove penetrating into the planar surface along a periphery of the planar surface; and
a dam structure extending from the planar surface along a periphery of the groove,
wherein the groove and dam are disposed between the plurality of connection pads and an edge of the planar surface of the body,
wherein the dam structure comprises a first dam segment formed on a first side of the groove and a second dam segment formed on a second side of the groove.
14. The semiconductor chip of claim 13 , wherein groove extends integrally around an entire periphery of the planar surface of the body to surround all connection pads disposed on the planar surface.
15. The semiconductor chip of claim 14 , wherein the dam comprises a first dam extending integrally around the entire periphery of the planar surface of the body between the groove and the periphery of the planar surface, and a second dam extending integrally around the entire periphery of the planar surface of the body between the groove and the plurality of connection pads.
16. The semiconductor chip of claim 13 , wherein the groove comprises a plurality of groove segments each disposed along a respective edge of an active surface of the semiconductor chip and spaced apart from other grooves.
17. The semiconductor chip of claim 16 , further comprising a plurality of passivation layer segments each extending along corner regions of the active surface between adjacent groove segments of the plurality of groove segments.
18. The semiconductor chip of claim 16 , wherein the dam comprises a plurality of dam segments each extending along an edge of a respective groove segment.
19. A semiconductor package comprising:
the semiconductor chip of claim 13 ;
a connection structure including an insulating layer, a redistribution layer disposed on the insulating layer, and a connection via penetrating through the insulating layer and connected to the redistribution layer and a connection pad of the semiconductor chip; and
an encapsulant covering at least a portion of the semiconductor chip, and extending partially into the groove of the semiconductor chip.
20. The semiconductor package of claim 1 , wherein the first dam segment is formed between the groove and an edge of the semiconductor chip closest to the groove.