Selective oxidation for 3D device isolation
Embodiments described herein generally relate to methods and device structures for horizontal gate all around (hGAA) isolation and fin field effect transistor (FinFET) isolation. A superlattice structure comprising different materials arranged in an alternatingly stacked formation may be formed on a substrate. In one embodiment, at least one of the layers of the superlattice structure is oxidized by a high pressure oxidation process to form a buried oxide layer adjacent the substrate.
1. A semiconductor process method, comprising:
forming a superlattice structure on a substrate, wherein the superlattice structure comprises:
a first material layer;
a second material layer; and
a third material layer;
patterning the superlattice structure;
etching the superlattice structure; and
performing an oxidation process to oxidize at least one of the first material layer, the second material layer, or the third material layer to form a buried oxide layer, wherein the oxidation process is performed at a pressure of greater than 30 bar.
2. The method of claim 1 , wherein the oxidation process is performed at a temperature of between 300° C. and 400° C.
3. The method of claim 1 , wherein a duration of the oxidation process is between 10 minutes and 20 minutes.
4. The method of claim 1 , wherein the first material layer and the second material layer are disposed within the superlattice structure in an alternating stacked arrangement.
5. The method of claim 4 , wherein the second material layer comprises 70% silicon and 30% germanium, and the third material layer comprises 30% silicon and 70% germanium.
6. The method of claim 5 , wherein the second material layer is disposed on the substrate and the third material layer is disposed on the second material layer.
7. The method of claim 1 , wherein the substrate and the first material layer comprise a silicon containing material.
8. The method of claim 1 , further comprising:
performing a liner deposition process to form a liner comprising an oxynitride material on the superlattice structure.
9. The method of claim 8 , wherein the liner deposition process further comprises:
a thermal oxidation process;
a nitridation process; and
an annealing process.
10. The method of claim 1 , further comprising:
performing a shallow trench isolation process comprising a flowable chemical vapor deposition process to deposit an oxide material layer on the substrate.
11. The method of claim 10 , further comprising:
forming a dummy gate structure on the substrate;
forming source/drain regions of the substrate; and
removing the dummy gate structure and forming a replacement metal gate structure on the substrate.
12. A semiconductor process method, comprising:
forming a superlattice structure on a substrate, wherein the superlattice structure comprises:
a first material layer;
a second material layer; and
a third material layer;
patterning the superlattice structure;
etching the superlattice structure;
performing a shallow trench isolation process to deposit an oxide material layer on the substrate;
performing a shallow trench isolation recess process; and
performing an oxidation process after the shallow trench isolation recess process to oxidize at least one of the first material layer, the second material layer, or the third material layer to form a buried oxide layer, wherein the oxidation process is performed at a pressure of greater than 30 bar.
13. The method of claim 12 , wherein the oxidation process is performed at a temperature of between 300° C. and 400° C.
14. The method of claim 12 , wherein a duration of the oxidation process is between 10 minutes and 20 minutes.
15. The method of claim 12 , wherein the first material layer and the second material layer are disposed within the superlattice structure in an alternating stacked arrangement.
16. The method of claim 15 , wherein the second material layer comprises 70% silicon and 30% germanium, and the third material layer comprises 30% silicon and 70% germanium.
17. The method of claim 12 , further comprising:
forming a dummy gate structure on the substrate;
forming source/drain regions of the substrate; and
removing the dummy gate structure and forming a replacement metal gate structure on the substrate.
18. A semiconductor process method, comprising:
forming a superlattice structure on a substrate, wherein the superlattice structure comprises:
a first material layer;
a second material layer; and
a third material layer;
forming a dummy gate structure on the substrate;
forming source/drain regions on the substrate;
removing the dummy gate structure;
performing an oxidation process after removing the dummy gate structure to oxidize at least one of the first material layer, the second material layer, or the third material layer to form a buried oxide layer, wherein the oxidation process is performed at a pressure of greater than 30 bar; and
forming a replacement metal gate structure on the substrate.
19. The method of claim 18 , wherein the oxidation process is performed at a temperature of between 300° C. and 400° C.
20. The method of claim 18 , wherein a duration of the oxidation process is between 10 minutes and 20 minutes.