IP Library Granted Patent US 10,762,941
Granted Patent B2
US 10,762,941 · App. 16/412,541 · Granted Sep 1, 2020

Spin-orbit torque magnetization rotating element, spin-orbit torque magnetoresistance effect element, and magnetic memory

Inventor: Yohei Shiokawa (Tokyo, JP)
Assignee: TDK CORPORATION
G11C11/161H01L27/228H01L43/06H01L43/08H01L43/10
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Quick Facts
Patent No.
US 10,762,941
App. No.
16/412,541
Granted
Sep 1, 2020
Kind
B2
Abstract

A spin-orbit torque magnetization rotating element includes a spin-orbit torque wiring and a laminated body laminated on the spin-orbit torque wiring. The laminated body includes a first ferromagnetic layer independently having an axis of easy magnetization in a first direction, a nonmagnetic antiferromagnetic coupling layer, and a second ferromagnetic layer independently having an axis of easy magnetization in a second direction, in order from the side of the spin-orbit torque wiring, and the first direction crosses the second direction.

Claims (38)

1. A spin-orbit torque magnetization rotating element, comprising:

a spin-orbit torque wiring; and

a laminated body laminated on the spin-orbit torque wiring,

wherein the laminated body includes a first ferromagnetic layer independently having an axis of easy magnetization in a first direction, a nonmagnetic antiferromagnetic coupling layer, and a second ferromagnetic layer independently having an axis of easy magnetization in a second direction, in order from the side of the spin-orbit torque wiring, and

wherein the first direction crosses the second direction.

2. The spin-orbit torque magnetization rotating element according to claim 1 ,

wherein the first direction is orthogonal to the second direction.

3. The spin-orbit torque magnetization rotating element according to claim 1 ,

wherein the first direction is an in-plane direction of the laminated body, and the second direction is an orthogonal direction of the laminated body.

4. The spin-orbit torque magnetization rotating element according to claim 2 ,

wherein the first direction is an in-plane direction of the laminated body, and the second direction is an orthogonal direction of the laminated body.

5. The spin-orbit torque magnetization rotating element according to claim 1 ,

wherein the first direction is an orthogonal direction of the laminated body, and the second direction is an in-plane direction of the laminated body.

6. The spin-orbit torque magnetization rotating element according to claim 2 ,

wherein the first direction is an orthogonal direction of the laminated body, and the second direction is an in-plane direction of the laminated body.

7. The spin-orbit torque magnetization rotating element according to claim 3 ,

wherein the second ferromagnetic layer contains Fe.

8. The spin-orbit torque magnetization rotating element according to claim 4 ,

wherein the second ferromagnetic layer contains Fe.

9. The spin-orbit torque magnetization rotating element according to claim 5 ,

wherein the first ferromagnetic layer contains Co.

10. The spin-orbit torque magnetization rotating element according to claim 3 ,

wherein a film thickness of a ferromagnetic layer having an axis of easy magnetization in an orthogonal direction among the first ferromagnetic layer and the second ferromagnetic layer is thinner than the film thickness of a ferromagnetic layer having an axis of easy magnetization in an in-plane direction.

11. The spin-orbit torque magnetization rotating element according to claim 1 ,

wherein a film thickness of the second ferromagnetic layer is thicker than a film thickness of the first ferromagnetic layer.

12. The spin-orbit torque magnetization rotating element according to claim 1 ,

wherein the nonmagnetic antiferromagnetic coupling layer contains at least one selected from a group consisting of Ru, Ir, and Rh.

13. The spin-orbit torque magnetization rotating element according to claim 1 ,

wherein the laminated body is circular in a plan view.

14. The spin-orbit torque magnetization rotating element according to claim 1 ,

wherein the laminated body in a plan view has shape anisotropy with a major axis and a minor axis.

15. A spin-orbit torque magnetoresistance effect element, comprising:

the spin-orbit torque magnetization rotating element according to claim 1 ;

a nonmagnetic layer laminated on a side opposite to the spin-orbit torque wiring of the laminated body; and

a third ferromagnetic layer with the laminated body and the nonmagnetic layer therebetween.

16. The spin-orbit torque magnetoresistance effect element according to claim 15 ,

wherein magnetic anisotropy of a ferromagnetic layer having an axis of easy magnetization in a same direction as the third ferromagnetic layer among the first ferromagnetic layer and the second ferromagnetic layer is stronger than magnetic anisotropy of a ferromagnetic layer having an axis of easy magnetization in a different direction as the third ferromagnetic layer.

17. A magnetic memory comprising a plurality of spin-orbit torque magnetoresistance effect elements according to claim 15 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 15, 2019
From: SHIOKAWA, YOHEI
To: TDK CORPORATION
Reel/Frame 049181/0460 →
Priority Claims (2)
JP 2018-094590 · May 16, 2018 · national
JP 2019-088326 · May 8, 2019 · national
Continuity (1)
Related Publication 20190355401A1 · Nov 21, 2019
Cited By (1)
US 12,359,904