Field effect transistor using transition metal dichalcogenide and a method for forming the same
In a method of forming a two-dimensional material layer, a nucleation pattern is formed over a substrate, and a transition metal dichalcogenide (TMD) layer is formed such that the TMD layer laterally grows from the nucleation pattern. In one or more of the foregoing and following embodiments, the TMD layer is single crystalline.
1. A method of forming a two-dimensional material layer, the method comprising:
forming a nucleation pattern over a substrate; and
forming a transition metal dichalcogenide (TMD) layer such that the TMD layer laterally grows from the nucleation pattern,
wherein the nucleation pattern is made of one of Mo, W, Pd or Hf or oxide thereof.
2. The method of claim 1 , wherein the TMD layer is single crystalline.
3. The method of claim 1 , wherein the nucleation pattern is formed by:
forming a film over the substrate; and
patterning the film into a line pattern as the nucleation pattern.
4. The method of claim 3 , wherein the film is made of Mo or MoO 3 .
5. The method of claim 1 , wherein:
the substrate is a single crystal, and
an upper surface of the substrate on which the nucleation pattern is formed is asymmetry to TMD layer.
6. The method of claim 5 , wherein the substrate is one of Si, γ-Al 2 O 3 , Ga 2 O 3 and MgO, of which upper surface has a C 2 symmetry nucleation pattern, or a composite substrate comprising a layer of h-BN or graphene substrate deposited on top of a C3 symmetry substrate including SiC (0001), Ge (111), Si (111), Cu (111) or Pt(111).
7. The method of claim 5 , wherein the substrate is (110) Si.
8. The method of claim 5 , wherein the nucleation pattern extends along a direction corresponding to (001).
9. The method of claim 1 , wherein the nucleation pattern is a groove.
10. The method of claim 1 , wherein the TMD layer includes MX 2 , where M is one of Mo, W, Pd, Pt and Hf and X is one of S, Se and Te.
11. The method of claim 1 , wherein the TMD layer includes MoS 2 .
12. The method of claim 11 , wherein the MoS 2 layer is formed by chemical vapor deposition.
13. The method of claim 12 , wherein an intermediate layer is formed over the substrate and the MoS 2 layer is formed on the intermediate layer.
14. The method of claim 13 , wherein the intermediate layer is a BN layer or a graphene layer.
15. A method of fabricating a field effect transistor, comprising:
forming a nucleation pattern over a substrate;
forming a transition metal dichalcogenide (TMD) layer such that the TMD layer laterally grows from the nucleation pattern;
after the TMD layer is formed, removing the nucleation pattern;
forming source and drain electrodes on the TMD layer;
forming a gate dielectric layer; and
forming a gate electrode over the gate dielectric layer, wherein:
the substrate is a single crystal, and
an upper surface of the substrate on which the nucleation pattern is formed is asymmetry to TMD layer.
16. The method of claim 15 , wherein the TMD layer is a MoS 2 single crystalline layer.
17. The method of claim 15 , wherein:
the substrate is (110) silicon, and
the nucleation pattern extends along a direction corresponding to (001).
18. A field effect transistor (FET), comprising:
a two-dimensional transition metal dichalcogenide (2D-TMD) layer as a channel;
a source/drain electrode that covers a part of an upper surface and a side surface of the 2D-TMD layer;
a gate dielectric layer; and
a gate electrode,
wherein the 2D-TMD layer is single crystalline without grain boundaries,
the 2D-TMD is disposed on a (110) Si surface, and
the source/drain electrode is in contact with the (110) Si surface.
19. The FET of claim 18 , wherein the 2D-TMD layer includes MoS 2 .
20. The FET of claim 18 , wherein the 2D-TMD layer includes MX 2 , where M is one of W, Pd, Pt or Hf and X is one of S, Se and Te.