Methods and apparatus for gallium nitride deposition
Embodiment disclosed herein include a liner assembly, comprising an injector plate liner, a gas injector liner coupled to the injector plate liner, an upper process gas liner coupled to the gas injector liner, a lower process gas liner coupled to the upper process gas liner, and an injector plate positioned between the injector plate liner and the upper process gas liner, wherein a cooling fluid channel is formed in the injector plate adjacent to the gas injector liner.
1. A liner assembly, comprising:
an injector plate liner;
a gas injector liner coupled to the injector plate liner;
an upper process gas liner coupled to the gas injector liner;
a lower process gas liner coupled to the upper process gas liner; and
an injector plate positioned between the injector plate liner and the upper process gas liner, wherein a cooling fluid channel is formed in the injector plate adjacent to the gas injector liner, and wherein a plurality of purge gas flow paths are formed in the liner assembly.
2. The liner assembly of claim 1 , further comprising a baseplate ring positioned between the injector plate and the lower process gas liner.
3. The liner assembly of claim 2 , wherein the cooling fluid channel is a first cooling fluid channel and a second cooling fluid channel is formed in the baseplate ring.
4. The liner assembly of claim 1 , further comprising a liner cover positioned over the gas injector liner.
5. The liner assembly of claim 1 , further comprising an inject baffle positioned between the upper process gas liner and the lower process gas liner.
6. The liner assembly of claim 5 , wherein the inject baffle is in fluid communication with a plurality of gas injection ports.
7. The liner assembly of claim 6 , wherein each of the plurality of gas injection ports are lined with a metallic insert.
8. The liner assembly of claim 1 , wherein the injector plate liner couples to an optically transparent divider.
9. A process chamber, comprising:
an optically transparent divider and an optically transparent plate positioned opposite the optically transparent divider; and
a liner assembly, the liner assembly comprising:
an injector plate liner;
a gas injector liner coupled to the injector plate liner;
an upper process gas liner coupled to the gas injector liner;
a lower process gas liner coupled to the upper process gas liner; and
an injector plate positioned between the injector plate liner and the upper process gas liner, wherein a cooling fluid channel is formed in the injector plate adjacent to the gas injector liner.
10. The process chamber of claim 9 , wherein the liner assembly further comprises a baseplate ring positioned between the injector plate and the lower process gas liner.
11. The process chamber of claim 10 , wherein the cooling fluid channel is a first cooling fluid channel and a second cooling fluid channel is formed in the baseplate ring.
12. The process chamber of claim 9 , wherein a plurality of purge gas flow paths are formed in the liner assembly.
13. The process chamber of claim 9 , wherein the liner assembly further comprises a liner cover positioned over the gas injector liner.
14. The process chamber of claim 9 , wherein the liner assembly further comprises an inject baffle positioned between the upper process gas liner and the lower process gas liner.
15. A method of forming a film on a substrate, the method comprising:
flowing a precursor gas through a liner assembly comprising an injector plate liner surrounding a substrate;
cooling the precursor gas prior to the gas exiting the injector plate liner to a temperature of about 350 degrees Celsius;
flowing a processing gas through the liner assembly and toward the substrate at a position below a flow path of the precursor gas while preventing mixing of the processing gas with the precursor gas while the gases are in the liner assembly; and
heating the precursor gas to a temperature of about 400 degrees Celsius to about 1,200 degrees Celsius above the substrate.
16. The method of claim 15 , wherein the liner assembly includes a cooling fluid channel is formed in an injector plate that is coupled to the injector plate liner.
17. The method of claim 15 , wherein the liner assembly is coupled to an optically transparent plate.
18. The method of claim 15 , further comprising flowing a purge gas through the liner assembly.
19. The method of claim 18 , wherein the liner assembly includes multiple purge gas flow paths.
20. A liner assembly, comprising:
an injector plate liner;
a gas injector liner coupled to the injector plate liner;
an upper process gas liner coupled to the gas injector liner;
a lower process gas liner coupled to the upper process gas liner;
a baseplate ring positioned between the injector plate and the lower process gas liner; and
an injector plate positioned between the injector plate liner and the upper process gas liner, wherein a first cooling fluid channel is formed in the injector plate adjacent to the gas injector liner, and wherein a second cooling fluid channel is formed in the baseplate ring.