Gallium nitride epitaxial structures for power devices
A method for making a multilayered device on an engineered substrate having a substrate coefficient of thermal expansion includes growing a buffer layer on the engineered substrate, and growing a first epitaxial layer on the buffer layer. The first epitaxial layer is characterized by an epitaxial coefficient of thermal expansion substantially equal to the substrate coefficient of thermal expansion.
1. A method for fabricating a multilayered high electron mobility transistor (HEMT) device on an engineered substrate having a substrate coefficient of thermal expansion, the method comprising:
providing an engineered substrate, the engineered substrate comprising:
a polycrystalline substrate;
a barrier layer encapsulating the polycrystalline substrate;
a bonding layer coupled to the barrier layer; and
a single crystalline silicon layer coupled to the bonding layer;
growing a buffer layer on the single crystalline silicon layer;
growing a first epitaxial layer coupled to the buffer layer, wherein the first epitaxial layer is characterized by an epitaxial coefficient of thermal expansion substantially equal to the substrate coefficient of thermal expansion;
growing an undoped gallium nitride (GaN) layer coupled to the first epitaxial layer; and
growing a barrier layer coupled to the undoped GaN layer.
2. The method of claim 1 wherein the first epitaxial layer comprises doped GaN.
3. The method of claim 1 wherein the first epitaxial layer comprises alternating layers of undoped GaN and doped GaN.
4. The method of claim 3 wherein the doped GaN comprises carbon-doped GaN (C—GaN) or iron-doped GaN (Fe—GaN).
5. The method of claim 1 further comprising:
growing an aluminum gallium nitride (AlGaN) back barrier layer coupled to the first epitaxial layer;
wherein the undoped GaN layer is coupled to the first epitaxial layer via the AlGaN back barrier layer.
6. The method of claim 5 wherein the AlGaN back barrier layer has an aluminum mole fraction ranging from about 3% to about 15%.
7. A multilayered high electron mobility transistor (HEMT) device formed on an engineered substrate having a substrate coefficient of thermal expansion, the multilayer HEMT comprising:
an engineered substrate comprising:
a polycrystalline substrate;
a barrier layer encapsulating the polycrystalline substrate;
a bonding layer coupled to the barrier layer; and
a single crystalline silicon layer coupled to the bonding layer;
a buffer layer coupled to the single crystalline silicon layer;
a first epitaxial layer coupled to the buffer layer, wherein the first epitaxial layer is characterized by an epitaxial coefficient of thermal expansion substantially equal to the substrate coefficient of thermal expansion;
an undoped gallium nitride (GaN) layer coupled to the first epitaxial layer; and
a barrier layer coupled to the undoped GaN layer.
8. The multilayer HEMT device of claim 7 wherein the first epitaxial layer comprises doped GaN.
9. The multilayer HEMT device of claim 7 wherein the first epitaxial layer comprises alternating layers of undoped GaN and doped GaN.
10. The multilayer HEMT device of claim 9 wherein the doped GaN comprises carbon-doped GaN (C—GaN) or iron-doped GaN (Fe—GaN).
11. The multilayer HEMT device of claim 7 further comprising an aluminum gallium nitride (AlGaN) back barrier layer coupled to the first epitaxial layer, wherein the undoped GaN layer is coupled to the first epitaxial layer via the AlGaN back barrier layer.
12. The multilayer HEMT device of claim 11 wherein the AlGaN back barrier layer has an aluminum mole fraction ranging from about 3% to about 15%.
13. The multilayer HEMT device of claim 8 wherein the doped GaN comprises unintentionally doped GaN.
14. The multilayer HEMT device of claim 7 wherein the first epitaxial layer comprises carbon-doped GaN (C—GaN) or iron-doped GaN (Fe—GaN).
15. The multilayer HEMT device of claim 7 wherein the first epitaxial layer comprises at least one of a layer of GaN or a layer of AlGaN.
16. The multilayer HEMT device of claim 15 wherein the layer of AlGaN comprises carbon-doped AlGaN (C—AlGaN) or iron-doped AlGaN (Fe—AlGaN).
17. The multilayer HEMT device of claim 7 wherein the buffer layer comprises a series of AlGaN layers.
18. The method of claim 1 wherein the first epitaxial layer comprises at least one of a layer of GaN or a layer of AlGaN.