IP Library Granted Patent US 11,682,739
Granted Patent B2
US 11,682,739 · App. 16/432,702 · Granted Jun 20, 2023

Solar cells formed via aluminum electroplating

Inventors: Meng Tao (Fountain Hills, AZ); Wen-Cheng Sun (Tempe, AZ); Xiaofei Han (Tempe, AZ)
Assignee: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY
H01L31/022458C25D3/44C25D3/665C25D5/50C25D7/12C25D7/126H01L31/022425H01L31/1864Y02E10/50Y02P70/50
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Quick Facts
Patent No.
US 11,682,739
App. No.
16/432,702
Granted
Jun 20, 2023
Kind
B2
Abstract

Electroplating of aluminum may be utilized to form electrodes for solar cells. In contrast to expensive silver electrodes, aluminum allows for reduced cell cost and addresses the problem of material scarcity. In contrast to copper electrodes which typically require barrier layers, aluminum allows for simplified cell structures and fabrication steps. In the solar cells, point contacts may be utilized in the backside electrodes for increased efficiency. Solar cells formed in accordance with the present disclosure enable large-scale and cost-effective deployment of solar photovoltaic systems.

Claims (35)

1. A method for electroplating of aluminum onto silicon, comprising:

preparing an ionic liquid comprising aluminum chloride and an organic halide, the ionic liquid having a molar ratio of aluminum chloride:organic halide greater than 1;

pre-baking the ionic liquid at a temperature of between 100 degrees Celsius and 200 degrees Celsius for a period of between 30 minutes and 90 minutes to drive out residual moisture in the ionic liquid;

cleaning a silicon substrate with at least one of hydrogen fluoride, hydrogen chloride, hydrogen peroxide, or ammonia hydroxide;

depositing at least one of nickel or titanium onto a first side of the silicon substrate via a galvanostatic electroplating process forming a first layer of nickel or titanium, wherein the first layer of nickel or titanium has a thickness of between about 50 nanometers and about 99 nanometers and reduces the resistance of the silicon substrate or facilitates the adhesion of aluminum;

depositing aluminum onto the first layer of nickel or titanium via a galvanostatic electroplating process incorporating the ionic liquid, wherein the depositing is performed with the ionic liquid at a temperature of between 111 degrees Celsius and 150 degrees Celsius;

cleaning the silicon substrate with alcohol and deionized water;

annealing the silicon substrate to reduce the resistivity of the electroplated aluminum;

storing the ionic liquid under dry nitrogen in a dry nitrogen glove box; and

reusing the ionic liquid to electroplate a second silicon substrate.

2. The method of claim 1 , wherein the molar ratio is 3:2.

3. The method of claim 1 , wherein the organic halide is 1-ethyl-3-methylimidazolium.

4. The method of claim 1 , wherein the electroplating process utilizes a 2-electrode cell.

5. The method of claim 1 , wherein the electroplating process utilizes a 3-electrode cell.

6. The method of claim 1 , wherein the method further comprises:

depositing at least one of nickel or titanium onto a second side of the silicon substrate via a galvanostatic electroplating process forming a second layer of nickel or titanium, wherein the second layer of nickel or titanium has a thickness of between about 50 nanometers and about 500 nanometers and reduces the resistance of the silicon substrate or facilitates the adhesion of aluminum;

depositing aluminum onto the second layer of nickel or titanium via a galvanostatic electroplating process incorporating the ionic liquid, wherein the depositing is performed with the ionic liquid at a temperature of between 111 degrees Celsius and 150 degrees Celsius;

cleaning the silicon substrate a second time with alcohol and deionized water; and

annealing the silicon substrate a second time to reduce the resistivity of the electroplated aluminum.

7. The method of claim 1 , wherein annealing the silicon substrate to reduce the resistivity of the electroplated aluminum comprises using a laser to locally heat the silicon substrate.

8. The method of claim 1 , wherein annealing the silicon substrate to reduce the resistivity of the electroplated aluminum occurs in a dry nitrogen environment.

9. The method of claim 1 , wherein annealing the silicon substrate to reduce the resistivity of the electroplated aluminum occurs in a vacuum environment.

10. The method of claim 1 , wherein annealing the silicon substrate to reduce the resistivity of the electroplated aluminum occurs between about 200 degrees Celsius and about 450 degrees Celsius.

11. The method of claim 1 , wherein the organic halide comprises 1-butyl-3-methylimidazolium.

12. The method of claim 1 , wherein the organic halide comprises 1-methyl-3-ethylimidazolium.

13. The method of claim 1 , wherein the organic halide comprises ethyl-pyridinium.

14. The method of claim 1 , wherein the organic halide comprises n-(n-butyl) pyridinium.

15. The method of claim 1 , wherein the silicon substrate comprises a textured silicon wafer of either n-type or p-type.

16. The method of claim 15 , wherein the resistivity of the textured silicon wafer is between about 0.3 ohms-cm and about 10 ohms-cm.

17. The method of claim 1 , wherein the silicon substrate is operative as a counter electrode, wherein a first aluminum wire is operative as a working electrode, and wherein a second aluminum wire is operative as a reference electrode.

18. The method of claim 17 , wherein the method further comprises:

cleaning the first and second aluminum wires with 37% hydrochloric acid; and

rinsing the first and second aluminum wires with deionized water,

wherein the first and second aluminum wires are of at least 99.99% purity.

19. The method of claim 18 , wherein the method further comprises storing the electrodes in a dry nitrogen glove box.

Assignments (2)
CONFIRMATORY LICENSE Recorded Jan 30, 2020
From: ARIZONA STATE UNIVERSITY-TEMPE CAMPUS
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 051755/0027 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 6, 2019
From: TAO, MENG; SUN, WEN-CHENG; HAN, XIAOFEI
To: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY
Reel/Frame 049397/0266 →
Continuity (6)
Division 15079359 · Mar 24, 2016
Continuation PCTUS2014067338 · Nov 25, 2014
Provisional Application 62055378 · Sep 25, 2014
Provisional Application 62018320 · Jun 27, 2014
Provisional Application 61908824 · Nov 26, 2013
Related Publication 20190312162A1 · Oct 10, 2019