IP Library Granted Patent US 10,756,111
Granted Patent B2
US 10,756,111 · App. 16/439,278 · Granted Aug 25, 2020

Integrated assemblies having thicker semiconductor material along one region of a conductive structure than along another region, and methods of forming integrated assemblies

Inventor: Kunal R. Parekh (Boise, ID)
Assignee: Micron Technology, Inc.
H01L27/11582H01L21/0217H01L21/02164H01L21/76224H01L21/76877H01L27/11556H01L29/0649
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Quick Facts
Patent No.
US 10,756,111
App. No.
16/439,278
Granted
Aug 25, 2020
Kind
B2
Abstract

Some embodiments include an integrated assembly having a conductive structure which includes a semiconductor material over a metal-containing material. A stack of alternating conductive levels and insulative levels is over the conductive structure. A partition extends through the stack. The partition has wall regions, and has corner regions where two or more wall regions meet. The conductive structure includes a first portion which extends directly under the corner regions, and includes a second portion which is directly under the wall regions and is not directly under the corner regions. The first portion has a first thickness of the semiconductor material and the second portion has a second thickness of the semiconductor material. The first thickness is greater than the second thickness. Some embodiments include methods of forming integrated assemblies.

Claims (17)

1. An integrated assembly, comprising:

a conductive structure comprising a semiconductor material over a metal-containing material;

an assembly over the conductive structure and comprising a stack of wordline levels;

a partition extending through the stack; the partition comprising wall regions, and comprising corner regions where two or more wall regions meet; the partition dividing the assembly into sub-blocks; and

the conductive structure comprising a first portion which extends to directly under the corner regions, and comprising a second portion which is directly under the wall regions and is not directly under the corner regions;

the first portion comprising a thicker region of the semiconductor material than the second portion.

2. The integrated assembly of claim 1 wherein the partition directly contacts a top of the conductive structure.

3. The integrated assembly of claim 1 wherein the conductive structure has an overall thickness; wherein the semiconductor material of the first portion comprises greater than about half of said overall thickness; and wherein the semiconductor material of the second portion comprises less than or equal to about half of said overall thickness.

4. The integrated assembly of claim 1 comprising a CMOS under the conductive structure and electrically coupled with the conductive structure.

5. The integrated assembly of claim 1 wherein the conductive structure is a source structure coupled with the assembly.

6. The integrated assembly of claim 1 wherein the first portion of the conductive structure only comprises the semiconductor material.

7. The integrated assembly of claim 1 wherein the semiconductor material comprises conductively-doped silicon.

8. The integrated assembly of claim 1 wherein the partition only comprises insulative material.

9. The integrated assembly of claim 1 wherein the partition consists of silicon dioxide.

10. The integrated assembly of claim 1 wherein the partition comprises insulative panels on opposing sides of a conductive core.

11. The integrated assembly of claim 1 comprising cavities extending into the first portion; at least one of the cavities has a depth that is deeper than a thickness of the second thickness.

12. The integrated assembly of claim 1 wherein the semiconductor material is directly against the metal-containing material.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 17, 2024
From: MICRON TECHNOLOGY, INC.
To: LODESTAR LICENSING GROUP LLC
Reel/Frame 067135/0353 →
Continuity (2)
Continuation 16029144 · Jul 6, 2018
Related Publication 20200013798A1 · Jan 9, 2020