Semiconductor memory device
A semiconductor memory device includes a substrate, a first active pattern on the substrate, a gate electrode intersecting a channel region of the first active pattern, a first insulating layer covering the first active pattern and the gate electrode, a contact penetrating the first insulating layer so as to be electrically connected to a first source/drain region of the first active pattern, and a second active pattern on the first insulating layer. A channel region of the second active pattern vertically overlaps with the contact.
1. A semiconductor memory device comprising:
a substrate;
a first active pattern on the substrate;
a gate electrode intersecting a channel region of the first active pattern;
a first insulating layer covering the first active pattern and the gate electrode;
a conductive contact penetrating the first insulating layer so as to be electrically connected to a first source/drain region of the first active pattern; and
a second active pattern on the first insulating layer,
wherein a channel region of the second active pattern vertically overlaps with the conductive contact.
2. The semiconductor memory device of claim 1 , wherein each of the first active pattern and the second active pattern has a first surface, and a second surface which is opposite to the first surface and faces the substrate,
wherein the gate electrode is adjacent to the first surface of the first active pattern, and
wherein the conductive contact is adjacent to the second surface of the second active pattern.
3. The semiconductor memory device of claim 2 , further comprising:
a first gate dielectric layer disposed between the gate electrode and the first surface of the first active pattern; and
a second gate dielectric layer disposed between the conductive contact and the second surface of the second active pattern.
4. The semiconductor memory device of claim 1 , further comprising:
a device isolation layer covering a sidewall of the first active pattern; and
a capacitor electrode on the device isolation layer,
wherein a portion of the first insulating layer is disposed between the capacitor electrode and the conductive contact.
5. The semiconductor memory device of claim 4 , wherein a first width of the gate electrode is substantially equal to a second width of the capacitor electrode.
6. The semiconductor memory device of claim 1 , further comprising:
a lower conductive line electrically connected to a second source/drain region of the first active pattern,
wherein the lower conductive line extends in a first direction, and the gate electrode extends in a second direction intersecting the first direction.
7. The semiconductor memory device of claim 6 , wherein the first active pattern and the second active pattern extend in a third direction, and
wherein the third direction intersects both the first direction and the second direction.
8. The semiconductor memory device of claim 1 , further comprising:
a first upper conductive line electrically connected to a first source/drain region of the second active pattern; and
a second upper conductive line electrically connected to a second source/drain region of the second active pattern,
wherein the second upper conductive line extends in a first direction, and the first upper conductive line extends in a second direction intersecting the first direction.
9. The semiconductor memory device of claim 1 , wherein each of the first active pattern and the second active pattern includes an amorphous oxide semiconductor.
10. A semiconductor memory device comprising:
a substrate;
a first active pattern on the substrate;
a first device isolation layer covering a sidewall of the first active pattern;
a gate electrode and a capacitor electrode provided on the first active pattern and the first device isolation layer, respectively;
an insulating layer covering the first active pattern, the gate electrode, and the capacitor electrode;
a contact penetrating the insulating layer so as to be electrically connected to the first active pattern, the contact provided between the gate electrode and the capacitor electrode; and
a second active pattern on the contact.
11. The semiconductor memory device of claim 10 , wherein a first width of the gate electrode is substantially equal to a second width of the capacitor electrode.
12. The semiconductor memory device of claim 10 , further comprising:
a first gate dielectric layer disposed between the gate electrode and the first active pattern; and
a second gate dielectric layer disposed between the contact and the second active pattern.
13. The semiconductor memory device of claim 10 , further comprising:
a lower conductive line electrically connected to the first active pattern,
wherein the contact is connected to a first source/drain region of the first active pattern, and the lower conductive line is connected to a second source/drain region of the first active pattern,
wherein the lower conductive line extends in a first direction, and the gate electrode extends in a second direction intersecting the first direction.
14. The semiconductor memory device of claim 13 , wherein the first active pattern and the second active pattern extend in a third direction, and
wherein the third direction intersects both the first direction and the second direction.
15. A semiconductor memory device comprising:
a substrate;
a first active pattern on the substrate;
a gate electrode intersecting a channel region of the first active pattern;
a first insulating layer covering the first active pattern and the gate electrode;
a contact penetrating the first insulating layer so as to be electrically connected to a first source/drain region of the first active pattern;
a second active pattern on the first insulating layer, a channel region of the second active pattern vertically overlapping with the contact; and
a gate dielectric layer between the contact and the channel region of the second active pattern,
wherein the contact is configured to function as a gate for the channel region of the second active pattern.
16. The semiconductor memory device of claim 15 , wherein each of the first active pattern and the second active pattern has a first surface, and a second surface which is opposite to the first surface and faces the substrate,
wherein the gate electrode is adjacent to the first surface of the first active pattern, and
wherein the gate dielectric layer is between the contact and the second surface of the second active pattern.
17. The semiconductor memory device of claim 15 , wherein the second active pattern includes a second source/drain region and a third source/drain region that is spaced apart from the second source/drain region by the channel region of the second active pattern.
18. The semiconductor memory device of claim 15 , further comprising:
a device isolation layer covering a sidewall of the first active pattern; and
a capacitor electrode on the device isolation layer.