Apparatus and method of attaching pad on edge ring
An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.
1. An apparatus comprising:
a chamber defining a space for attaching a pad to an edge ring;
a pad support within the chamber and supporting the pad thereon;
an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon;
a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support; and
a vacuum exhaust system configured to create a vacuum atmosphere within the chamber,
wherein the pad support comprises a first plate having an annular or ring shape to support the pad,
wherein the edge ring support comprises a second plate on which the edge ring is detachably held,
wherein the driving system comprises a support plate configured to fixedly support the second plate, and
wherein the support plate is movable upward and downward through an inner opening of the first plate defined by the annular or ring shape.
2. The apparatus of claim 1 , wherein the pad support is directly on a bottom wall of the chamber, and the edge ring support is movable upward and downward over the pad support.
3. The apparatus of claim 1 , wherein the pad support comprises
a guide wall protruding from an inner upper surface of the first plate.
4. The apparatus of claim 3 , wherein the pad comprises a plurality of pad pieces that are arranged along a circumferential direction of the first plate to be spaced apart from each other.
5. The apparatus of claim 4 , wherein the pad support further comprises guide partitions which are positioned between adjacent ones of the pad pieces to position the pad pieces, the guide partitions protrude from an upper surface of the first plate, and the guide wall and the guide partitions define a plurality of pad piece seating surfaces on the first plate.
6. The apparatus of claim 1 , wherein the edge ring support comprises:
the second plate having an annular-shaped recess in which the edge ring is seated; and
a clamping member connected to an outer circumference of the second plate to secure the edge ring to the second plate.
7. The apparatus of claim 6 , wherein the driving system comprises:
a drive shaft connected to the support plate; and
a driving portion configured to move the drive shaft upward and downward.
8. The apparatus of claim 7 , wherein the support plate is movable upward and downward above the pad support.
9. The apparatus of claim 1 , further comprising a pressurizing member on the second plate and configured to press the second plate against the first plate.
10. The apparatus of claim 1 , wherein the pad comprises a ring-shaped continuous pad that is arranged along a circumferential direction of the first plate.
11. An apparatus comprising:
a chamber defining a space for attaching a pad to an edge ring;
a pad support within the chamber and on which the pad is disposed;
a driving system within the chamber, the driving system including a support plate, a drive shaft connected to the support plate and a driving portion configured to move the drive shaft upward and downward;
an edge ring support mountable on the support plate to face the pad support, the edge ring support detachably securing the edge ring thereon; and
a vacuum exhaust system configured to create a vacuum atmosphere within the chamber,
wherein the pad support comprises a first plate having an annular or ring shape to support the pad,
wherein the edge ring support comprises a second plate on which the edge ring is detachably held,
wherein the second plate is detachably mounted on a surface of the support plate, and
wherein the support plate is movable upward and downward through an inner opening of the first plate defined by the annular or ring shape.
12. The apparatus of claim 11 , wherein the pad support is detachably installed directly on a bottom wall of the chamber.
13. The apparatus of claim 12 , wherein the pad comprises a plurality of pad pieces that are arranged along a circumferential direction of the first plate to be spaced apart from each other.
14. The apparatus of claim 11 , wherein the edge ring support comprises
a clamping member connected to an outer circumference of the second plate to secure the edge ring to the second plate.
15. The apparatus of claim 14 , wherein an annular-shaped recess in which the edge ring is seated is defined in the second plate.
16. The apparatus of claim 11 , wherein the pad support comprises a guide wall protruding from an inner upper surface of the first plate.
17. The apparatus of claim 16 , wherein the pad comprises a plurality of pad pieces that are arranged along a circumferential direction of the first plate to be spaced apart from each other.
18. The apparatus of claim 17 , wherein the pad support further comprises guide partitions which are positioned between adjacent ones of the pad pieces to position the pad pieces, the guide partitions protrude from an upper surface of the first plate, and the guide wall and the guide partitions define a plurality of pad piece seating surfaces on the first plate.
19. The apparatus of claim 11 , further comprising a pressurizing member on the second plate and configured to press the second plate against the first plate.