Semiconductor structure and method of manufacturing the same
Present disclosure provides a semiconductor structure, including a semiconductor substrate, an insulator fin over the semiconductor substrate, the insulator fin having a principle dimension, from a cross sectional perspective, perpendicular to a top surface of the semiconductor substrate, and a semiconductor capping layer cover the insulator fin along the principle dimension. A method for manufacturing a semiconductor structure is also disclosed in the present disclosure.
1. A semiconductor structure, comprising:
a semiconductor substrate, comprising a gate region;
an insulator fin over the semiconductor substrate, the insulator fin having a principle dimension, from a cross sectional perspective, perpendicular to a top surface of the semiconductor substrate;
a semiconductor capping layer covering the insulator fin along the principle dimension and a top surface of the insulator fin, wherein the semiconductor capping layer comprises crystalline materials; and
a gate structure, wherein the gate structure is in physical contact with the semiconductor capping layer at the top surface and along the principal dimension of the insulator fin over the gate region, and a first portion of the semiconductor capping layer covered by the gate structure being configured as a channel structure, wherein a second portion of the semiconductor capping layer adjacent to the first portion is configured as a source/drain region, the second portion of the semiconductor capping layer is exposed from the gate structure and abutting the gate structure.
2. The semiconductor structure of claim 1 , further comprising an insulator layer between the insulator fin and the semiconductor substrate.
3. The semiconductor structure of claim 1 , wherein the insulator fin comprises SiO 2 , HfO 2 , SiOCN, or GeO.
4. The semiconductor structure of claim 1 , wherein the semiconductor capping layer comprises Si, Ge, SiGe, graphene, MoS 2 , WSe 2 , or HfTe 2 .
5. The semiconductor structure of claim 1 , wherein a thickness of the semiconductor capping layer allowing formation of a fully depleted region in the semiconductor capping layer under a predetermined bias.
6. The semiconductor structure of claim 1 , further comprising a conductible region in the semiconductor capping layer, the conductible region abutting the gate structure.
7. The semiconductor structure of claim 1 , wherein the principal dimension is in a range of from 5 nm to 100 nm.
8. The semiconductor structure of claim 1 , wherein the thickness of the capping layer is in a range of from 40Å to 20 nm.
9. The semiconductor structure of claim 2 , wherein at least a portion of the insulator layer is free from being under a coverage of the semiconductor capping layer, and the semiconductor capping layer is free from being in direct contact with the substrate.
10. A semiconductor structure, comprising:
a semiconductor substrate, comprising a gate region;
a first stripe extending along a first direction, the first stripe comprising:
an insulator core; and
a semiconductor cap covering a top surface and a sidewall of the insulator core, wherein the semiconductor cap comprises crystalline materials; and
a second stripe extending along a second direction substantially perpendicular to the first direction and being in direct contact with the semiconductor cap of the first stripe, wherein the second stripe is configured as a gate structure, a first portion of the semiconductor cap covered by the second stripe is configured as a channel structure, wherein a second portion of the semiconductor cap adjacent to the first portion is configured as a source/drain region.
11. The semiconductor structure of claim 10 , wherein a thickness of the semiconductor cap allowing formation of a fully depleted region in the semiconductor cap under a predetermined bias.
12. The semiconductor structure of claim 10 , further comprising an insulating layer between the first stripe and the semiconductor substrate.
13. The semiconductor structure of claim 10 , further comprising a conductible region in the semiconductor cap of the first stripe, the conductible region abutting the second stripe.
14. The semiconductor structure of claim 10 , wherein the semiconductor cap comprises Si, Ge, SiGe, graphene, MoS 2 , WSe 2 , or HfTe 2 .
15. The semiconductor structure of claim 10 , wherein the insulator core comprises SiO 2 , HfO 2 , SiOCN, or GeO.
16. A semiconductor structure, comprising:
a semiconductor substrate, comprising a gate region;
an insulator fin over the semiconductor substrate, the insulator fin extending along a first direction;
a semiconductor capping layer covering the insulator fin, wherein the semiconductor capping layer comprises crystalline material;
a gate structure over the insulator fin and the semiconductor capping layer, the gate structure extending along a second direction substantially perpendicular to the first direction, wherein the gate structure is in direct contact with the semiconductor capping layer, a first portion of the semiconductor capping layer covered by the gate structure is configured as a channel structure; and
an insulator layer between the insulator fin and the semiconductor substrate, wherein at least a portion of the insulator layer is free from being under a coverage of the semiconductor capping layer, and the semiconductor capping layer is free from being in direct contact with the semiconductor substrate.
17. The semiconductor structure of claim 16 , further comprising:
a conductible region in the semiconductor capping layer, the conductible region being a ion-implanted region in the semiconductor capping layer.
18. The semiconductor structure of claim 16 , further comprising:
a conductible region extending along the first direction over the semiconductor substrate and abutting the gate structure.
19. The semiconductor structure of claim 18 , wherein the conductible region covers a top surface and a sidewall of the insulator fin.
20. The semiconductor structure of claim 18 , wherein the conductible region is in contact with the semiconductor substrate.