Mach-Zehnder modulator
A Mach-Zehnder modulator includes: first and second resistive elements each having first and second contact areas, the first and second contact areas of the first resistive element being arranged in a direction of a first axis, the first and second contact areas of the second resistive element being arranged in a direction of a second axis; a common conductor connecting the first contact areas of the first and second resistive elements with each other; first and second waveguide structures each including a waveguide portion extending in a direction of a third axis intersecting the first and second axes; a first signal conductor connected to the waveguide portion of the first waveguide structure and the second contact area of the first resistive element; and a second signal conductor connected to the waveguide portion of the second waveguide structure and the second contact area of the second resistive element.
1. A Mach-Zehnder modulator comprising:
a first resistive element having a first contact area and a second contact area, the first contact area and the second contact area of the first resistive element being arranged in a direction of a first axis;
a second resistive element having a first contact area and a second contact area, the first contact area and the second contact area of the second resistive element being arranged in a direction of a second axis;
a common conductor making direct contact with the first contact area of the first resistive element and the first contact area of the second resistive element to directly electrically connect the first resistive element and the second resistive element with each other;
a first waveguide structure including a waveguide portion extending in a direction of a third axis intersecting the first axis and the second axis;
a second waveguide structure including a waveguide portion extending in the direction of the third axis;
a first signal conductor connected to the waveguide portion of the first waveguide structure and the second contact area of the first resistive element; and
a second signal conductor connected to the waveguide portion of the second waveguide structure and the second contact area of the second resistive element.
2. The Mach-Zehnder modulator according to claim 1 , further comprising a reference potential conductor extending along at least one of the first signal conductor and the second signal conductor.
3. The Mach-Zehnder modulator according to claim 2 , wherein the common conductor and the reference potential conductor are arranged in a direction of an axis normal to a principal face of a substrate and run in parallel to form a transmission line.
4. The Mach-Zehnder modulator according to claim 3 , further comprising a common mode terminator where the reference potential conductor is grounded.
5. The Mach-Zehnder modulator according to claim 1 , further comprising;
a semiconductor stage mounting the first resistive element and the second resistive element; and
an embedding region embedding the first waveguide structure and the second waveguide structure, the first resistive element and the second resistive element being disposed in the embedding region.
6. The Mach-Zehnder modulator according to claim 1 , further comprising a conductive semiconductor layer connecting the first waveguide structure and the second waveguide structure with each other.
7. The Mach-Zehnder modulator according to claim 1 , wherein the common conductor comprises gold.
8. The Mach-Zehnder modulator according to claim 1 , wherein a single resistive layer comprises the first and second resistive elements, the single resistive layer comprising a first portion, a second portion and a third portion between the first portion and the second portion, the third portion being connected to the common conductor.
9. The Mach-Zehnder modulator according to claim 1 , wherein the first and second resistive elements comprise first and second resistive layers respectively, each of the first and second resistive layers including a portion electrically connected to the common conductor comprising metal.