IP Library Granted Patent US 10,862,447
Granted Patent B2
US 10,862,447 · App. 16/452,037 · Granted Dec 8, 2020

Method for processing a lithium tantalate crystal substrate

Inventor: Mingxin Chen (Quanzhou, CN)
Assignee: Fujian Jing'An Optoelectronics Co., Ltd.
H03H3/08H03H9/02559H03H9/02622H03H9/64
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Quick Facts
Patent No.
US 10,862,447
App. No.
16/452,037
Granted
Dec 8, 2020
Kind
B2
Abstract

A method for processing a lithium tantalate crystal substrate includes providing a lithium tantalate crystal substrate and a metallic sheet, roughening at least one of the lithium tantalate crystal substrate and the metallic sheet, bringing the lithium tantalate crystal substrate and the metallic sheet into contact with each other after the at least one thereof is roughened, and subjecting the lithium tantalate crystal substrate to a reduction treatment. The reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate.

Claims (34)

1. A method for processing a lithium tantalate crystal substrate, comprising:

providing a lithium tantalate crystal substrate and a metallic sheet;

roughening at least one of the lithium tantalate crystal substrate and the metallic sheet;

bringing the lithium tantalate crystal substrate and the metallic sheet into contact with each other after the at least one thereof is roughened; and

subjecting the lithium tantalate crystal substrate to a reduction treatment,

wherein the reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate, and

wherein the at least one of the lithium tantalate crystal substrate and the metallic sheet is roughened via a chemical etching treatment.

2. The method as claimed in claim 1 , wherein the metallic sheet has a thickness ranging from 0.05 mm to 20 mm.

3. The method as claimed in claim 1 , wherein the metallic sheet comprises a metal component selected from the group consisting of aluminum, titanium, zinc, iron, and combinations thereof.

4. The method as claimed in claim 1 , wherein the chemical etching treatment is a wet etching treatment.

5. The method as claimed in claim 1 , wherein the at least one of the lithium tantalate crystal substrate and the metallic sheet is roughened to have a surface roughness that is larger than 3 μm and not greater than 10 μm.

6. The method as claimed in claim 1 , wherein the reduction treatment is conducted in the presence of a gas selected from the group consisting of a hydrogen gas, a carbon monoxide gas, a nitrous oxide gas, a nitrogen gas, an argon gas, and combinations thereof.

7. The method as claimed in claim 6 , wherein the gas has a flow rate ranging from 0.3 to 5.0 liters per minute.

8. The method as claimed in claim 1 , wherein the temperature for conducting the reduction treatment ranges from 350° C. to 610° C.

9. The method as claimed in claim 8 , wherein the reduction treatment is conducted for 3 to 12 hours.

10. The method as claimed in claim 1 , wherein the reduction treatment is conducted at a pressure ranging from 3.0 kPa to 20 kPa.

11. The method as claimed in claim 1 , wherein the lithium tantalate crystal substrate is roughened.

12. The method as claimed in claim 1 , wherein the metallic sheet is roughened.

13. The method as claimed in claim 1 , wherein the lithium tantalate crystal substrate and the metallic sheet are roughened.

14. A method for processing a lithium tantalate crystal substrate, comprising:

providing a lithium tantalate crystal substrate and a metallic sheet;

roughening at least one of the lithium tantalate crystal substrate and the metallic sheet;

bringing the lithium tantalate crystal substrate and the metallic sheet into contact with each other after the at least one thereof is roughened; and

subjecting the lithium tantalate crystal substrate to a reduction treatment,

wherein the reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate, and

wherein the at least one of the lithium tantalate crystal substrate and the metallic sheet is roughened to have a surface roughness that is larger than 3 μm and not greater than 10 μm.

15. The method as claimed in claim 14 , wherein the reduction treatment is conducted at a pressure ranging from 3.0 kPa to 20 kPa.

16. A method for processing a lithium tantalate crystal substrate, comprising:

providing a lithium tantalate crystal substrate and a metallic sheet;

roughening at least one of the lithium tantalate crystal substrate and the metallic sheet;

bringing the lithium tantalate crystal substrate and the metallic sheet into contact with each other after the at least one thereof is roughened; and

subjecting the lithium tantalate crystal substrate to a reduction treatment,

wherein the reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate, and

wherein the reduction treatment is conducted at a pressure ranging from 3.0 kPa to 20 kPa.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 26, 2020
From: CHEN, MINGXIN
To: FUJIAN JING'AN OPTOELECTRONICS CO., LTD.
Reel/Frame 053599/0697 →
Priority Claims (1)
CN 2016 1 1213934 · Dec 26, 2016 · national
Continuity (2)
Continuation In Part PCTCN2017097847 · Aug 17, 2017
Related Publication 20190326871A1 · Oct 24, 2019