IP Library › Granted Patent US 10,978,437
Granted Patent B2
US 10,978,437 · App. 16/456,311 · Granted Apr 13, 2021

Analog-mixed signal circuit cells with universal Fin pitch and poly pitch

Inventors: Jonathan Holland (Cary, NC); Jeffrey Charles Lee (Cary, NC); Chulkyu Lee (San Diego, CA); Harikrishna Chintarlapalli Reddy (Bengaluru, IN)
Assignee: QUALCOMM INCORPORATED
H01L27/0207H01L23/528H01L27/0629H03K17/687H01L28/20H01L28/40H01L29/785H03F3/45179
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Quick Facts
Patent No.
US 10,978,437
App. No.
16/456,311
Granted
Apr 13, 2021
Kind
B2
Abstract

An integrated circuit, comprising a transistor-based cell comprising a set of fin field effect transistors (Fin FETs) chained together in a first direction, wherein the set of Fin FETs include fins extending longitudinally along the first direction and equally-spaced apart in a second direction orthogonal to the first direction by a fin pitch, and a set of polysilicon gates extending longitudinally along the second direction and equally-spaced apart in the first direction by a poly pitch, wherein a first dimension of the transistor-based cell along the first direction is substantially a first integer multiplied by the poly pitch, and wherein a second dimension of the transistor-based cell along the second direction is substantially a second integer multiplied by the fin pitch. The integrated circuit may include other non-transistor-based cells (e.g., passive cells), such as thin-film resistor or capacitor cells, which are arranged in a two-dimensional array with the transistor-based cell.

Claims (34)

1. An integrated circuit, comprising:

a transistor-based cell comprising a set of fin field effect transistors (Fin FETs) chained together in a first direction, wherein the set of Fin FETs include fins extending longitudinally along the first direction and equally-spaced apart in a second direction orthogonal to the first direction by a fin pitch, and a set of polysilicon gates extending longitudinally along the second direction and equally-spaced apart in the first direction by a poly pitch, wherein a first dimension of the transistor-based cell along the first direction is substantially a first integer multiplied by the poly pitch, and wherein a second dimension of the transistor-based cell along the second direction is substantially a second integer multiplied by the fin pitch; and

a passive-device based cell including a passive device, wherein a third dimension of the passive-based cell along the first direction is substantially a third integer multiplied by the poly pitch, and wherein a fourth dimension of the passive-based cell along the second direction is substantially a fourth integer multiplied by the fin pitch.

2. The integrated circuit of claim 1 , wherein the set of Fin FET are configured to form a differential transistor pair.

3. The integrated circuit of claim 1 , wherein the transistor-based cell includes metal interconnects to configure the set of Fin FETs to form at least two independent drain connections, at least two independent gate connections, and a common source connection.

4. The integrated circuit of claim 1 , wherein the set of Fin FET are configured to form a pair of stacked Fin FETs.

5. The integrated circuit of claim 1 , wherein the transistor-based cell includes metal interconnects to configure the set of Fin FETs to form a pair of stacked Fin FETs with a single or redundant drain connection, a single or redundant source connection, and a single or redundant gate connection.

6. The integrated circuit of claim 1 , wherein the set of Fin FET are configured to form a stack of at least two (2) Fin FETs.

7. The integrated circuit of claim 1 , wherein the transistor-based cell includes metal interconnects to configure the set of Fin FETs to form a stack of at least four Fin FETs with a single or redundant drain connection, a single or redundant source connection, and a single or redundant gate connection.

8. The integrated circuit of claim 1 , wherein the transistor-based cell is configured as a dummy cell.

9. The integrated circuit of claim 1 , wherein the transistor-based cell includes metal interconnects to configure the set of Fin FETs to form a floating gate connection and a common source/drain connection.

10. The integrated circuit of claim 9 , wherein the common source/drain connection is electrically coupled to an upper voltage rail or a lower voltage rail.

11. The integrated circuit of claim 1 , wherein the transistor-based cell includes metal interconnects to configure the set of Fin FETs to form a stack of at least three Fin FETs including a single or redundant drain connection and a single or redundant source connection, wherein at least two of the stacked Fin FETs include a first gate connection, and at least the other stacked Fin FET has a second gate connection independent of the first gate connection.

12. The integrated circuit of claim 11 , wherein the second gate connection is configured to receive an enable signal or a cascode bias voltage.

13. The integrated circuit of claim 1 , wherein the passive device comprises a resistor or capacitor.

14. The integrated circuit of claim 1 , wherein the transistor-based cell is configured as a foot switch or a head switch.

15. The integrated circuit of claim 1 , wherein the transistor-based cell includes metal interconnects to configure the set of Fin FETs to form at least a stacked pair of the Fin FETs with a common gate connection, a pair of source connections, and a drain connection, a first dummy Fin FET coupled to one of the source connection, and a second dummy Fin FET coupled to the other source connection.

16. An integrated circuit, comprising a first row of transistor-based cells extending in a first direction, wherein each of the transistor-based cells includes a set of fin field effect transistors (Fin FETs) chained together in the first direction, wherein the set of Fin FETs include fins extending longitudinally in the first direction and equally-spaced apart in a second direction orthogonal to the first direction by a fin pitch, and a set of polysilicon gates extending longitudinally in the second direction and equally-spaced apart in the first direction by a poly pitch, wherein a first dimension of each of the transistor-based cells in the first direction is substantially a first integer multiplied by the poly pitch, and wherein a second dimension of each of the transistor-based cells in the second direction is substantially a second integer multiplied by the fin pitch, wherein the first row of transistor-based cells comprises:

a first set of one or more transistor-based cells including a first source connection;

a second set of one or more transistor-based cells including a second source connection independent of the first source connection; and

a break cell configured to electrically isolate the first source connection from the second source connection, wherein the first set of one or more transistor-based cells, the second set of one or more transistor-based cells, and the break cell are formed over a continuous diffusion region.

17. The integrated circuit of claim 16 , wherein the transistor-based cells of the first row include at least one operational cell situated between at least two dummy cells.

18. The integrated circuit of claim 16 , wherein the first row further includes a pair of endcaps, wherein the transistor-based cells are situated between the pair of endcaps.

19. The integrated circuit of claim 16 , wherein the break cell comprises:

a first source/drain connection electrically coupled to the first source connection;

a second source/drain connection electrically coupled to the second source connection; and

a gate connection electrically coupled to an upper or lower voltage rail.

20. The integrated circuit of claim 16 , further comprising a second row of transistor-based cells extending in the first direction, wherein each of the transistor-based cells of the second row includes a set of Fin FETs chained together in the first direction, wherein the set of Fin FETs include fins longitudinally extending in the first direction and equally-spaced apart in the second direction by the fin pitch, and a set of polysilicon gates extending longitudinally in the second direction and equally-spaced apart in the first direction by the poly pitch, wherein a third dimension of each of the transistor-based cells of the second row in the first direction is substantially a third integer multiplied by the poly pitch, and wherein a fourth dimension of each of the transistor-based cells in the second direction is substantially a fourth integer multiplied by the fin pitch.

21. The integrated circuit of claim 20 , wherein the first row includes opposite ends that substantially align in the first direction with opposite ends of the second row.

22. The integrated circuit of claim 21 , further comprising:

a third row including a top cap situated between a pair of top corner cells, wherein the third row includes opposite ends that substantially align with the respective opposite ends of the first and second rows in the first direction; and

a fourth row including a bottom cap situated between a pair of bottom corner cells, wherein the fourth row includes opposite ends that substantially align with the respective opposite ends of the first and second rows in the first direction.

23. An integrated circuit, comprising a first row of transistor-based cells extending in a first direction, wherein each of the transistor-based cells includes a set of fin field effect transistors (Fin FETs) chained together in the first direction, wherein the set of Fin FETs include fins extending longitudinally in the first direction and equally-spaced apart in a second direction orthogonal to the first direction by a fin pitch, and a set of polysilicon gates extending longitudinally in the second direction and equally-spaced apart in the first direction by a poly pitch, wherein a first dimension of each of the transistor-based cells in the first direction is substantially a first integer multiplied by the poly pitch, and wherein a second dimension of each of the transistor-based cells in the second direction is substantially a second integer multiplied by the fin pitch; and a thin-film resistor cell including a first dimension in the first direction being substantially a third integer multiplied by the poly pitch, and a second dimension in the second direction being substantially a fourth integer multiplied by the fin pitch.

24. An integrated circuit, comprising a first row of transistor-based cells extending in a first direction, wherein each of the transistor-based cells includes a set of fin field effect transistors (Fin FETs) chained together in the first direction, wherein the set of Fin FETs include fins extending longitudinally in the first direction and equally-spaced apart in a second direction orthogonal to the first direction by a fin pitch, and a set of polysilicon gates extending longitudinally in the second direction and equally-spaced apart in the first direction by a poly pitch, wherein a first dimension of each of the transistor-based cells in the first direction is substantially a first integer multiplied by the poly pitch, and wherein a second dimension of each of the transistor-based cells in the second direction is substantially a second integer multiplied by the fin pitch; and a capacitor cell including a first dimension in the first direction being substantially a third integer multiplied by the poly pitch, and a second dimension in the second direction being substantially a fourth integer multiplied by the fin pitch.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 23, 2019
From: HOLLAND, JONATHAN; LEE, JEFFREY CHARLES; LEE, CHULKYU; CHINTARLAPALLI REDDY, HARIKRISHNA
To: QUALCOMM INCORPORATED
Reel/Frame 050158/0630 →
Continuity (1)
Related Publication 20200411500A1 · Dec 31, 2020
Cited By (2)
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