IP Library Granted Patent US 10,985,740
Granted Patent B2
US 10,985,740 · App. 16/457,791 · Granted Apr 20, 2021

High voltage nanosecond pulser with variable pulse width and pulse repetition frequency

Inventors: James R. Prager (Seattle, WA); Timothy M. Ziemba (Bainbridge Island, WA); Kenneth E. Miller (Seattle, WA); John G. Carscadden (Seattle, WA); Ilia Slobodov (Seattle, WA)
Assignee: Eagle Harbor Technologies, Inc.
H03K3/57H03K17/005H03K17/56
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Quick Facts
Patent No.
US 10,985,740
App. No.
16/457,791
Granted
Apr 20, 2021
Kind
B2
Abstract

A nanosecond pulser is disclosed. In some embodiments, the nanosecond pulser may include one or more switch circuits including one or more solid state switches, a transformer, and an output. In some embodiments, the transformer may include a first transformer core, a first primary winding wound at least partially around a portion of the first transformer core, and a secondary winding wound at least partially around a portion of the first transformer core. In some embodiments, each of the one or more switch circuits are coupled with at least a portion of the first primary winding. In some embodiments, the output may be electrically coupled with the secondary winding and outputs electrical pulses having a peak voltage greater than about 1 kilovolt and a rise time of less than 150 nanoseconds or less than 50 nanoseconds.

Claims (39)

1. A digital pulser comprising:

a fast capacitor;

a switch circuit electrically coupled with the fast capacitor;

a transformer comprising:

a transformer core;

a primary winding wound at least partially around a portion of the transformer core, the switch circuit is coupled with at least a portion of the primary winding; and

a secondary winding wound at least partially around a portion of the transformer core; and

an output electrically coupled with the secondary winding that outputs electrical pulses having a peak voltage greater than about 1 kilovolt and a rise time of less than 150 nanoseconds;

wherein less than 50% of the energy stored within the fast capacitor is discharged to the transformer during a switch cycle.

2. The digital pulser of claim 1 , wherein the electrical pulses have an output pulse width that is variable and proportional to an input pulse width.

3. The digital pulser of claim 1 , wherein the electrical pulses have a pulse repetition frequency greater than 1 kHz.

4. The digital pulser of claim 1 , wherein the switch comprises one or more solid state switches, IGBTs, FETs, MOSFETs, or a SiC junction transistor.

5. The digital pulser of claim 1 , wherein less than 25% of the energy stored within the fast capacitor is discharged to the transformer during a switch cycle when the switch is closed.

6. The digital pulser of claim 1 , further comprising stray inductance between the fast capacitor and the switch is less than 50 nH.

7. The digital pulser of claim 1 , wherein further comprising stray inductance between the switch and the transformer is less than 50 nH.

8. The digital pulser of claim 1 , wherein the fast capacitor has a capacitance between about 1 μF and about 5 μF.

9. The digital pulser of claim 1 , wherein the fast capacitor has a capacitance between about 100 nF and about 1,000 nF.

10. A digital pulser comprising:

an energy storage capacitor having a capacitance between about 100 nF and about 1,000 nF;

a switch circuit electrically coupled with the fast capacitor, the switch circuit comprises a switch selected from the group consisting of an IGBT, an FET, a MOSFET, and an SiC junction transistor; and

an output electrically or inductively coupled with the switch circuit that outputs electrical pulses having a peak voltage greater than about 1 kilovolt and a rise time of less than 150 nanoseconds and a pulse repetition greater than 10 kHz;

wherein less than 50% of the energy stored within the fast capacitor is discharged to the transformer during a switch cycle.

11. The digital pulser of claim 10 , further comprising a transformer comprising:

a transformer core;

a primary winding wound at least partially around a portion of the transformer core, the switch circuit is coupled with at least a portion of the primary winding; and

a secondary winding wound at least partially around a portion of the transformer core, the output is coupled with the secondary winding.

12. The digital pulser of claim 10 , wherein less than 25% of the energy stored within the fast capacitor is discharged to the transformer during a switch cycle when the switch is closed.

13. The digital pulser of claim 10 , further comprising stray inductance between the fast capacitor and the switch is less than 50 nH.

14. The digital pulser of claim 10 , wherein further comprising stray inductance between the switch and the transformer is less than 50 nH.

15. The digital pulser of claim 10 , wherein the electrical pulses have an output pulse width that is variable and proportional to an input pulse width.

16. A digital pulser comprising:

an energy storage capacitor having a capacitance between about 1 μF and about 5 μF;

a switch circuit electrically coupled with the fast capacitor, the switch circuit comprises a switch selected from the group consisting of an IGBT, an FET, a MOSFET, and an SiC junction transistor; and

an output electrically or inductively coupled with the switch circuit that outputs electrical pulses having a peak voltage greater than about 1 kilovolt and a rise time of less than 150 nanoseconds and a pulse repetition greater than 10 kHz;

wherein less than 50% of the energy stored within the fast capacitor is discharged to the transformer during a switch cycle.

17. The digital pulser of claim 16 , wherein less than 25% of the energy stored within the fast capacitor is discharged to the transformer during a switch cycle when the switch is closed.

18. The digital pulser of claim 16 , further comprising stray inductance between the fast capacitor and the switch is less than 50 nH.

19. The digital pulser of claim 16 , wherein further comprising stray inductance between the switch and the transformer is less than 50 nH.

20. The digital pulser of claim 16 , wherein the electrical pulses have an output pulse width that is variable and proportional to an input pulse width.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 17, 2023
From: EAGLE HARBOR TECHNOLOGIES, INC.
To: EHT VENTURES LLC
Reel/Frame 065259/0258 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 2, 2019
From: CARSCADDEN, JOHN G.; ZIEMBA, TIMOTHY M.; SLOBODOV, ILIA; MILLER, KENNETH E.; PRAGER, JAMES R.
To: EAGLE HARBOR TECHNOLOGIES, INC.
Reel/Frame 049656/0755 →
Continuity (6)
Continuation 15921650 · Mar 15, 2018
Continuation 14798154 · Jul 13, 2015
Continuation 14542487 · Nov 14, 2014
Provisional Application 62023708 · Jul 11, 2014
Provisional Application 61904278 · Nov 14, 2013
Related Publication 20200162061A1 · May 21, 2020
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