IP Library Granted Patent US 11,699,634
Granted Patent B2
US 11,699,634 · App. 16/460,979 · Granted Jul 11, 2023

Water cooled plate for heat management in power amplifiers

Inventors: Ribhu Gautam (Bengaluru, IN); Ananthkrishna Jupudi (Singapore, SG); Vinodh Ramachandran (Singapore, SG)
Assignee: APPLIED MATERIALS, INC.
H01L23/473F28F3/12H01L23/36H01L23/367H01L23/46F28F2210/10
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,699,634
App. No.
16/460,979
Granted
Jul 11, 2023
Kind
B2
Abstract

Methods and apparatus for a cooling plate for solid state power amplifiers are provided herein. In some embodiments, a cooling plate of a solid state power amplifier includes a body having a rectangular shape, a first sidewall opposite a second sidewall, and a third sidewall opposite a fourth sidewall; a plurality of holes disposed on a first side of the body configured to mount a plurality of heat generating microelectronic components; and a channel having a plurality of segments disposed within the body and extending from a first port disposed on the first sidewall to a second port disposed on the first sidewall.

Claims (31)

1. A cooling plate of a solid state power amplifier, comprising:

a body having a rectangular shape including a first sidewall opposite a second sidewall and a third sidewall opposite a fourth sidewall, wherein the body includes a recess proximate the first sidewall that includes cutouts extending entirely through the body to accommodate components of the solid state power amplifier;

a plurality of holes disposed on a first side of the body configured to mount a plurality of heat generating microelectronic components; and

a channel having a plurality of segments disposed within the body and extending from a first port disposed on the first sidewall to a second port disposed on the first sidewall, wherein at least one segment of the plurality of segments extends through the fourth sidewall, wherein a first segment of the plurality of segments is a continuous linear segment that extends from the first port to a first junction, a second segment of the plurality of segments is a continuous linear segment that extends from the first junction to a second junction, a third segment of the plurality of segments extends from the second junction towards the second port, and a last segment of the plurality of segments extends from the second port, and wherein each of the plurality of segments extend only partially through the body.

2. The cooling plate of claim 1 , wherein the first port corresponds with an outlet and the second port corresponds with an inlet.

3. The cooling plate of claim 1 , wherein at least one of:

the channel has a diameter of about 4.0 mm to about 15.0 mm or a distance between the first sidewall and the second sidewall is about 300.0 mm to about 700.0 mm.

4. The cooling plate of claim 1 , further comprising a plug disposed in each of the at least one segment that extends through the fourth sidewall to seal the channel.

5. The cooling plate of claim 1 , wherein some of the plurality of segments extend parallel to each other in a mounting region, and wherein adjacent segments that extend parallel to each other are configured to flow a coolant in opposite directions.

6. The cooling plate of claim 1 , wherein the body comprises aluminum (Al), copper (Cu), or silver (Ag).

7. The cooling plate of claim 1 , wherein the plurality of segments have a substantially uniform cross-sectional flow area.

8. The cooling plate of claim 1 , wherein the third segment extends from the second junction towards the second port to a third junction, and the plurality of segments further includes a fourth segment extending from the third junction towards the third sidewall to a fourth junction, a fifth segment extending from the fourth junction towards the first sidewall to a fifth junction, a sixth segment extending from the fifth junction towards the fourth sidewall to a sixth junction, and the last segment is a seventh segment extending from the sixth junction directly to the second port.

9. The cooling plate of claim 1 , wherein the heat generating microelectronic components include field-effect transistors.

10. A solid state power amplifier, comprising:

a cooling plate having a first side configured to mount a plurality of heat generating microelectronic components and a channel disposed within the cooling plate and extending from an inlet to an outlet, wherein the inlet and the outlet are disposed on a first sidewall of the cooling plate, wherein the channel is configured to circulate a coolant, wherein the cooling plate has a thickness of about 15.0 mm to about 45.0 mm, wherein the channel includes a plurality of segments, wherein at least one segment of the plurality of segments extends through a sidewall orthogonal to the first sidewall,

wherein the cooling plate includes a recess proximate the first sidewall that includes cutouts extending entirely through the cooling plate to accommodate components of the solid state power amplifier, and

wherein the cooling plate includes a second recess proximate a second sidewall of the cooling plate, and a first guide channel extending from the second sidewall through the second recess to at least one of the plurality of segments.

11. The solid state power amplifier of claim 10 , wherein at least one of:

the cooling plate has a width of about 350.0 mm to about 482.0 mm, or

the cooling plate has a length of about 300.0 mm to about 700.0 mm.

12. The solid state power amplifier of claim 10 , wherein the cooling plate includes a first portion proximate the first sidewall and a second portion, wherein the second portion includes a mounting region having threaded holes configured to mount the plurality of heat generating microelectronic components.

13. The solid state power amplifier of claim 12 , wherein the channel includes the plurality of segments comprising a first segment coupled to the inlet, a second segment coupled to the outlet, and a first set of segments that extend parallel to each other between the first segment and the second segment in the second portion corresponding with the mounting region, and wherein adjacent segments of the first set of segments are configured to flow the coolant in opposite directions.

14. A method of cooling a solid state power amplifier, comprising:

drilling sidewalls of a cooling plate to a location disposed within the cooling plate without extending through the cooling plate to create a plurality of segments that define a channel within the cooling plate extending from an inlet to an outlet, wherein the inlet and the outlet are disposed on a first sidewall of the cooling plate and the channel has a substantially uniform cross-sectional area, wherein the cooling plate includes a recess to accommodate components of the solid state power amplifier, wherein the cooling plate has a first side configured to mount a plurality of heat generating microelectronic components, and wherein the channel is configured to circulate a liquid coolant;

drilling a guide channel from the recess to the channel;

plugging the guide channel adjacent the recess to prevent flow of the liquid coolant from the guide channel to the recess; and

flowing a liquid coolant from a coolant source through the channel.

15. The method of claim 14 , wherein flowing the liquid coolant comprises flowing at least one of water, deionized water, or ethylene glycol (CH 2 OH) 2 .

16. The method of claim 15 , wherein the liquid coolant has a temperature of about 5.0 to about 25.0 degrees Celsius.

17. The method of claim 14 , wherein drilling the sidewalls of the cooling plate comprises drilling a segment of the plurality of segments from the inlet into the cooling plate, drilling a segment of the plurality of segments from the outlet into the cooling plate, and drilling a segment of the plurality of segments from a sidewall orthogonal to the first sidewall to at least one of the segment from the inlet or the segment from the outlet, wherein drilling the guide channel is performed before drilling from the sidewall orthogonal to the first sidewall, and wherein the segment from the inlet is shorter than the segment from the outlet.

18. The method of claim 14 , further comprising plugging the channel at openings on sidewalls of the cooling plate that do not correspond with the inlet or the outlet.

Assignments (6)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 29, 2020
From: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
To: APPLIED MATERIALS, INC.
Reel/Frame 053915/0079 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 28, 2020
From: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
To: APPLIED MATERIALS, INC.
Reel/Frame 053898/0168 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 4, 2020
From: JUPUDI, ANANTHKRISHNA; RAMACHANDRAN, VINODH
To: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
Reel/Frame 052560/0079 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 5, 2019
From: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
To: APPLIED MATERIALS, INC.
Reel/Frame 050917/0604 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 20, 2019
From: GAUTAM, RIBHU
To: APPLIED MATERIALS SINGAPORE TECHNOLOGY PTE. LTD.
Reel/Frame 050445/0611 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 10, 2019
From: GAUTAM, RIBHU
To: APPLIED MATERIALS, INC.
Reel/Frame 049717/0072 →
Continuity (2)
Provisional Application 62843299 · May 3, 2019
Related Publication 20200350230A1 · Nov 5, 2020