Light detecting element and method of manufacturing same
The present technology relates to a light detecting element and a method of manufacturing the same that make it possible to reduce pixel size. The light detecting element includes a plurality of pixels arranged in the form of a matrix. Each of the pixels includes a first semiconductor layer of a first conductivity type formed in an outer peripheral portion in the vicinity of a pixel boundary, and a second semiconductor layer of a second conductivity type opposite from the first conductivity type formed on the inside of the first semiconductor layer as viewed in plan. A high field region formed by the first semiconductor layer and the second semiconductor layer when a reverse bias voltage is applied is configured to be formed in a depth direction of a substrate. The present technology is, for example, applicable to a photon counter or the like.
1. A light detecting element comprising:
a plurality of pixels arranged in a form of a matrix;
the plurality of pixels each including:
a first semiconductor layer of a first conductivity type, the first semiconductor layer being formed in an outer peripheral portion in a vicinity of a pixel boundary;
a second semiconductor layer of a second conductivity type opposite from the first conductivity type, the second semiconductor layer being formed on an inside of the first semiconductor layer, wherein the first semiconductor layer surrounds and is in direct contact with the second semiconductor layer in a plan view, and wherein a high field region is formed by the first semiconductor layer and the second semiconductor layer when a reverse bias voltage is applied being configured to be formed in a depth direction of a substrate; and
a third semiconductor layer of the second conductivity type on an inside of the second semiconductor layer in the plan view, the third semiconductor layer having a lower impurity concentration than the second semiconductor layer.
2. The light detecting element according to claim 1 , further comprising:
a separating portion that insulates and separates adjacent pixels from each other at
a pixel boundary, wherein the high field region is configured to be formed adjacent to the separating portion.
3. The light detecting element according to claim 1 , further comprising:
a fourth semiconductor layer of low impurity concentration and of the first conductivity type or the second conductivity type, the fourth semiconductor layer being adjacent to the second semiconductor layer in the depth direction of the substrate.
4. The light detecting element according to claim 3 , wherein the fourth semiconductor layer is adjacent to the second semiconductor layer on a front surface side of the substrate, and is of the second conductivity type.
5. The light detecting element according to claim 3 , wherein the fourth semiconductor layer is adjacent to the second semiconductor layer on a back surface side of the substrate, and is of the second conductivity type.
6. The light detecting element according to claim 3 , wherein the fourth semiconductor layer is adjacent to the second semiconductor layer on a front surface side of the substrate, and is of the first conductivity type.
7. The light detecting element according to claim 3 , wherein the fourth semiconductor layer is adjacent to the second semiconductor layer on a back surface side of the substrate, and is of the first conductivity type.
8. The light detecting element according to claim 1 , further comprising:
a readout circuit within a well of the first conductivity type, the well being formed in a front surface of the substrate.
9. The light detecting element according to claim 8 , wherein the readout circuit is shared by a plurality of pixels.
10. The light detecting element according to claim 8 , further comprising:
a fifth semiconductor layer of the first conductivity type, the fifth semiconductor layer being adjacent to the second semiconductor layer and being in the front surface of the substrate.
11. The light detecting element according to claim 10 , wherein the readout circuit switches between signal accumulation and readout by controlling a gate electrode.
12. A light detecting element comprising:
a plurality of pixels arranged in a form of a matrix;
each pixel including:
a first semiconductor layer of a first conductivity type, the first semiconductor layer being formed in an outer peripheral portion in a vicinity of a pixel boundary; and
a second semiconductor layer of a second conductivity type opposite from the first conductivity type, the second semiconductor layer being formed on an inside of the first semiconductor layer, wherein the first semiconductor layer surrounds and is in direct contact with the second semiconductor layer in a plan view, wherein a high field region is formed by the first semiconductor layer and the second semiconductor layer when a reverse bias voltage is applied being configured to be formed in a depth direction of a substrate, and wherein the second semiconductor layer has a potential gradient such that impurity concentration is increased toward a front surface of the substrate.