Vibrational energy harvester device
The present invention enables frequency response in a wide band without lowering the Q value. This vibrational energy harvester device is provided with: a movable part capable of vibration in a vibration direction as a result of mechanical vibrational energy applied from the exterior, said movable part being provided with a first surface along the vibration direction; and a fixed part provided with a second surface facing the first surface of the movable part with an interval therebetween, said fixed part being configured so as to be positionally fixed even against vibrational energy. A plurality of projections protruding in a direction orthogonal to the vibration direction are formed so as to be arranged like comb teeth in the vibration direction on each of the first surface of the movable part and the second surface of the fixed part. An electret film is formed on at least the first surface of the fixed part or on at least the second surface of the movable part. The vibrational energy harvester device is configured so that the spring rate of the movable part is modulated as a function of the position of the vibration direction by electrostatic force acting between the movable part and the fixed part.
1. A vibrational energy harvester device capable of vibrating in a vibration direction by an externally supplied vibrational energy, comprising:
a movable part having a first surface along the vibration direction; and
a fixed part which has a second surface opposed through a gap to the first surface and is positionally fixed to allow the movable part to vibrate in the vibration direction,
wherein
an electret film is formed on at least one of the fixed part and the movable part,
the first surface of the movable part and the second surface of the fixed part are provided with a plurality of projections which project in a direction orthogonal to the vibration direction and are disposed to form a shape like comb teeth in the vibration direction,
the electret film having an electret electric potential is formed on at least one of the first surface of the movable part and the second surface of the fixed part,
the movable part has a spring rate which is modulated according to a function of a positional parameter in the vibration direction through an electrostatic force acting between the movable part and the fixed part, and
the electret electric potential, an array pitch of the projections of the fixed part and the projections of the movable part, a difference between a maximum value and a minimum value of a capacitance between the fixed part and the movable part vibrationally shifting, are selected to reduce the spring rate of the movable part from an initial value of the spring rate corresponding to a free vibration of the movable part.
2. The vibrational energy harvester device according to claim 1 , wherein the fixed part and the movable part are MEMS (Micro Electro Mechanical System) devices formed from a semiconductor substrate.
3. The vibrational energy harvester device according to claim 2 , wherein the first surface of the movable part and the second surface of the fixed part are orthogonal to a substrate surface of the semiconductor substrate, both ends of the movable part in the vibration direction being supported by support beams formed from the semiconductor substrate to allow the movable part to vibrationally shift in the vibration direction.
4. The vibrational energy harvester device according to claim 1 , wherein the movable part has a plurality of the first surfaces along the vibration direction while the fixed part has a plurality of the second surfaces opposed to the first surfaces of the movable part.
5. The vibrational energy harvester device according to claim 1 , wherein the movable part is provided with a weight to apply a gravity in a direction crossing the vibration direction.
6. The vibrational energy harvester device according to claim 1 , further comprising:
a plurality of the movable parts in a direction orthogonal to the vibration direction,
wherein the fixed part has a plurality of the second surfaces opposed to the first surfaces of the movable part.