IP Library › Granted Patent US 11,066,742
Granted Patent B2
US 11,066,742 · App. 16/471,590 · Granted Jul 20, 2021

Vapor deposition mask

Inventors: Koji Yamabuchi (Sakai, JP); Masao Nishiguchi (Sakai, JP)
Assignee: SHARP KABUSHIKI KAISHA
C23C16/042H01L51/0011H01L51/56
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Quick Facts
Patent No.
US 11,066,742
App. No.
16/471,590
Granted
Jul 20, 2021
Kind
B2
Abstract

A first region of a valid portion formed on a mask sheet has a shape corresponding to a shape of each of active regions and provided for each active region of a vapor target substrate. A second region of the valid portion is located outside of the first region, and includes a plurality of vapor deposition holes (H) covered with a hauling sheet.

Claims (19)

1. A vapor deposition mask configured to be used to vapor-deposit a vapor-deposition layer on each of pixels of a vapor target substrate provided with a plurality of active regions on which the pixels contributing to displaying are arranged, the vapor deposition mask comprising:

a mask sheet provided with a valid portion extending across the plurality of active regions and including a plurality of vapor deposition holes formed to be arranged; and

a plurality of hauling sheets configured to support the mask sheet,

wherein the valid portion includes a first region and a second region,

the first region has a shape corresponding to a shape of each of the plurality of active regions, and is provided for each of the plurality of active regions,

the second region defines a shape of the first region, and overlaps with the plurality of hauling sheets to cause a portion of the plurality of vapor deposition holes to be covered, and

a region of the valid portion between hauling sheets located at both ends has a constant width,

the mask sheet includes a region having a width gradually increasing outward in a region outside of the region of the valid portion having a constant width, and

the region having the width gradually increasing outward overlaps with the plurality of hauling sheets.

2. The vapor deposition mask according to claim 1 ,

wherein the plurality of hauling sheets extend in a direction perpendicular to an extending direction of the valid portion.

3. The vapor deposition mask according to claim 1 ,

wherein the plurality of hauling sheets are in contact with a second surface of the mask sheet located on an opposite side to a first surface facing the vapor target substrate.

4. The vapor deposition mask according to claim 1 ,

wherein a pitch at which a plurality of vapor deposition holes present in the second region are arranged is an integral multiple of a pitch at which a plurality of vapor deposition holes present in the first region are arranged.

5. The vapor deposition mask according to claim 1 ,

wherein a width between the first regions is an integral multiple of a pitch of the plurality of vapor deposition holes.

6. The vapor deposition mask according to claim 1 , further comprising:

at least one cover sheet which fills a gap between the mask sheet and an additional mask sheet adjacent to the mask sheet.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2019
From: YAMABUCHI, KOJI; NISHIGUCHI, MASAO
To: SHARP KABUSHIKI KAISHA
Reel/Frame 049533/0279 →
Continuity (1)
Related Publication 20200385856A1 · Dec 10, 2020
Cited By (1)
US 12,312,670