X-ray tube and X-ray generation device
An X-ray tube includes: a vacuum housing configured to include an internal space which is vacuum; a target unit configured to be disposed in the internal space, and include a target that generates an X-ray by using an electron beam incident therein, and a target support unit that supports the target, the X-ray generated by the target being transmitted through the target support unit; an X-ray emission window configured to be so provided as to face the target support unit, and seal an opening of the vacuum housing, the X-rays transmitted through the target support unit being transmitted through the X-ray emission window; an elastic member configured to press the target unit in such a direction as to approach the X-ray emission window; and a target shift unit configured to shift the target unit pressed by the elastic member in a direction crossing an incidence direction of the electron beam.
1. An X-ray tube comprising:
a vacuum housing configured to include an internal space, the internal space being vacuum;
a target unit disposed in the internal space, and configured to include a target configured to generate an X-ray by using an electron beam incident therein, and a target support unit configured to support the target, the X-ray generated by the target being transmitted through the target support unit;
an X-ray emission window provided so as to face the target support unit, and configured to seal an opening of the vacuum housing, the X-rays transmitted through the target support unit being transmitted through the X-ray emission window;
an elastic member configured to press the target unit in such a direction as to approach the X-ray emission window; and
a target shift unit configured to shift the target unit pressed by the elastic member in a direction crossing an incidence direction of the electron beam.
2. The X-ray tube according to claim 1 , wherein
the target unit includes a target holding unit connected to the target shift unit, and configured to hold the target and the target support unit, and
the elastic member presses the target holding unit.
3. The X-ray tube according to claim 1 , wherein the elastic member is made of metal.
4. The X-ray tube according to claim 1 , wherein
the vacuum housing includes an elastic member support unit provided on an opposite side of the target unit from the X-ray emission window in the internal space, and configured to support the target unit via the elastic member, and
at least one of the target unit and the elastic member support unit is provided with a positioning portion configured to position the elastic member.
5. The X-ray tube according to claim 4 , wherein
the positioning portion is a groove provided in either one of the target unit and the elastic member support unit, and
the elastic member is slidably held relative to either the target unit or the elastic member support unit between the target unit and the elastic member support unit so as to be accommodated in the groove.
6. The X-ray tube according to claim 1 , further comprising a guide unit configured to guide a shift of the target unit shifted by the target shift unit.
7. The X-ray tube according to claim 6 , wherein the guide unit includes
a recess provided in either one of the target unit and the vacuum housing, and elongated in the shift direction of the target unit shifted by the target shift unit, and
a protrusion provided in another one of the target unit and the vacuum housing, and configured to enter the recess.
8. The X-ray tube according to claim 1 , wherein the elastic member presses the target unit such that the target unit comes into contact with an inner wall surface of the vacuum housing.
9. The X-ray tube according to claim 1 , wherein
the target unit is shifted by the target shift unit in such a manner as to slide on an inner wall surface of the vacuum housing, and
at least one of a region of the target unit in contact with the inner wall surface and a region of the inner wall surface in contact with the target unit includes a rough surface portion having surface roughness higher than surface roughness of a surface of the target support unit.
10. The X-ray tube according to claim 1 , wherein the X-ray emission window is separated from the target support unit.
11. The X-ray tube according to claim 1 , wherein the target unit includes a through hole communicating with an inside of a separation space defined between the target support unit and the X-ray emission window, and with an outside of the separation space.
12. An X-ray generation device comprising:
the X-ray tube according to claim 1 ;
a housing configured to house at least a part of the X-ray tube, insulating oil being sealed into the housing; and
a power supply portion electrically connected to the X-ray tube via a power supply unit.