Method of fastening a semiconductor chip on a lead frame, and electronic component
A method of attaching a semiconductor chip to a lead frame, including A) providing a semiconductor chip, B) applying a solder metal layer sequence on the semiconductor chip, C) providing a lead frame, D) applying a metallization layer sequence on the lead frame, E) applying the semiconductor chip on the lead frame via the solder metal layer sequence and the metallization layer sequence, and F) heating the arrangement produced under E) to attach the semiconductor chip to the lead frame, wherein the solder metal layer sequence includes a first metallic layer including an indium-tin alloy, a barrier layer arranged above the first metallic layer, and a second metallic layer including gold arranged between the barrier layer and the semiconductor chip.
1. A method of attaching a semiconductor chip to a lead frame, comprising:
A) providing a semiconductor chip,
B) applying a solder metal layer sequence on the semiconductor chip,
C) providing a lead frame,
D) applying a metallization layer sequence on the lead frame,
E) applying the semiconductor chip on the lead frame via the solder metal layer sequence and the metallization layer sequence, and
F) heating the arrangement produced under E) to attach the semiconductor chip to the lead frame, wherein the solder metal layer sequence comprises:
a first metallic layer comprising an indium-tin alloy, having a formula In x Sn 1-x , wherein 0.5≤x<1,
a barrier layer arranged above the first metallic layer, and
a second metallic layer comprising gold arranged between the barrier layer and the semiconductor chip.
2. The method according to claim 1 , wherein the metallization layer sequence comprises a first layer comprising nickel arranged above the lead frame.
3. The method according to claim 1 , wherein the barrier layer includes nickel, titanium, platinum or a titanium compound.
4. The method according to claim 1 , wherein, in step F), a connection layer sequence is formed between the lead frame and the semiconductor chip, and the connection layer sequence comprises:
a first intermetallic layer comprising indium and nickel or indium, tin and nickel,
a second intermetallic layer comprising indium and nickel; indium and titanium; indium and a titanium compound; indium and platinum; indium, tin and nickel; indium, tin and titanium; indium, tin and a titanium compound or indium, tin and platinum, and
a third intermetallic layer comprising indium and gold or indium, tin and gold.
5. The method according to claim 1 , wherein the metallization layer sequence comprises:
a first layer comprising nickel arranged above the lead frame,
a second layer comprising palladium arranged above the first layer, and
a third layer comprising gold arranged above the second layer.
6. The method according to claim 5 , wherein, in step E), the semiconductor chip is applied on the lead frame such that the first metallic layer of the solder metal layer sequence is applied on the third layer of the metallization layer sequence.
7. The method according to claim 1 , wherein the barrier layer has a layer thickness of 5 nm to 200 nm.
8. The method according to claim 1 , wherein the first metallic layer has a layer thickness of 750 nm to 3 μm.
9. The method according to claim 1 , wherein the second metallic layer has a layer thickness of 500 nm to 2 μm.
10. The method according to claim 5 , wherein the third layer has a layer thickness of 3 nm to 5 nm.