IP Library Granted Patent US 11,476,083
Granted Patent B2
US 11,476,083 · App. 16/491,057 · Granted Oct 18, 2022

Electrical devices with edge slits for mounting sample

Inventors: John Damiano, Jr. (Apex, NC); Hessam Ghassemi (Morrisville, NC); Ian Patrick Wellenius (Morrisville, NC); Rémy Berthier (Morrisville, NC)
Assignee: PROTOCHIPS, INC.
H01J37/244H01J37/20H01J37/26H01J2237/2008H01J2237/24564
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Quick Facts
Patent No.
US 11,476,083
App. No.
16/491,057
Granted
Oct 18, 2022
Kind
B2
Abstract

An electrical device for electrically measuring a sample during electron microscope imaging includes: a chip through which a slit is defined, the chip having at least one peripheral edge, the slit having an open end at the at least one peripheral edge; an electrically conductive first contact on the chip; and an electrically conductive second contact on the chip; wherein the slit is at least partially positioned between the first contacts and second contact. An electrically conductive first wire may extend along the chip electrically connected to the first contact; and an electrically conductive second wire may extend along the chip electrically connected to the second contact. The first wire and second wire may diverge from each other in extending along the chip away from the slit.

Claims (36)

1. An electrical device for electrically measuring a sample during electron microscope imaging, the electrical device comprising:

a chip through which a slit is defined, the chip having at least one peripheral edge, the slit having an open end at the at least one peripheral edge;

an electrically conductive first contact on the chip; and

an electrically conductive second contact on the chip;

wherein the slit is at least partially positioned between the first contact and the second contact, and

wherein the slit is defined entirely through the chip and defines a material void such that an electron beam can pass completely through the chip during electron microscope imaging to measure the sample.

2. The electrical device of claim 1 , further comprising:

an electrically conductive first wire extending along the chip and electrically connected to the first contact; and

an electrically conductive second wire extending along the chip and electrically connected to the second contact,

wherein the first wire and second wire diverge from each other in extending along the chip away from the slit.

3. The electrical device of claim 2 , further comprising:

an electrically conductive first pad electrically connected to the first contact through the first wire; and

an electrically conductive second pad electrically connected to the second contact through the second wire.

4. The electrical device of claim 2 , wherein the first wire and second wire extend away from the slit in opposite directions relative to each other.

5. The electrical device of claim 1 , wherein the electrical device has a rectangular shape defined by:

the at least one peripheral edge defining a linear peripheral first edge;

a linear peripheral second edge parallel to the first edge;

a linear peripheral third edge perpendicular to the first edge and the second edge; and

a linear peripheral fourth edge parallel to the third edge.

6. The electrical device of claim 5 , wherein the first edge, the second edge, the third edge, and the fourth edge together define a rectangular peripheral outer boundary of the chip interrupted only by the open end of the slit.

7. The electrical device of claim 1 , wherein:

the at least one peripheral edge is linear and defines a forward-most portion of the electrical device having a first length;

wherein the electrical device further comprises a second linear peripheral edge, which is parallel to the at least one peripheral edge and defines a rearward-most portion of the electrical device having a second length; and

the first length and the second length are essentially the same.

8. The electrical device of claim 1 , wherein the at least one peripheral edge is interrupted along the first length only by the open end of the slit.

9. The electrical device according to claim 1 , wherein the slit has two opposing parallel sides and terminates at a closed end.

10. The electrical device according to claim 9 , wherein the slit is defined entirely through the chip and defines a material void.

11. The electrical device according to claim 1 , wherein:

the chip comprises a planar first surface, and an opposite planar second surface parallel to the first surface; and

the slit defined through the chip is open at the first surface and second surface.

12. The electrical device according to claim 11 , wherein the slit expands from the first surface to the second surface.

13. The electrical device according to claim 12 , wherein the first contact and the second contact are mounted on or over the first surface.

14. The electrical device according to claim 12 , wherein, between the first surface and the second surface, the slit is defined between sloped planar side walls.

15. The electrical device of claim 1 , further comprising an electrically conductive third contact and an electrically conductive fourth contact positioned on the chip with the slit at least partially between the third contact and the fourth contact.

16. The electrical device of claim 15 , wherein the first contact and the second contact are essentially parallel to the slit.

17. The electrical device of claim 16 , wherein the third contact and the fourth contact are essentially perpendicular to the slit.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 15, 2020
From: BERTHIER, RÉMY
To: PROTOCHIPS, INC.
Reel/Frame 052402/0115 →
SECURITY INTEREST Recorded Oct 17, 2019
From: PROTOCHIPS, INC.
To: SALEM INVESTMENT PARTNERS IV, LIMITED PARTNERSHIP
Reel/Frame 050742/0983 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 4, 2019
From: DAMIANO, JOHN, JR.; GHASSEMI, HESSAM; WELLENIUS, IAN PATRICK
To: PROTOCHIPS, INC.
Reel/Frame 050266/0053 →
Continuity (2)
Provisional Application 62471133 · Mar 14, 2017
Related Publication 20200020505A1 · Jan 16, 2020