Diluted chemical liquid production apparatus capable of controlling pH and oxidation-reduction potential
A diluted chemical liquid production apparatus has a structure that has a platinum group metal carrying resin column, a membrane-type deaeration apparatus and a gas dissolving membrane apparatus, which are sequentially provided in a supply line of ultrapure water; and has a pH adjuster injection device and an oxidation-reduction potential adjuster injection device, which are provided between the platinum group metal carrying resin column and the membrane-type deaeration apparatus. An inert gas source is connected to a gaseous phase side of the membrane-type deaeration apparatus, and an inert gas source is also connected to the gaseous phase side of the gas dissolving membrane apparatus; and a discharge line communicates with the gas dissolving membrane apparatus. A pH meter and an ORP meter are provided in the discharge line. Such a diluted chemical liquid production apparatus can control a pH and an oxidation-reduction potential.
1. A diluted chemical liquid production apparatus comprising:
a platinum group metal carrying resin column and a membrane type deaeration apparatus, which are sequentially provided in an ultrapure water supply line; and
a pH adjuster injection device for adding a pH adjuster into ultrapure water and an oxidation-reduction potential adjuster injection device for adding an oxidation-reduction potential adjuster, which are provided between the platinum group metal carrying resin column and the membrane type deaeration apparatus, and a diluted chemical liquid is obtained by adding the pH adjuster and the oxidation-reduction potential adjuster into ultrapure water;
wherein the membrane type deaeration apparatus includes a liquid phase chamber for passing the diluted chemical liquid and a gaseous phase chamber for removing a gas dissolved in the diluted chemical liquid composed by a hydrophobic gas permeable membrane;
wherein an inert gas is provided into the membrane type deaeration apparatus, and
wherein a final diluted chemical liquid is obtained by passing ultrapure water through the platinum group metal carrying resin column, the pH adjuster injection device, the oxidation-reduction potential adjuster injection device and the membrane type deaeration apparatus.
2. The diluted chemical liquid production apparatus according to claim 1 , comprising a gas dissolving membrane apparatus for receiving the diluted chemical liquid deaerated by the membrane type deaeration apparatus.
3. The diluted chemical liquid production apparatus according to claim 1 , comprising pH measuring means and oxidation-reduction potential measuring means for measuring the diluted chemical liquid deaerated by the membrane type deaeration apparatus.
4. The diluted chemical liquid production apparatus according to claim 1 , wherein the pH adjuster is ammonia, and the oxidation-reduction potential adjuster is hydrogen peroxide.