Saw resonator comprising layers for attenuating parasitic waves
The invention relates to a SAW resonator ( 100 ) comprising at least: a substrate ( 102 ); a layer ( 108 ) of piezoelectric material arranged on the substrate; a first attenuation layer ( 112 ) arranged between the substrate and the layer of piezoelectric material, and/or, when the substrate comprises at least two different layers ( 104, 106 ), a second attenuation layer ( 114 ) arranged between the two layers of the substrate; and in which the at least one attenuation layer is/are heterogeneous.
1. A surface acoustic wave resonator, SAW, comprising at least:
a substrate;
a layer of piezoelectric material arranged on the substrate; and
at least one of a first attenuation layer arranged between the substrate and the layer of piezoelectric material and, when the substrate comprises at least two separate layers, a second attenuation layer arranged between the two layers of the substrate;
wherein the at least one of the first attenuation layer and the second attenuation layer is able to diffuse or absorb at least one portion of parasitic acoustic waves, and comprises at least one of:
porous silicon, and
polysilicon in which are arranged doped regions that render the attenuation layer or layers heterogeneous, the doped regions being selectively doped differently from a remainder of the at least one of the first attenuation layer and the second attenuation layer.
2. The SAW resonator according to claim 1 , wherein the piezoelectric material comprises at least one material selected from the group consisting of LTO, LNO, quartz, Langatate, Langasite, and Langanite.
3. The SAW resonator according to claim 1 , wherein at least one of the first attenuation layer and the second attenuation layer comprises at least one of the following features: porosities, cavities, at least one face at least partially rough.
4. The SAW resonator according to claim 3 , wherein, when the first attenuation layer or the second attenuation layer comprises porosities or cavities, the porosities or the cavities of at least one of the first attenuation layer and the second attenuation layer each have a substantially spherical or cylindrical shape.
5. The SAW resonator according to claim 1 , wherein:
the first attenuation layer is separate from the substrate and from the layer of piezoelectric material, or corresponds to a portion of at least one of the substrate and the layer of piezoelectric material, or
the second attenuation layer is separate from the two layers of the substrate, or corresponds to a portion of at least one of the two layers of the substrate.
6. The SAW resonator according to claim 1 , further comprising electrodes arranged on the layer of piezoelectric material.
7. A method for producing a surface acoustic wave resonator, SAW, comprising:
producing at least one of a first attenuation layer on a substrate and, when the substrate comprises at least two separate layers, a second attenuation layer between the two layers of the substrate, said at least one of the first attenuation layer and the second attenuation layer comprising at least one of:
porous silicon, and
polysilicon in which are arranged doped regions that render the attenuation layer or layers heterogeneous, the doped regions being selectively doped differently from a remainder of the at least one of the first attenuation layer and the second attenuation layer; and
producing a layer of piezoelectric material on the substrate or, when the first attenuation layer is present on the substrate, on the first attenuation layer;
wherein said at least one of the first attenuation layer and the second attenuation layer is able to diffuse or absorb at least one portion of parasitic acoustic waves.
8. The method according to claim 7 , wherein producing said at least one of the first attenuation layer and the second attenuation layer comprises at least one selected from the group consisting of:
depositing at least one porous material;
producing cavities by implementation of steps of photolithography and etching;
depositing material on a rough surface, forming said at least one of the first attenuation layer and the second attenuation layer; and
forming roughnesses on at least one face of said at least one of the first attenuation layer and the second attenuation layer.
9. A surface acoustic wave resonator, SAW, comprising at least:
a substrate;
a layer of piezoelectric material arranged on the substrate; and
at least one of a first attenuation layer arranged between the substrate and the layer of piezoelectric material and, when the substrate comprises at least two separate layers, a second attenuation layer arranged between the two layers of the substrate,
wherein said at least one of the first attenuation layer and the second attenuation layer is able to diffuse or absorb at least one portion of parasitic acoustic waves, and comprises at least one of porous silicon and polysilicon in which are arranged doped regions that render the attenuation layer or layers heterogeneous, and
when the first attenuation layer or the second attenuation layer comprises porosities or cavities, the porosities or the cavities of at least one of the first attenuation layer and the second attenuation layer each have a substantially spherical or cylindrical shape.