Switch circuit, semiconductor device using same, and switching method
A switch circuit includes: a plurality of four-terminal switches having variable-resistance elements and a rectifier element serially connected; an input line and an output line, at least one of which is multiply present, to which are connected terminals of two switches other than terminals at which the variable-resistance terminals are serially connected; and a control line to which are connected the terminals of the two switches other than the terminals at which the rectifier elements are serially connected, the control line, together with the input line and the output line, turning on and off in turn, by pair, the pair of variable-resistance elements connected to the input line and the pair of variable-resistance elements connected to the output line, among the variable-resistance elements of the plurality of four-terminal switches of the four-terminal switches connected to the input line or the output line.
1. A switch circuit comprising:
a plurality of four-terminal switches in each of which two switches each including a variable-resistance element and a rectifier element being connected in series, each of the variable-resistance element and the rectifier element including two terminals, are connected at the terminals on the series connections;
an input line and an output line each connected to the terminal of the variable-resistance element in the two switches, the terminal being separate from the terminal on the series connection, a number of at least one of the input line and the output line being more than one; and
a control line each connected to the terminal of the rectifier element in the two switches, the terminal being separate from the terminal on the series connection, wherein,
out of the variable-resistance elements in a plurality of the four-terminal switches out of the four-terminal switches connected to one of the input line and the output line, the control line turns on or off, with the input line and the output line, a group of the variable-resistance elements connected to the input line and a group of the variable-resistance elements connected to the output line, sequentially for each group.
2. The switch circuit according to claim 1 , wherein, out of the variable-resistance elements in a plurality of the four-terminal switches out of the four-terminal switches connected to one of the input line and the output line, the control line first turns on a group of the variable-resistance elements connected to the one of the input line and the output line.
3. The switch circuit according to claim 1 , wherein, out of the variable-resistance elements in a plurality of the four-terminal switches out of the four-terminal switches connected to one of the input line and the output line, the control line first turns off a group of the variable-resistance elements separate from the variable-resistance elements connected to the one of the input line and the output line.
4. The switch circuit according to claim 1 , wherein the control line turns on or off a group of the variable-resistance elements connected to the input line and a group of the variable-resistance elements connected to the output line, simultaneously for each group.
5. The switch circuit according to claim 1 , wherein the four-terminal switch allows signal transmission on the input line and the output line by turning on both of the two variable-resistance elements included in the four-terminal switch.
6. The switch circuit according to claim 1 , wherein the variable-resistance element includes a variable-resistance layer using a metal bridge.
7. The switch circuit according to claim 1 , wherein the rectifier element includes a bipolar rectifying layer.
8. The switch circuit according to claim 7 , wherein the rectifying layer contains amorphous silicon and silicon nitride.
9. A semiconductor device comprising a semiconductor integrated circuit including the switch circuit according to claim 1 .
10. The semiconductor device according to claim 9 , wherein
the semiconductor integrated circuit includes a wiring layer, and
the switch circuit is provided in the wiring layer.
11. A switching method of a switch circuit including:
a plurality of four-terminal switches in each of which two switches each including a variable-resistance element and a rectifier element being connected in series, each of the variable-resistance element and the rectifier element including two terminals, are connected at the terminals on the series connections;
an input line and an output line each connected to the terminal of the variable-resistance element in the two switches, the terminal being separate from the terminal on the series connection, a number of at least one of the input line and the output line being more than one; and
a control line each connected to the terminal of the rectifier element in the two switches, the terminal being separate from the terminal on the series connection, the switching method comprising,
out of the variable-resistance elements in a plurality of the four-terminal switches out of the four-terminal switches connected to one of the input line and the output line, turning on or off a group of the variable-resistance elements connected to the input line and a group of the variable-resistance elements connected to the output line, sequentially for each group.
12. The switching method according to claim 11 , further comprising,
out of the variable-resistance elements in a plurality of the four-terminal switches out of the four-terminal switches connected to one of the input line and the output line, first turning on a group of the variable-resistance elements connected to the one of the input line and the output line.
13. The switching method according to claim 11 , further comprising,
out of the variable-resistance elements in a plurality of the four-terminal switches out of the four-terminal switches connected to one of the input line and the output line, first turning off a group of the variable-resistance elements separate from the variable-resistance elements connected to the one of the input line and the output line.
14. The switching method according to claim 11 , further comprising
turning on or off a group of the variable-resistance elements connected to the input line and a group of the variable-resistance elements connected to the output line, simultaneously for each group.
15. The switching method according to claim 11 , further comprising
allowing signal transmission on the input line and the output line by turning on both of the two variable-resistance elements included in the four-terminal switch.
16. The switching method according to claim 11 , wherein the variable-resistance element includes a variable-resistance layer using a metal bridge.
17. The switching method according to claim 11 , wherein the rectifier element includes a bipolar rectifying layer.
18. The switching method according to claim 17 , wherein the rectifying layer contains amorphous silicon and silicon nitride.