Light-emitting semiconductor device having flat portion and concave-convex portion for enhanced light extraction efficiency
A semiconductor device according to the present invention comprises: a conductive substrate; a semiconductor structure disposed on the conductive substrate and comprising a first conductive-type semiconductor layer, a second conductive-type semiconductor layer, and an active layer disposed between the first conductive-type semiconductor layer and the second conductive-type semiconductor layer; and a first electrode disposed on the semiconductor structure and electrically connected to the first conductive-type semiconductor layer, wherein the semiconductor structure further comprises a 1-1 conductive-type semiconductor layer between the first conductive-type semiconductor layer and the first electrode; and the top surface of the semiconductor structure comprises a flat part, on which the first electrode is disposed, and a concave-convex part surrounding the flat part, wherein a second distance, which is from the bottom surface of the semiconductor structure to the bottom surface of the concave-convex part contacting a side surface of the flat part, may be between 70% or more and 95% or less with respect to a first distance, which is from the bottom surface of the semiconductor structure to the top surface of the 1-1 conductive-type semiconductor layer. The present invention may enhance light flux by improving the current spreading phenomenon of the semiconductor device.
1. A semiconductor device comprising:
a conductive substrate;
a semiconductor structure disposed on the conductive substrate and including a first conductive semiconductor layer, a second conductive semiconductor layer, and an active layer disposed between the first conductive semiconductor layer and the second conductive semiconductor layer; and
a first electrode disposed on the semiconductor structure and electrically connected to the first conductive semiconductor layer, wherein
the semiconductor structure further includes a 1-1 conductive semiconductor layer between the first conductive semiconductor layer and the first electrode, and a top surface of the semiconductor structure includes a flat part, on which the first electrode is disposed, and a concave-convex part surrounding the flat part, wherein
a second distance from a bottom surface of the semiconductor structure to a bottom surface of the concave-convex part contacting with a side surface of the flat part is 70 to 95% of a first distance from the bottom surface of the semiconductor structure to a top surface of the 1-1 conductive semiconductor layer,
wherein the second conductive semiconductor layer includes a 2-1 conductive semiconductor layer closest to the active layer, and a 2-2 conductive semiconductor layer disposed on a bottom of the 2-1 conductive semiconductor layer, and
wherein the 2-2 conductive semiconductor layer includes a first area having a tilt angle the same as a tilt angle of a side surface of the active layer, and a second area having a width larger than a horizontal width of the first area.
2. The device according to claim 1 , wherein a horizontal width of the 1-1 conductive semiconductor layer is the same as a horizontal width of the first electrode.
3. The device according to claim 1 , wherein a width of the flat part is two to three times of a width of the top surface of the 1-1 conductive semiconductor layer.
4. The device according to claim 1 , further comprising a pad electrode directly contacting the first conductive semiconductor layer.
5. The device according to claim 4 , wherein a top surface of the first electrode surrounds a top surface of the pad electrode, and a stacking structure of the first electrode is different from a stacking structure of the pad electrode.
6. The device according to claim 4 , wherein a top surface of the pad electrode is disposed in a circular shape.
7. The device according to claim 1 ,
wherein the 2-1 conductive semiconductor layer and the 2-2 conductive semiconductor layer are configured of different materials.
8. The device according to claim 1 , wherein the 2-2 conductive semiconductor layer includes a first dopant and a second dopant,
wherein the second conductive semiconductor layer further includes a 2-3 conductive semiconductor layer disposed on a bottom of the 2-2 conductive semiconductor layer and including the first dopant and the second dopant, and
wherein a concentration of the first dopant included in the 2-2 conductive semiconductor layer and a concentration of the first dopant included in the 2-3 conductive semiconductor layer are different from each other, and a concentration of the second dopant included in the 2-2 conductive semiconductor layer and a concentration of the second dopant included in the 2-3 conductive semiconductor layer are different from each other.
9. The device according to claim 8 ,
wherein a ratio of a thickness of the first area to a thickness of the second area is 1:1 to 2:3.
10. A semiconductor device comprising:
a conductive substrate;
a semiconductor structure disposed on the conductive substrate and including a first conductive semiconductor layer, a second conductive semiconductor layer, and an active layer disposed between the first conductive semiconductor layer and the second conductive semiconductor layer;
a first electrode electrically connected to the first conductive semiconductor layer;
a second electrode electrically connected to the second conductive semiconductor layer; and
a current blocking unit disposed between the second conductive semiconductor layer and the second electrode, wherein
the current blocking unit include a plurality of recesses, wherein
the first electrode and the current blocking unit are vertically overlapped, and a horizontal width of the current blocking unit is one to five times of a horizontal width of the first electrode,
wherein the second conductive semiconductor layer includes a 2-1 conductive semiconductor layer closest to the active layer, a 2-2 conductive semiconductor layer disposed on a bottom of the 2-1 conductive semiconductor layer, and a 2-3 conductive semiconductor layer disposed on a bottom of the 2-2 conductive semiconductor layer, and
wherein the plurality of recesses pass through the 2-3 conductive semiconductor layer and expose a portion of the 2-2 conductive semiconductor layer.
11. The device according to claim 10 , wherein a material of the second electrode is different than a material of the current blocking unit.
12. The device according to claim 11 , wherein the material of the second electrode includes a first metal material, and the material of the current blocking unit includes a second metal material different than the first metal material.
13. The device according to claim 10 , wherein a material of the current blocking unit includes an insulation material different than a metal material of the second electrode.
14. The device according to claim 10 , wherein the second electrode is disposed inside the plurality of recesses.
15. The device according to claim 10 , wherein the 2-2 conductive semiconductor layer includes a first area having a tilt angle the same as a tilt angle of a side surface of the active layer, and a second area having a width larger than a horizontal width of the first area.
16. The device according to claim 15 , wherein a ratio of a thickness of the first area to a thickness of the second area is 1:1 to 2:3.
17. The device according to claim 10 , wherein the 2-2 conductive semiconductor layer includes a first dopant and a second dopant, and the 2-3 conductive semiconductor layer includes the first dopant and the second dopant, and
wherein a concentration of the first dopant included in the 2-2 conductive semiconductor layer and a concentration of the first dopant included in the 2-3 conductive semiconductor layer are different from each other, and a concentration of the second dopant included in the 2-2 conductive semiconductor layer and a concentration of the second dopant included in the 2-3 conductive semiconductor layer are different from each other.
18. The device according to claim 10 , wherein a horizontal width of the 1-1 conductive semiconductor layer is the same as a horizontal width of the first electrode.
19. The device according to claim 10 , wherein a top surface of the 1-1 conductive semiconductor structure includes a flat part, on which the first electrode is disposed, and a concave-convex part surrounding the flat part, and
wherein a width of the flat part is two to three times of a width of a top surface of the 1-1 conductive semiconductor layer.
20. The device according to claim 10 , further comprising a pad electrode directly contacting the first conductive semiconductor layer,
wherein a top surface of the first electrode surrounds a top surface of the pad electrode, and a stacking structure of the first electrode is different from a stacking structure of the pad electrode, and
wherein the top surface of the pad electrode is disposed in a circular shape.