IP Library › Granted Patent US 11,231,382
Granted Patent B2
US 11,231,382 · App. 16/501,641 · Granted Jan 25, 2022

Integrated thermal sensor comprising a photonic crystal

Inventor: William N. Carr (Cary, NC)
G01N27/18B82Y15/00B82Y20/00G01J5/20G01N25/18G01N27/125G01N27/22G01N27/4141G02B6/107H01J49/025H01L27/16
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Quick Facts
Patent No.
US 11,231,382
App. No.
16/501,641
Granted
Jan 25, 2022
Kind
B2
Abstract

An integrated thermal sensor comprising photonic crystal elements that enable photonic elements for photonic sourcing, spectral switching and filtering, sensing of an exposed analyte and detection. In embodiments, applications are disclosed wherein these photonic elements provide a spectrophotometer, a photonic channel switch and a standalone sensor for toxic gases and vapors. An application coupled with a mobile phone is disclosed.

Claims (33)

1. An integrated photonic crystal sensor (IPCS) comprising photonic elements, including:

a photonic source (PS), a photonic crystal waveguide sensor (PCWS) comprising a photonic crystal (PC), and a photonic crystal waveguide detector (PCWD); and

a photonic carrier signal created in the PS that propagates from the PS into and through the PCWS, and terminates in the PCWD,

wherein the PCWD receives the photonic carrier signal that propagates through the PCWS and detects an amplitude of the photonic carrier signal, wherein the PCWD is sensitive to the amplitude and wherein the photonic carrier signal is propagated between the photonic elements through separate photonic waveguide (PW) or photonic crystal waveguide (PCW) interposer structures,

wherein the PCWS is sensitive to an analyte by way of a detected change in amplitude of the photonic carrier signal

wherein the photonic carrier signal is propagated between the photonic elements through separate photonic waveguide (PW) or photonic crystal waveguide (PCW) interposer structures,

and further including one or more micro-platforms supported by nanowires in which the one or more micro-platforms is at least partially supported from a surrounding substrate by multiple electrically-conducting phononic nanowires, the one or more micro-platforms comprising one or more of the PS, PCWS, and PCWD

wherein said phononic nanowires comprise a layer of crystalline semiconductor further comprising a phononic structure, wherein the phononic structure comprises phonon scattering sites and/or phononic crystal,

wherein the layer reduces thermal conductivity

and wherein the PS, PCWS, and PCWD are configured to identify a molecular species of the analyte.

2. The IPCS of claim 1 wherein the carrier signal propagates between photonic elements via a photonic waveguide (PW) interposer or photonic crystal waveguide (PCW) interposer.

3. The IPCS of claim 1 wherein one or more photonic elements comprise a resistively heated micro-platform powered from an external source, thereby providing control for a photonic signal amplitude, photonic signal wavelength passband, and platform surface outgassing.

4. The IPCS of claim 1 wherein one or more of the micro-platforms is disposed in an environment reducing convective and conductive thermal heat transport to or from the one or more micro-platforms is reduced for the purpose of self-cooling through spontaneous blackbody radiation.

5. The IPCS of claim 1 wherein one or more of the micro-platforms is cooled by an integral Peltier thermoelectric device.

6. The IPCS of claim 1 wherein the PS comprises a light emitting platform (LEP) and is adapted with a resonant filter split ring resonator (SRR), photonic Bragg grating or LC resonant circuit to provide an infrared photonic carrier signal of reduced bandwidth.

7. The IPCS of claim 1 wherein the first layer of the phononic nanowires comprises a random or periodic deposition of phonon scattering sites within or on the surface of said phononic nanowires, and further wherein the phonon scattering sites are physically separated by distances less than a mean-free-path of heat conducting phonons, thereby reducing thermal conductivity.

8. The IPCS of claim 1 wherein a layer of the phononic nanowires comprises phononic crystal characterized by a phononic bandgap, thereby reducing thermal conductivity.

9. The IPCS of claim 1 wherein a layer of the phononic nanowires comprise one or more of multiple holes, cavities, phononic Bragg line structure, atomic-level superlattices, atomic-level vacancies and implanted particulates disposed physically in random or periodic fashion.

10. The IPCS of claim 1 wherein one or more of the phononic nanowires is comprised of one or more additional layers comprising a metallic atomic layer deposition (ALD) layer for increasing electrical conductivity or mechanical stress control.

11. The IPCS of claim 1 wherein the photonic carrier signal from the PS comprises at least one infrared wavelength band and within an infrared spectral wavelength range.

12. The IPCS of claim 1 wherein the PS comprises one or more of a light emitting platform (LEP), light emitting diode (LED), OLED or laser.

13. The IPCS of claim 1 wherein the PS comprises a heated micro-platform, the micro-platform further comprising a heated blackbody source of radiation structured with one or more of a split ring resonator (SRR), surface plasmon particles, 1-D Bragg grating and LC resonant structure to create a photonic carrier signal of limited bandwidth.

14. The ICPS of claim 1 further adapted with a photonic crystal waveguide filter (PCWF) comprising an additional photonic element disposed into the photonic carrier signal interposer path between the PS and the PCWS, wherein the PCWF modulates the amplitude of the photonic carrier signal.

15. The IPCS of claim 1 wherein an electromagnetic field created by the photonic crystal (PC) structure within the PCWS penetrates into and electromagnetically couples with the molecular structure of the exposed analyte, wherein the coupling modulates the amplitude of the photonic carrier signal.

16. The IPCS of claim 15 wherein the PC of the PCWS is structured with photonic defect sites thereby increasing said coupling.

17. The IPCS of claim 15 wherein the PC structure of the PCWS is configured for slow-wave propagation of the photonic carrier signal thereby increasing said coupling.

18. The IPCS of claim 15 wherein the PC of the PCWS is configured as a Mach-Zehnder interferometer.

19. The IPCS of claim 15 wherein the PCWS is configured with photonic structure sensitive to one or more of a molecular species contained within the exposed analyte, including toxic gas species, volatile hydrocarbons, and complex molecules.

20. The IPCS of claim 1 wherein the PCWD comprises a micro-platform thermally isolated by phononic nanowires and structured with a device for sensing temperature of the micro-platform, wherein the micro-platform is heated by absorption of the photonic carrier signal.

21. The IPCS of claim 20 wherein the temperature sensing device comprises one or more of a Seebeck thermoelectric, pyroelectric, thermistor and MOST device.

22. The IPCS of claim 1 wherein the PCWD comprises a pn junction bandgap diode sensitive to wavelengths over a range from 0.3 micrometers into the infrared range.

23. The IPCS of claim 1 wherein the PS is a narrowband, noncoherent light emitting platform (LEP) supplying a photonic carrier signal comprised of one or more wavelength bands of infrared with the IPCS further configured for operation as an infrared spectrophotometer.

24. The IPCS of claim 1 wherein the PS, PCWS, and PCWD are disposed on a common semiconductor or ceramic substrate.

Continuity (6)
Continuation In Part 16221500 · Dec 15, 2018
Continuation In Part 15632462 · Jun 26, 2017
Continuation In Part 15624625 · Jun 15, 2017
Provisional Application 62043376 · Jun 15, 2016
Provisional Application 62742405 · Oct 7, 2018
Related Publication 20200018714A1 · Jan 16, 2020
Cited By (2)
US 12,446,468 US 12,455,190