IP Library Granted Patent US 11,022,542
Granted Patent B2
US 11,022,542 · App. 16/504,100 · Granted Jun 1, 2021

On-chip spectroscopic sensors with optical fringe suppression

Inventors: William Green (Yorktown Heights, NY); Chu Cheyenne Teng (Princeton, NJ); Gerard Wysocki (Princeton, NJ); Eric Zhang (Yorktown Heights, NY)
Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
G01N21/27G01J3/28G01J3/42G01J3/45G01N21/39G01N33/0047G01J2003/2869G01J2003/423G01N21/274G01N2021/399G01N2201/06113G01N2201/1211
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,022,542
App. No.
16/504,100
Granted
Jun 1, 2021
Kind
B2
Abstract

An on-chip spectroscopic sensor includes a tunable diode laser. A laser driver for drives the tunable diode laser. An analyte test cavity receives a chemical sample and exposes the received chemical sample to light from the tunable diode laser. An optical detector detects light emerging from the analyte test cavity as a result of the laser exposure. A spectral analyzer determines a spectrum of the emerging light, matches and removes one or more known optical fringe patterns from the determined spectrum, and determines a composition or concentration of the chemical sample from the optical fringe pattern-removed spectrum.

Claims (39)

1. A method for performing spectroscopy, comprising:

using a spectroscopic sensor to acquire spectra at a plurality of different temperatures at regular temperature increments over a temperature range;

identify temperature-dependent etalon patterns at each of the regular temperature increments within the temperature range;

store the identified temperature-dependent etalon patterns at each of the regular temperature increments within a database;

measure an ambient temperature at a time of subsequent acquisition;

use the spectroscopic sensor to acquire a subsequent spectra;

retrieve, from the database, the temperature-dependent etalon patterns for the ambient temperature at the time of subsequent acquisition;

remove the temperature-dependent etalon patterns for the ambient temperature at the time of subsequent acquisition from the acquired subsequent spectra.

2. The method of claim 1 , further comprising:

determining a composition or concentration of gas sample from the temperature-dependent etalon pattern-removed subsequent spectrum.

3. The method of claim 2 , further comprising using the determined composition or concentration of the gas sample to detect fugitive methane.

4. The method of claim 2 , wherein retrieving, from the database, the temperature-dependent etalon patterns for the ambient temperature at the time of subsequent acquisition comprises:

constructing a fitting model for the temperature-dependent etalon patterns for the ambient temperature at the time of subsequent acquisition;

applying the one constructed fitting model to the acquired subsequent spectra by performing least mean square (LMS); and

evaluating a fit residual of the applied fitting model.

5. A method for detecting fugitive methane gas, comprising:

installing a spectroscopic sensor apparatus into a calibration tool;

using the spectroscopic sensor apparatus within the calibration tool to identify a plurality of different temperature-dependent etalon patterns at regular temperature increments within a predetermined temperature range;

store the plurality of temperature-dependent etalon patterns within a database;

configure the spectroscopic sensor apparatus by constructing an etalon removal model that is configured to measure an ambient temperature at a time of subsequent acquisition, use the spectroscopic sensor apparatus to acquire a subsequent spectra, retrieve, from the database, the temperature-dependent etalon patterns for the ambient temperature at the time of subsequent acquisition, adjust the retrieved temperature-dependent etalon patterns by correcting for laser frequency ramping instabilities by allowing each of the retrieved temperature-dependent etalon patterns to be stretched/contracted;

removing the configured spectroscopic sensor apparatus from the calibration tool;

installing the configured spectroscopic sensor apparatus to a final location; and

using the spectroscopic sensor apparatus installed at the final location to detect fugitive methane.

6. The method of claim 5 , wherein using the spectroscopic sensor apparatus to detect fugitive methane includes:

acquiring the subsequent spectra causing the spectroscopic sensor apparatus;

removing background from the acquired subsequent spectrum using the constructed etalon removal model; and

identifying the presence of fugitive methane by analyzing the background-removed spectrum.

7. The method of claim 5 , wherein the predetermined temperature range is from 20° C. to 30° C. and the regular temperature intervals are 1×10 −4 ° C.

8. The method of claim 5 , wherein configure the spectroscopic sensor apparatus further includes copying the database to the spectroscopic sensor apparatus.

9. The method of claim 5 , wherein the etalon removal model allows for least-mean-squares (LMS) fitting.

10. The method of claim 6 , wherein the etalon removal model is constructed using the formula:

I t ( v ( t ))= I 0 ( v ( t ))× e −σ(v(t))NL ×fringe background

where v(t) represents laser frequency as a function of time, I t represents transmitted laser intensity or equivalently the measured spectrum, I 0 represents incident laser intensity, σ represents cross section of light absorption by a single particle, L represents optical pathlength of the sensor, and N represents analyte concentration.

11. The method of claim 5 , wherein the final location is a methane conduit or facility handling methane.

12. A method for determining ambient temperature in spectroscopy, comprising:

using a spectroscopic sensor to acquire spectra;

identifying a temperature-dependent etalon pattern from the acquired spectra;

searching a database of temperature-dependent etalon patterns indexed by temperature to find a match for the identified temperature-dependent etalon pattern; and

determining an ambient temperature based on a temperature index of the matched temperature-dependent etalon pattern.

Assignments (2)
CONFIRMATORY LICENSE Recorded Oct 29, 2020
From: INTERNATIONAL BUSINESS MACHINES CORPORATION
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 054248/0988 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 5, 2019
From: GREEN, WILLIAM; TENG, CHU CHEYENNE; WYSOCKI, GERARD; ZHANG, ERIC
To: INTERNATIONAL BUSINESS MACHINES CORPORATION
Reel/Frame 049677/0295 →
Continuity (3)
Continuation 15914455 · Mar 7, 2018
Provisional Application 62506376 · May 15, 2017
Related Publication 20190331593A1 · Oct 31, 2019