Furnace for seeded sublimation of wide band gap crystals
An apparatus for physical vapor transport growth of semiconductor crystals having a cylindrical vacuum enclosure defining an axis of symmetry; a reaction-cell support for supporting a reaction cell inside the vacuum enclosure; a cylindrical reaction cell made of material that is transparent to RF energy and having a height Hcell defined along the axis of symmetry; an RF coil provided around exterior of the vacuum enclosure and axially centered about the axis of symmetry, wherein the RF coil is configured to generate a uniform RF field along at least the height Hcell; and, an insulation configured for generating thermal gradient inside the reaction cell along the axis of symmetry. The ratio of height of the RF induction coil, measured along the axis of symmetry, to the height Hcell may range from 2.5 to 4.0 or from 2.8 to 4.0.
1. A method comprising:
positioning a cylindrical RF induction coil coaxially with a quartz vacuum chamber;
providing a reaction cell, wherein the reaction cell defines an axial length measured as reaction cell height along its axis of rotational symmetry, and wherein a ratio of height of the cylindrical RF induction coil, measured along the axis of rotational symmetry, to the axial length of the reaction cell is from 2.5 to 4.0;
loading the reaction cell with a seed crystal and source material;
arranging insulation around the reaction cell for generating a thermal gradient inside the reaction cell;
placing the reaction cell on a support inside the quartz vacuum chamber;
rotating the reaction cell inside the quartz vacuum chamber during growth process of a semiconductor crystal;
energizing the cylindrical RF induction coil for generating an electromagnetic field around the reaction cell when the reaction cell is positioned co-axially with the cylindrical RF induction coil, coaxially to the quartz vacuum chamber, and at a center of the coil with respect to its axial length,
wherein the support is in a form of a tubular pedestal configured to be movable along the axis of the reaction cell and connected with a bottom base plate configured for contacting a bottom portion of the quartz vacuum chamber,
wherein a water cooled chamber base is disposed above the reaction cell when the reaction cell is positioned below the quartz vacuum chamber,
wherein the base plate is attached to a seal adapter to comprise a ferrofluidic seal,
wherein the rotating of the reaction cell includes the seal adapter, comprising the ferrofluidic seal, rotating the reaction cell during the growth process after the reaction cell is moved through the water cooled chamber base to inside the quartz vacuum chamber.
2. The method of claim 1 , wherein the arranging insulation comprises arranging the insulation made of graphite.
3. The method of claim 1 , further comprising forcing air flow around exterior wall of the quartz vacuum chamber.
4. The method of claim 1 , further comprising positioning a water jacket on exterior wall of the quartz vacuum chamber.
5. The method of claim 1 , further comprising configuring the support so that it does not absorb energy from the electromagnetic field and supports the reaction cell inside the quartz vacuum chamber, such that the reaction cell is positioned axially centrally to the axis of rotational symmetry.
6. The method of claim 1 , further comprising providing a fiberoptic pyrometer head for temperature measurement.
7. The method of claim 6 , further comprising attaching the fiberoptic pyrometer head to an X-Y translation stage to enable measurements at different locations.
8. The method of claim 1 , further comprising slicing the semiconductor crystal after growth using a multiwire slicing system.
9. The method of claim 1 , wherein the loading of the reaction cell with the seed crystal and source material comprises loading the reaction cell with a 100 mm 4H-SiC seed.
10. The method of claim 1 , further comprising doping the semiconductor crystal during growth with nitrogen to generate resistivity of from 0.016 to 0.028 Ohm-cm.