Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
Systems, devices, and methods for micro-electro-mechanical system (MEMS) tunable capacitors can include a fixed actuation electrode attached to a substrate, a fixed capacitive electrode attached to the substrate, and a movable component positioned above the substrate and movable with respect to the fixed actuation electrode and the fixed capacitive electrode. The movable component can include a movable actuation electrode positioned above the fixed actuation electrode and a movable capacitive electrode positioned above the fixed capacitive electrode. At least a portion of the movable capacitive electrode can be spaced apart from the fixed capacitive electrode by a first gap, and the movable actuation electrode can be spaced apart from the fixed actuation electrode by a second gap that is larger than the first gap.
1. A method for manufacturing a micro-electro-mechanical system (MEMS) variable capacitor, the method comprising:
depositing and patterning a conductor on a substrate to form one or more fixed actuation electrodes and one or more fixed capacitive electrodes;
depositing and patterning a sacrificial layer over the fixed actuation electrodes and the fixed capacitive electrodes;
etching the sacrificial layer to form a first recess in a region of the sacrificial layer above the one or more fixed capacitive electrode and one or more second recesses above the one or more fixed actuation electrodes;
depositing one or more standoff bump in the one or more second recesses above the fixed actuation electrode;
depositing and patterning a conductor on the sacrificial layer to form movable actuation electrodes above the fixed actuation electrodes and to form movable capacitive electrodes above the fixed capacitive electrodes;
depositing and patterning a structural material layer on the movable actuation electrodes and the movable capacitive electrodes; and
removing the sacrificial layer such that the movable actuation electrode, the movable capacitive electrode, and the structural material layer define a movable component suspended above the substrate and movable with respect to the fixed actuation electrode and the fixed capacitive electrode;
wherein at least a portion of the movable capacitive electrode is spaced apart from the fixed capacitive electrode by a first gap;
wherein the movable actuation electrode is spaced apart from the fixed actuation electrode by a second gap that is larger than the first gap; and
wherein the one or more second recesses is sized such that the one or more standoff bump extends between the one or more fixed actuation electrodes and the movable actuation electrode a distance that is substantially equal to a difference between a dimension of the first gap and a dimension of the second gap.
2. The method of claim 1 further comprising depositing one or more additional layers above the structural material layer.
3. The method of claim 2 wherein one or more of the additional layers are patterned.
4. The method of claim 1 further comprising depositing a first dielectric layer over the fixed actuation electrodes and the fixed capacitive electrodes prior to depositing the sacrificial layer.
5. The method of claim 4 wherein the first dielectric layer is patterned.
6. The method of claim 4 further comprising depositing a second dielectric layer over the sacrificial layer after forming the first recess.
7. The method of claim 6 wherein the second dielectric layer is patterned.
8. The method of claim 1 further comprising depositing a dielectric layer over the sacrificial layer after forming the first recess.
9. The method of claim 8 wherein the dielectric layer is patterned.
10. The method of claim 6 , wherein depositing one or more standoff bump and depositing a second dielectric layer comprise a single deposition of a dielectric material.
11. The method of claim 8 , wherein depositing one or more standoff bump and depositing a dielectric layer comprise a single deposition of a dielectric material.