Ferroelectric structure for semiconductor devices
The present disclosure relates to a semiconductor device includes a substrate and first and second spacers on the substrate. The semiconductor device includes a gate stack between the first and second spacers. The gate stack includes a gate dielectric layer having a first portion formed on the substrate and a second portion formed on the first and second spacers. The first portion includes a crystalline material and the second portion comprises an amorphous material. The gate stack further includes a gate electrode on the first and second portions of the gate dielectric layer.
1. A method of forming a semiconductor device, comprising:
forming a substrate;
forming first and second spacers on the substrate;
depositing an interface layer, wherein a first portion of the interface layer is deposited on the substrate and a second portion of the interface layer is deposited on the first and second spacers;
depositing an amorphous dielectric layer on the interface layer, wherein first and second portions of the amorphous dielectric layer are deposited on the first and second portions of the interface layer, respectively;
performing a plasma treatment on the amorphous dielectric layer, wherein the plasma treatment converts the first portion of the amorphous dielectric layer into a crystalline dielectric layer; and
forming a gate electrode on the crystalline dielectric layer and the second portion of the amorphous dielectric layer.
2. The method of claim 1 , wherein depositing the amorphous dielectric layer comprises depositing a hafnium-based oxide material.
3. The method of claim 1 , wherein the crystalline dielectric layer comprises a crystalline ferroelectric material.
4. The method of claim 1 , wherein performing the plasma treatment comprises applying a radio frequency (RF) plasma using argon and ammonia gas mixtures or argon and nitrogen gas mixtures.
5. The method of claim 4 , wherein performing the plasma treatment comprises applying the RF plasma on the amorphous dielectric layer anisotropically.
6. A method of forming a semiconductor device, comprising:
forming an opening, comprising a pair of sidewalls and a bottom surface;
depositing an amorphous dielectric layer in the opening, comprising:
depositing a first portion of the amorphous dielectric layer on the bottom surface; and
depositing a second portion of the amorphous dielectric layer on the pair of sidewalls;
performing a plasma treatment on the amorphous dielectric layer, wherein the plasma treatment converts the first portion of the amorphous dielectric layer into a crystalline dielectric layer without converting the second portion of the amorphous dielectric layer; and
depositing a conductive structure in contact with the crystalline dielectric layer and the second portion of the amorphous dielectric layer.
7. The method of claim 6 , wherein depositing the amorphous dielectric layer comprises depositing a hafnium-based oxide material.
8. The method of claim 6 , wherein the crystalline dielectric layer comprises a crystalline ferroelectric material.
9. The method of claim 6 , wherein performing the plasma treatment comprises applying a radio frequency (RF) plasma using argon and ammonia gas mixtures or argon and nitrogen gas mixtures.
10. The method of claim 6 , wherein performing the plasma treatment comprises applying an RF plasma on the amorphous dielectric layer anisotropically.
11. The method of claim 6 , wherein the first portion of the amorphous dielectric layer extends under the second portion of the amorphous dielectric layer.
12. The method of claim 6 , further comprising depositing an interface layer on a substrate, wherein the opening is surrounded by the interface layer.
13. The method of claim 6 , wherein depositing the second portion of the amorphous dielectric layer comprises depositing an amorphous material on the bottom surface.
14. The method of claim 6 , wherein the crystalline dielectric layer is in contact with the pair of sidewalls.
15. The method of claim 6 , wherein the plasma treatment is performed at a temperature between about 500° C. and about 900° C.
16. A method of forming a semiconductor device, comprising:
depositing an amorphous gate dielectric layer, comprising a vertical portion and a horizontal portion;
performing a plasma treatment on the horizontal portion of the amorphous gate dielectric layer to convert the horizontal portion into a crystalline gate dielectric layer; and
forming a gate electrode in contact with the crystalline gate dielectric layer and the vertical portion of the amorphous dielectric layer.
17. The method of claim 16 , wherein the vertical portion of the amorphous gate dielectric layer remains amorphous after the plasma treatment.
18. The method of claim 16 , wherein the plasma treatment converts a portion of the vertical portion into another crystalline gate dielectric layer without converting a remaining portion of the vertical portion.
19. The method of claim 16 , wherein depositing the amorphous gate dielectric layer comprises depositing a hafnium-based oxide material.
20. The method of claim 16 , wherein the crystalline gate dielectric layer comprises a crystalline ferroelectric material.