Metal oxide, field-effect transistor, and method for producing the same
Method for producing field-effect transistor including source electrode and drain electrode, gate electrode, active layer, and gate insulating layer, the method including etching the gate insulating layer, wherein the gate insulating layer is metal oxide including A-element and at least one selected from B-element and C-element, the A-element is at least one selected from Sc, Y, Ln (lanthanoid), Sb, Bi, and Te, the B-element is at least one selected from Ga, Ti, Zr, and Hf, the C-element is at least one selected from Group 2 elements in periodic table, etching solution A is used when at least one selected from the source electrode and the drain electrode, the gate electrode, and the active layer is formed, and etching solution B that is etching solution having same type as the etching solution A is used when the gate insulating layer is etched.
1. A method for producing a field-effect transistor including a source electrode and a drain electrode, a gate electrode, an active layer, and a gate insulating layer, the method comprising
etching the gate insulating layer,
wherein the gate insulating layer is a metal oxide including A element and at least one selected from the group consisting of B element and C element,
the A element is at least one selected from the group consisting of Sc, Y, Ln (lanthanoid), Sb, Bi, and Te,
the B element is at least one selected from the group consisting of Ga, Ti, Zr, and Hf,
the C element is at least one selected from the group consisting of Group 2 elements in a periodic table,
etching solution A is used when at least one selected from the group consisting of the source electrode and the drain electrode, the gate electrode, and the active layer is formed, and
etching solution B that is an etching solution having same type as the etching solution A is used when the gate insulating layer is etched.
2. The method for producing a field-effect transistor according to claim 1 , wherein at least the gate electrode is formed using the etching solution A.
3. The method for producing a field-effect transistor according to claim 1 , wherein at least the source electrode and the drain electrode are formed using the etching solution A.
4. The method for producing a field-effect transistor according to claim 1 , wherein at least the active layer is formed using the etching solution A.
5. The method for producing a field-effect transistor according to claim 1 , wherein the etching solution A is an etching solution including nitric acid, and the etching solution B is an etching solution including nitric acid.
6. The method for producing a field-effect transistor according to claim 1 , wherein the active layer is an oxide semiconductor.
7. The method for producing a field-effect transistor according to claim 1 , wherein the metal oxide includes the B element.
8. The method for producing a field-effect transistor according to claim 1 , wherein the metal oxide includes the C element.
9. The method for producing a field-effect transistor according to claim 1 , wherein at least one through hole is formed through the etching of the gate insulating layer.
10. A field-effect transistor comprising:
a source electrode and a drain electrode;
a gate electrode;
an active layer; and
a gate insulating layer,
wherein the gate insulating layer is etched,
the gate insulating layer is a metal oxide including A element and at least one selected from the group consisting of B element and C element,
the A element is at least one selected from the group consisting of Sc, Y, Ln (lanthanoid), Sb, Bi, and Te,
the B element is at least one selected from the group consisting of Ga, Ti, Zr, and Hf,
the C element is at least one selected from the group consisting of Group 2 elements in a periodic table,
at least one selected from the group consisting of the source electrode and the drain electrode, the gate electrode, and the active layer is formed using etching solution A, and
the gate insulating layer is etched using etching solution B that is an etching solution having same type as the etching solution A.
11. A metal oxide that functions as a gate insulating layer of a field-effect transistor, the metal oxide comprising:
A element; and
at least one selected from the group consisting of B element and C element, wherein the A element is at least one selected from the group consisting of Sc, Y, Ln (lanthanoid), Sb, Bi, and Te,
the B element is at least one selected from the group consisting of Ga, Ti, Zr, and Hf,
the C element is at least one selected from the group consisting of Group 2 elements in a periodic table, and
an etching rate of the metal oxide in a wet etching solution including nitric acid is 0.1 nm/s or more but 20 nm/s or less.
12. The metal oxide according to claim 11 ,
wherein the wet etching solution is a wet etching solution including 6% by mass of nitric acid.
13. The metal oxide according to claim 11 ,
wherein the wet etching solution is a wet etching solution including 50% by mass of phosphoric acid.
14. The metal oxide according to claim 13 ,
wherein the wet etching solution is a wet etching solution including 6% by mass of nitric acid, 25% by mass of acetic acid, and 50% by mass of phosphoric acid.
15. The metal oxide according to claim 11 ,
wherein the wet etching solution is a wet etching solution used for forming at least one selected from the group consisting of: an active layer; a gate electrode;
and a source electrode and a drain electrode after formation of the gate insulating layer in production of the field-effect transistor.
16. The metal oxide according to claim 15 ,
wherein at least one selected from the group consisting of the active layer, the gate electrode, and the source electrode and the drain electrode is in contact with the gate insulating layer.
17. A field-effect transistor comprising
a gate insulating layer including the metal oxide according to claim 11 .