IP Library › Granted Patent US 11,211,487
Granted Patent B2
US 11,211,487 · App. 16/542,078 · Granted Dec 28, 2021

Transistors, memory structures and memory arrays containing two-dimensional materials between a source/drain region and a channel region

Inventors: Kamal M. Karda (Boise, ID); Chandra Mouli (Boise, ID); Haitao Liu (Boise, ID)
Assignee: Micron Technology, Inc.
H01L29/7827H01L27/10808H01L29/04H01L29/0684H01L29/0847H01L29/1037H01L29/267H01L29/456
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Quick Facts
Patent No.
US 11,211,487
App. No.
16/542,078
Granted
Dec 28, 2021
Kind
B2
Abstract

Some embodiments include an integrated assembly having a semiconductor material with a more-doped region adjacent to a less-doped region. A two-dimensional material is between the more-doped region and a portion of the less-doped region. Some embodiments include an integrated assembly which contains a semiconductor material, a metal-containing material over the semiconductor material, and a two-dimensional material between a portion of the semiconductor material and the metal-containing material. Some embodiments include a transistor having a first source/drain region, a second source/drain region, a channel region between the first and second source/drain regions, and a two-dimensional material between the channel region and the first source; drain region.

Claims (32)

1. A transistor, comprising:

a first source/drain region;

a second source/drain region;

a channel region between the first and second source/drain regions; and

a two-dimensional material between the channel region and the first source/drain region, the two-dimensional material comprising one or more material selected from the group consisting of carbon, boron, tin, bismuth, molybdenum, platinum, tungsten and hafnium.

2. The transistor of claim 1 wherein the two-dimensional material comprises a stack comprising 1 to 10 separate layers.

3. The transistor of claim 1 wherein the two-dimensional material comprises a thickness within a range of from about 0.5 nm to about 5 nm.

4. The transistor of claim 1 wherein the first source/drain region is directly against the two-dimensional material.

5. The transistor of claim 1 wherein the first source/drain region is spaced from the two-dimensional material.

6. The transistor of claim 1 wherein the two-dimensional material is a first two-dimensional material, and further comprising a second two-dimensional material between the second source/drain region and the channel region.

7. The transistor of claim 6 further comprising a third two-dimensional material in the channel region.

8. The transistor of claim 1 wherein the two-dimensional material further comprises one or more phosphorous, germanium and silicon.

9. The transistor of claim 1 wherein the two-dimensional material comprises molybdenum.

10. The transistor of claim 1 wherein the two-dimensional material comprises molybdenum disulfide and/or molybdenum diselenide.

11. A memory structure comprising the transistor of claim 1 , the memory structure including a storage-element coupled with one of the first and second source/drain regions, and including a digit line coupled with the other of the first and second source/drain regions.

12. The memory structure of claim 11 wherein the storage element is a capacitor.

13. A memory array comprising the memory structure of claim 11 .

14. A transistor, comprising:

a first source/drain region;

a second source/drain region;

a channel region between the first and second source/drain regions the first source/drain region, the second source/drain region and the channel region extend within a semiconductor material; and

a two-dimensional material between the channel region and the first source/drain region.

15. The transistor of claim 14 wherein the semiconductor material is a polycrystalline material.

16. The transistor of claim 14 wherein the semiconductor material comprises polycrystalline silicon.

17. The transistor of claim 14 wherein the two-dimensional material is a first two-dimensional region in a first part of a barrier region; wherein the barrier region further comprises a second part which is spaced from the first part by an intervening region of the semiconductor material; and wherein the second part comprises an additional two-dimensional region.

18. A transistor, comprising:

a first source/drain region;

a second source/drain region;

a channel region between the first and second source/drain regions; and

a first two-dimensional material between the channel region and the first source/drain region; and

a metal-containing material adjacent the first source/drain region and spaced from the first source/drain region by a second two-dimensional material.

19. The transistor of claim 18 wherein the metal-containing material is a metal silicide.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 15, 2019
From: KARDA, KAMAL M.; MOULI, CHANDRA; LIU, HAITAO
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050067/0991 →
Continuity (1)
Related Publication 20210050443A1 · Feb 18, 2021