Methods for forming three-dimensional memory devices
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a method for forming a 3D memory device is disclosed. A first channel structure and a second channel structure each extending vertically through a memory stack including interleaved conductor layers and dielectric layers are formed above a first substrate. A semiconductor connection is formed above the memory stack and in contact with one end of the first channel structure and one end of the second channel structure. The first substrate and a second substrate are joined. The first substrate is removed to expose another end of the first channel structure and another end of the second channel structure. A first semiconductor plug is formed at the another end of the first channel structure, and a second semiconductor plug is formed at the another end of the second channel structure.
1. A method for forming a three-dimensional (3D) memory device, comprising:
forming a first channel structure and a second channel structure each extending vertically through a memory stack comprising interleaved conductor layers and dielectric layers above a first substrate;
forming a semiconductor connection above the memory stack and in contact with one end of the first channel structure and one end of the second channel structure;
joining the first substrate and a second substrate;
removing the first substrate to expose another end of the first channel structure and another end of the second channel structure; and
forming a first semiconductor plug at the another end of the first channel structure and a second semiconductor plug at the another end of the second channel structure.
2. The method of claim 1 , further comprising, prior to forming the semiconductor connection, forming another first semiconductor plug at the one end of the first channel structure and another second semiconductor plug at the one end of the second channel structure, such that the semiconductor connection is in contact with the another first semiconductor plug and the another second semiconductor plug.
3. The method of claim 1 , wherein forming the first channel structure and the second channel structure comprises:
forming a dielectric stack comprising interleaved sacrificial layers and the dielectric layers above the first substrate;
etching a first channel hole and a second channel hole each extending vertically through the dielectric stack;
subsequently depositing a memory film and a semiconductor channel over sidewalls and bottom surfaces of the first and second channel holes;
forming a slit opening extending vertically through the dielectric stack and laterally between the first channel structure and the second channel structure; and
forming the memory stack by replacing, through the slit opening, the sacrificial layers with the conductor layers.
4. The method of claim 3 , further comprising filling the slit opening with a dielectric.
5. The method of claim 1 , wherein forming the semiconductor connection comprises:
forming a semiconductor connection dielectric layer above the memory stack;
patterning the semiconductor connection in the semiconductor connection dielectric layer; and
forming an interconnect layer on the semiconductor connection dielectric layer.
6. The method of claim 5 , wherein the interconnect layer above the first substrate is joined with a front side of the second substrate.
7. The method of claim 1 , further comprising, prior to joining the first substrate and the second substrate, forming a peripheral device on the second substrate.
8. The method of claim 1 , wherein the second substrate is a carrier wafer.
9. The method of claim 1 , wherein removing the first substrate comprises:
flipping the joined first and second substrates, such that the second substrate is below the first substrate;
thinning the first substrate; and
planarizing the first substrate and upper portions of the first and second channel structures.
10. The method of claim 1 , further comprising forming a bit line contact in contact with the first semiconductor plug of the first channel structure and a source line contact in contact with the second semiconductor plug of the second channel structure.
11. A method for forming a three-dimensional (3D) memory device, comprising:
forming a first channel structure and a second channel structure each extending vertically through a memory stack comprising interleaved conductor layers and dielectric layers above a first substrate;
forming a first semiconductor plug at one end of the first channel structure and a second semiconductor plug at one end of the second channel structure;
forming a semiconductor connection above the memory stack and in contact with the first semiconductor plug of the first channel structure and the second semiconductor plug of the second channel structure;
forming a peripheral device on a second substrate;
joining the first substrate and the second substrate;
removing the first substrate to expose another end of the first channel structure and another end of the second channel structure;
forming another first semiconductor plug at the another end of the first channel structure and another second semiconductor plug at the another end of the second channel structure; and
forming a bit line contact in contact with another first semiconductor plug of the first channel structure and a source line contact in contact with the another second semiconductor plug of the second channel structure.
12. The method of claim 11 , wherein forming the first channel structure and the second channel structure comprises:
forming a dielectric stack comprising interleaved sacrificial layers and the dielectric layers above the first substrate;
etching a first channel hole and a second channel hole each extending vertically through the dielectric stack;
subsequently depositing a memory film and a semiconductor channel over sidewalls and bottom surfaces of the first and second channel holes;
forming a slit opening extending vertically through the dielectric stack and laterally between the first channel structure and the second channel structure; and
forming the memory stack by replacing, through the slit opening, the sacrificial layers with the conductor layers.
13. The method of claim 12 , further comprising filling the slit opening with a dielectric.
14. The method of claim 11 , wherein forming the semiconductor connection comprises:
forming a semiconductor connection dielectric layer above the memory stack;
patterning the semiconductor connection in the semiconductor connection dielectric layer; and
forming an interconnect layer on the semiconductor connection dielectric layer.
15. The method of claim 14 , wherein the interconnect layer above the first substrate is joined with a front side of the second substrate.
16. The method of claim 11 , wherein removing the first substrate comprises:
flipping the joined first and second substrates, such that the second substrate is below the first substrate;
thinning the first substrate; and
planarizing the first substrate and upper portions of the first and second channel structures.
17. A method for forming a three-dimensional (3D) memory device, comprising:
forming a first channel structure and a second channel structure each extending vertically through a memory stack comprising interleaved conductor layers and dielectric layers above a substrate;
forming a first semiconductor plug at one end of the first channel structure and a second semiconductor plug at one end of the second channel structure;
forming a semiconductor connection above the memory stack and in contact with the first semiconductor plug of the first channel structure and the second semiconductor plug of the second channel structure;
joining the substrate and a carrier wafer;
removing the substrate to expose another end of the first channel structure and another end of the second channel structure;
forming another first semiconductor plug at the another end of the first channel structure and another second semiconductor plug at the another end of the second channel structure; and
forming a bit line contact in contact with another first semiconductor plug of the first channel structure and a source line contact in contact with the another second semiconductor plug of the second channel structure.
18. The method of claim 17 , wherein forming the first channel structure and the second channel structure comprises:
forming a dielectric stack comprising interleaved sacrificial layers and the dielectric layers above the substrate;
etching a first channel hole and a second channel hole each extending vertically through the dielectric stack;
subsequently depositing a memory film and a semiconductor channel over sidewalls and bottom surfaces of the first and second channel holes;
forming a slit opening extending vertically through the dielectric stack and laterally between the first channel structure and the second channel structure; and
forming the memory stack by replacing, through the slit opening, the sacrificial layers with the conductor layers.
19. The method of claim 18 , further comprising filling the slit opening with a dielectric.
20. The method of claim 17 , wherein removing the substrate comprises:
flipping the joined substrate and carrier wafer, such that the carrier wafer is below the substrate;
thinning the substrate; and
planarizing the substrate and upper portions of the first and second channel structures.