Resonating sensor for high-pressure and high-temperature environments
Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.
1. An apparatus comprising:
a sensor including a sensing element having a double-ended tuning fork piezoelectric resonator including a first tine and a second tine spaced apart from one another so as to form a slot between the first and second tines, wherein a width of the slot from the first tine to the second tine, the width of the slot measured orthogonally to a length of the first tine and a length of the second tine, varies along the lengths of the first and second tines,
wherein the sensor comprises a body comprising the sensing element and caps coupled to the sensing element so as to enclose the double-ended tuning fork piezoelectric resonator within a cavity inside the body, wherein the sensing element and the caps are hermetically sealed,
wherein the double-ended tuning fork piezoelectric resonator is formed in a substrate with the first and second tines positioned within an aperture of the substrate with the slot between the first and second tines, wherein the substrate includes an additional resonator, and
wherein the additional resonator includes: a beam in the substrate, the beam located between the aperture and an additional slot in the substrate spaced from the aperture; and two electrodes on the beam to enable excitation of an acoustic standing wave in the beam.
2. The apparatus of claim 1 , wherein the first tine is symmetrical with the second tine.
3. The apparatus of claim 2 , wherein opposite sides of the first tine are symmetrical with each other, and wherein opposite sides of the second tine are symmetrical with each other.
4. The apparatus of claim 3 , wherein the opposite sides of the first tine are inwardly tapered toward a middle of the first tine and the opposite sides of the second tine are inwardly tapered toward a middle of the second tine.
5. The apparatus of claim 3 , wherein the first and second tines are not parallel.
6. The apparatus of claim 1 , wherein the first and second tines bow outward from one another.
7. The apparatus of claim 1 , wherein the first and second tines are formed of a piezoelectric crystal material that has a melting point above 1000° C. and does not have a Curie temperature below 1000° C.
8. The apparatus of claim 1 , wherein the sensor includes a resistance temperature detector.
9. An apparatus comprising:
a sensing element having:
a first piezoelectric resonator formed in a crystal substrate, the first piezoelectric resonator including a double-ended tuning fork within an aperture of the crystal substrate; and
a second piezoelectric resonator formed in the crystal substrate, wherein the second piezoelectric resonator includes: a beam in the crystal substrate defined by the aperture and a slot spaced apart from the aperture, a first electrode positioned on one side of the beam along the slot, and a second electrode positioned on another side of the beam along the aperture, wherein the first and second electrodes facilitate excitation of a standing wave in the second piezoelectric resonator.
10. The apparatus of claim 9 , wherein the double-ended tuning fork includes two tines that are not parallel to one another.
11. The apparatus of claim 10 , wherein the beam includes a first side defined by the aperture and a second side defined by the slot, and the first and second sides of the beam are parallel to one another.
12. The apparatus of claim 9 , wherein the first piezoelectric resonator is configured to vibrate at a first frequency and the second piezoelectric resonator is configured to vibrate at a second frequency that is at least two orders of magnitude greater than the first frequency so as to limit interference between the first and second frequencies.
13. A method comprising:
measuring pressure of a fluid using a double-ended tuning fork resonator of a sensor, the double-ended tuning fork resonator having non-parallel tines, wherein the tines are formed of a piezoelectric crystal material, the piezoelectric crystal material comprising a Langasite crystal or a Langatate crystal;
measuring temperature of the fluid with the sensor, wherein the measuring the temperature of the fluid with the sensor includes estimating resistivity of an excitation electrode of the double-ended tuning fork resonator; and
using the measured temperature to perform temperature compensation on the measured pressure.
14. The method of claim 13 , wherein the measuring the temperature of the fluid with the sensor includes measuring the temperature with a resistance temperature detector of the sensor.
15. The method of claim 14 , wherein the measuring the temperature of the fluid with the resistance temperature detector of the sensor includes measuring the temperature with a wire mounted on a substrate that includes the double-ended tuning fork resonator.
16. The method of claim 13 , wherein the measuring the temperature of the fluid with the sensor includes measuring the temperature with an additional resonator integrated into a substrate that includes the double-ended tuning fork resonator.