Strain body and force sensor provided with the strain body
A strain body according to an embodiment includes a central portion, an outer peripheral portion, connecting portions, strain sensors provided on main surfaces of the connecting portions, reference resistors provided on a main surface of the central portion, and constructing a bridge circuit with the strain sensors, an electrode for taking a detection signal of the bridge circuit, a lead wire making electric connection between the electrode and the outside, and an anisotropic conductive film provided between the electrode and the lead wire to make electric connection between a terminal of the electrode and a terminal of the lead wire.
1. A strain body, comprising:
a central portion;
an outer peripheral portion surrounding the central portion;
connecting portions connecting the central portion and the outer peripheral portion;
strain sensors provided on main surfaces of the connecting portions;
reference resistors provided on a main surface of the central portion, and constructing a bridge circuit with the strain sensors;
an electrode provided on a main surface of the central portion and electrically connected to the strain sensors and the reference resistors to take a detection signal of the bridge circuit;
a lead wire making electric connection between the electrode and the outside; and
an anisotropic conductive film provided between the electrode and the lead wire to make electric connection between a terminal of the electrode and a terminal of the lead wire.
2. The strain body of claim 1 , wherein
each of the connecting portions includes a first connecting portion adjacent to the outer peripheral portion and a second connecting portion adjacent to the central portion, and
the first connecting portion includes a strain increasing portion generating larger strain than strain generated in the second connecting portion.
3. The strain body of claim 2 , further comprising:
at least one of the strain sensors constructs the bridge circuit on a main surface of the first connecting portion.
4. The strain body of claim 2 , wherein
the strain sensors construct a full bridge circuit on a main surface of the second connecting portion.
5. The strain body of claim 2 , wherein
the strain increasing portion includes a groove recessed in a thickness direction of the strain body.
6. The strain body of claim 1 , wherein
elasticity of the outer peripheral portion and the connecting portion is larger than elasticity of the central portion.
7. The strain body of claim 1 , further comprising:
a wire provided on main surfaces of the central portion and the connecting portion to electrically connect the strain sensors, the reference resistors, and the electrode,
wherein
the strain sensors, the reference resistors, the electrode, and the wire are arranged symmetrically on both sides of diagonal lines connecting corner portions of the outer peripheral portion.
8. A force sensor comprising:
a strain body comprising:
a central portion;
an outer peripheral portion surrounding the central portion;
connecting portions connecting the central portion and the outer peripheral portion;
strain sensors provided on main surfaces of the connecting portions;
reference resistors provided on a main surface of the central portion, and constructing a bridge circuit with the strain sensors;
an electrode provided on a main surface of the central portion and electrically connected to the strain sensors and the reference resistors to take a detection signal of the bridge circuit;
a lead wire making electric connection between the electrode and the outside; and
an anisotropic conductive film provided between the electrode and the lead wire to make electric connection between a terminal of the electrode and a terminal of the lead wire;
a cylindrical main body; and
a cylindrical movable body capable of operating to the main body,
wherein
the central portion of the strain body is connected to one of the main body and the movable body, and
the outer peripheral portion of the strain body is connected to the other of the main body and the movable body.
9. The force sensor of claim 8 , further comprising:
at least three circular opening portions provided on a surrounding of the movable body;
stoppers arranged inside the respective opening portions, and each including a first side surface having a first outer diameter smaller than a diameter of each of the opening portions; and
fixing members fixing the stoppers to the main body.