Semiconductor package including interposer
A semiconductor package includes a base package substrate, a first semiconductor chip, and a second semiconductor chip. The base package substrate includes a redistribution region where a redistribution layer is provided, a plurality of vertical conductive vias connected to the redistribution layer, and a recess region recessed from an upper surface of the redistribution region. The base package substrate further includes an interposer in the recess region, the interposer comprising a substrate, a plurality of upper pads disposed at an upper surface of the substrate, and plurality of through electrodes respectively connected to the plurality of upper pads to pass through the substrate. The first semiconductor chip and second semiconductor chip, each include a plurality of conductive interconnection terminals respectively connected to the plurality of upper pads and the vertical conductive vias exposed at the upper surface of the redistribution region. The first semiconductor chip and the second semiconductor chip are mounted on the extension region and the interposer and disposed horizontally apart from each other. As seen from a plan view, the interposer is disposed to overlap a portion of each of the first semiconductor chip and the second semiconductor chip.
1. A semiconductor package comprising:
a base package substrate including:
a redistribution region including:
a plurality of interlayer insulating layers, and a redistribution layer provided at an interface between a first interlayer insulating layer and a second interlayer insulating layer of the plurality of interlayer insulating layers,
a plurality of vertical conductive vias formed within the redistribution region and having bottom surfaces connected to the redistribution layer,
a recess region recessed from an upper surface of the redistribution region and formed above the redistribution layer, and
a third interlayer insulating layer below the first and second interlayer insulating layers; and
an interposer in the recess region, the interposer comprising a substrate, a plurality of upper pads disposed at an upper surface of the substrate, and a plurality of through electrodes respectively connected to the plurality of upper pads to pass through the substrate;
a first semiconductor chip and a second semiconductor chip, each including a plurality of conductive interconnection terminals respectively connected to the plurality of upper pads and the vertical conductive vias exposed at the upper surface of the redistribution region, the first semiconductor chip and the second semiconductor chip being mounted on the redistribution region and the interposer and disposed horizontally apart from each other,
wherein, as seen from a plan view, the interposer is disposed to overlap a portion of each of the first semiconductor chip and the second semiconductor chip; and
a plurality of external conductive interconnection terminals below the third interlayer insulating layer.
2. The semiconductor package of claim 1 , wherein a minimum pitch of the upper pads is less than a minimum pitch of the vertical conductive vias exposed at the upper surface of the redistribution region.
3. The semiconductor package of claim 1 , wherein the vertical conductive vias have a tapered shape where a width thereof is progressively increased away from the first semiconductor chip and the second semiconductor chip.
4. The semiconductor package of claim 1 , wherein
the interposer comprises a wafer substrate, and
the through electrodes pass through the wafer substrate and are directly connected to the vertical conductive vias, which are directly connected to the redistribution layer, which is disposed under the interposer.
5. The semiconductor package of claim 1 , wherein
the first semiconductor chip comprises a single logic chip, and
the second semiconductor chip comprises a memory chip set enabling pieces of data to be merged between memory chips of the memory chip set.
6. The semiconductor package of claim 5 , wherein
the first semiconductor chip and the second semiconductor chip transmit a data signal therebetween through the interposer, and
each of the first semiconductor chip and the second semiconductor chip is grounded or is supplied with power through a set of the vertical conductive vias and the redistribution layer.
7. The semiconductor package of claim 1 , wherein:
the first interlayer insulating layer is an interlayer insulation layer surrounding the redistribution layer and the plurality of vertical conductive vias; and further comprising:
a molding part surrounding at least a side surface of each of the first semiconductor chip and the second semiconductor chip and an upper surface of the base package substrate,
wherein a side surface of the first interlayer insulation layer and a side surface of the molding part are coplanar.
8. The semiconductor package of claim 7 , wherein an uppermost surface of the vertical conductive vias exposed at the upper surface of the redistribution region, an uppermost surface of the first interlayer insulation layer, and an uppermost surface of the interposer are coplanar.
9. A semiconductor package comprising:
a base package substrate including:
an insulative material portion formed of an interlayer insulating layer, including a recess region, and including a redistribution region where a plurality of redistribution layers are provided to be connected to a plurality of vertical conductive vias; and
an interposer disposed in the recess region, the interposer comprising a base substrate, a plurality of upper pads disposed at an upper surface of the base substrate, and a plurality of through electrodes respectively connected to the plurality of upper pads to pass through the base substrate;
a first semiconductor chip mounted on the base package substrate, the first semiconductor chip including:
a plurality of first conductive interconnection terminals respectively connected to a first set of the plurality of upper pads; and
a plurality of second conductive interconnection terminals respectively connected to a first set of the plurality of vertical conductive vias outside of the recess region; and
a second semiconductor chip mounted on the base package substrate to be horizontally spaced apart from the first semiconductor chip, the second semiconductor chip including:
a plurality of third conductive interconnection terminals respectively connected to a second set of the plurality of upper pads; and
a plurality of fourth conductive interconnection terminals respectively connected to a second set of the plurality of vertical conductive vias outside of the recess region,
wherein as seen from a plan view, the interposer is disposed to overlap a portion of each of the first semiconductor chip and the second semiconductor chip, and
wherein top surfaces of the upper pads, a top surface of the interposer, and a top surface of the interlayer insulating layer are all coplanar.
10. The semiconductor package of claim 9 , wherein:
a minimum pitch of the first conductive interconnection terminals is smaller than a minimum pitch of the second conductive interconnection terminals; and
a minimum pitch of the third conductive interconnection terminals is smaller than a minimum pitch of the fourth conductive interconnection terminals.
11. The semiconductor package of claim 10 , wherein:
the first conductive interconnection terminals and third conductive interconnection terminals are input/output terminals connected to input/output circuitry of each of the first semiconductor chip and the second semiconductor chip respectively; and
the second conductive interconnection terminals and fourth conductive interconnection terminals are power terminals connected to provide power and ground to each of the first semiconductor chip and the second semiconductor chip respectively.
12. The semiconductor package of claim 9 , further comprising:
an encapsulation layer formed on the base package substrate and surrounding at least side surfaces of the first semiconductor chip and second semiconductor chip.
13. The semiconductor package of claim 12 , wherein:
the plurality of vertical conductive vias have a tapered shape that tapers in a vertical direction toward the first and second semiconductor chips.
14. A semiconductor package comprising:
a first extension region comprising a first redistribution region where a first redistribution layer is provided, and a plurality of connection pads disposed at an upper surface of the first redistribution region and connected to the first redistribution layer;
a second extension region under the first extension region, the second extension region comprising a second redistribution region where a second redistribution layer is provided, a plurality of first vertical conductive vias above the second redistribution layer and connecting the first redistribution layer to the second redistribution layer, a plurality of second vertical conductive vias below the second redistribution layer, and a recess region recessed from an upper surface of the second redistribution region;
an interposer in the recess region, the interposer comprising a substrate, a plurality of upper pads disposed at an upper surface of the substrate, and a plurality of through electrodes respectively connected to the plurality of upper pads to pass through the substrate;
a first semiconductor chip and a second semiconductor chip each comprising a plurality of interconnection terminals respectively connected to a respective set of the connection pads, the first semiconductor chip and the second semiconductor chip being disposed horizontally apart from each other on the first extension region; and
a plurality of external conductive interconnection terminals below and electrically connected to the plurality of second vertical conductive vias,
wherein, as seen from a plan view, the interposer is disposed to overlap a portion of each of the first semiconductor chip and the second semiconductor chip.
15. The semiconductor package of claim 14 , further comprising:
a first region defined by the recess region where a plurality of connection pads are arranged at a first minimum pitch; and
a second region outside of the recess region where a plurality of connection pads are arranged at a second minimum pitch, which is greater than the first minimum pitch.
16. The semiconductor package of claim 15 , wherein
the plurality of connection pads of the first region are connected to a set of the plurality of through electrodes, and
the plurality of connection pads of the second region are connected to the second redistribution layer.
17. The semiconductor package of claim 14 , wherein each of an upper surface and a lower surface of the first extension region is a flat surface.
18. The semiconductor package of claim 14 , wherein,
in the first redistribution region, the first redistribution layer is one of a plurality of redistribution layers, and
the first redistribution region comprises a plurality of connection vias connecting the first redistribution layer to another one of the plurality of redistribution layers or connecting the connection pads to the first redistribution layer.
19. The semiconductor package of claim 18 , wherein each of the connection vias and vertical conductive vias has a tapered shape where a width thereof is progressively increased away from the first semiconductor chip and the second semiconductor chip.
20. The semiconductor package of claim 14 , wherein the interposer is surrounded by the first extension region and the second extension region.