Method of manufacturing PCM RF switch
In fabricating a radio frequency (RF) switch, a heat spreader is provided and a heating element is deposited. A thermally conductive and electrically insulating material is deposited over the heating element. The heating element and the thermally conductive and electrically insulating material are patterned, where the thermally conductive and electrically insulating material is self-aligned with the heating element. A layer of an upper dielectric is deposited. A conformability support layer is optionally deposited over the upper dielectric and the thermally conductive and electrically insulating material. A phase-change material is deposited over the optional conformability support layer and the underlying upper dielectric and the thermally conductive and electrically insulating material.
1. A method of manufacturing a radio frequency (RF) switch, the method comprising:
providing a heat spreader;
depositing a heating element;
depositing a thermally conductive and electrically insulating material over said heating element;
patterning said heating element and said thermally conductive and electrically insulating material;
depositing a layer of an upper dielectric;
planarizing said upper dielectric with said thermally conductive and electrically insulating material;
depositing a phase-change material over said upper dielectric and said thermally conductive and electrically insulating material.
2. The method of claim 1 , wherein said phase-change material comprises a material selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.
3. The method of claim 1 , wherein said heat spreader comprises a material selected from the group consisting of silicon (Si), aluminum nitride (AlN), aluminum oxide (Al X O Y ), beryllium oxide (Be X O Y ), silicon carbide (SiC), diamond, and diamond-like carbon.
4. The method of claim 1 , wherein said heat spreader performs as a stop layer during said patterning said heating element and said thermally conductive and electrically insulating material.
5. The method of claim 1 , wherein said heating element comprises a material selected from the group consisting of tungsten (W), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), titanium tungsten (TiW), tantalum (Ta), nickel chromium (NiCr), and nickel chromium silicon (NiCrSi).
6. The method of claim 1 , wherein said thermally conductive and electrically insulating material comprises a material selected from the group consisting of aluminum nitride (AlN), aluminum oxide (Al X O Y ), beryllium oxide (Be X O Y ), silicon carbide (SiC), silicon nitride (Si X N Y ), diamond, and diamond-like carbon.
7. The method of claim 1 , further comprising depositing a contact uniformity support layer over said phase-change material.
8. The method of claim 1 , further comprising:
etching said phase-change material;
depositing a passivation layer over said etched phase-change material.
9. A method of manufacturing a radio frequency (RF) switch, the method comprising:
providing a heat spreader;
depositing a middle dielectric over said heat spreader, said middle dielectric having lower thermal conductivity than said heat spreader;
depositing a heating element directly on said middle dielectric;
depositing a thermally conductive and electrically insulating material over said heating element;
depositing a phase-change material over said thermally conductive and electrically insulating material.
10. The method of claim 9 , wherein said thermally conductive and electrically insulating material is self-aligned with said heating element.
11. The method of claim 9 , wherein said phase-change material comprises a material selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.
12. The method of claim 9 , wherein said heat spreader comprises a material selected from the group consisting of silicon (Si), aluminum nitride (AlN), aluminum oxide (Al X O Y ), beryllium oxide (Be X O Y ), silicon carbide (SiC), diamond, and diamond-like carbon.
13. The method of claim 9 , wherein said heating element comprises a material selected from the group consisting of tungsten (W), molybdenum (Mo), titanium (Ti), titanium nitride (TiN), titanium tungsten (TiW), tantalum (Ta), nickel chromium (NiCr), and nickel chromium silicon (NiCrSi).
14. The method of claim 9 , wherein said thermally conductive and electrically insulating material comprises a material selected from the group consisting of aluminum nitride (AlN), aluminum oxide (Al X O Y ), beryllium oxide (Be X O Y ), silicon carbide (SiC), silicon nitride (Si X N Y ), diamond, and diamond-like carbon.
15. The method of claim 9 , further comprising depositing a contact uniformity support layer over said phase-change material.
16. A method of manufacturing a radio frequency (RF) switch, the method comprising:
providing a heat spreader;
depositing a heating element;
depositing a thermally conductive and electrically insulating material over said heating element;
patterning said heating element;
depositing a layer of an upper dielectric;
planarizing said upper dielectric with said thermally conductive and electrically insulating material;
depositing a phase-change material over said upper dielectric and said thermally conductive and electrically insulating material.
17. The method of claim 16 , wherein said planarizing said upper dielectric with said thermally conductive and electrically insulating material is performed prior to said depositing said phase-change material.
18. The method of claim 16 , wherein said thermally conductive and electrically insulating material is self-aligned with said heating element.
19. The method of claim 16 , wherein said phase-change material comprises a material selected from the group consisting of germanium telluride (Ge X Te Y ), germanium antimony telluride (Ge X Sb Y Te Z ), germanium selenide (Ge X Se Y ), and any other chalcogenide.
20. The method of claim 16 , wherein said heat spreader comprises a material selected from the group consisting of silicon (Si), aluminum nitride (AlN), aluminum oxide (Al X O Y ), beryllium oxide (Be X O Y ), silicon carbide (SiC), diamond, and diamond-like carbon.