SiC single crystal manufacturing apparatus
The present invention provides a SiC single crystal manufacturing apparatus, including a crystal growth vessel which has a source loading portion to hold a SiC source, and a lid which is provided with a seed crystal support to hold a seed crystal; an insulating material which has at least one through-hole and covers the crystal growth vessel; a heater which is configured to heat the crystal growth vessel; and a temperature measuring instrument which is configured to measure the temperature of the crystal growth vessel through the through-hole, wherein the inner wall surface of the through-hole of the insulating material is coated with a coating material which contains a heat-resistant metal carbide or a heat-resistant metal nitride.
1. A SiC single crystal manufacturing apparatus, comprising:
a crystal growth vessel which has a source loading portion to hold a SiC source, and a lid which is provided with a seed crystal support to hold a seed crystal;
an insulating material which has at least one through-hole and covers the crystal growth vessel;
a heater which is configured to heat the crystal growth vessel; and
a temperature measuring instrument which is configured to measure a temperature of the crystal growth vessel through the at least one through-hole,
wherein the insulating material has
a top part which has the at least one through-hole and covers the lid of the crystal growth vessel,
a side part which covers a side surface of the source loading portion, and
a bottom part which covers a bottom surface of the source loading portion,
an inner wall surface of the at least one through-hole of the insulating material is coated with a coating material which contains a heat-resistant metal carbide or a heat-resistant metal nitride,
a surface of the top part on an inner side is coated with a coating material containing a heat-resistant metal carbide or a heat-resistant metal nitride, and
a surface of the top part on an outer side is coated with a coating material containing a heat-resistant metal carbide or a heat-resistant metal nitride,
wherein the surface of the top part on the inner side refers to a surface of the top part which faces the crystal growth vessel, and
the surface of the top part on the outer side refers to a surface of the top part which is located on an opposite side to the crystal growth vessel,
a thickness of the coating material on the inner wall surface of the at least one through-hole is in a range of from 0.01 mm to 5 mm,
the side part of the insulating material directly contacts with the side surface of the source loading portion, and
the bottom part of the insulating material directly contacts with the bottom surface of the source loading portion.
2. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the heat-resistant metal carbide or the heat-resistant metal nitride is a carbide or a nitride of at least one metal selected from the group consisting of tantalum, molybdenum, hafnium, niobium, titanium, zirconium, tungsten, and vanadium.
3. The SiC single crystal manufacturing apparatus according to claim 2 , wherein the inner wall surface of the at least one through-hole of the insulating material is coated with the coating material which consists of the heat-resistant metal carbide or the heat-resistant metal nitride.
4. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the insulating material has the two or more through-holes.
5. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the at least one through-hole is disposed at a position that overlaps with the seed crystal support in a plan view.
6. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the lid is exposed from the at least one through-hole.
7. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the coating material on the inner wall surface of the at least one through-hole is formed of tantalum carbide.
8. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the coating material on the surface of the top part on the inner side is formed from the same material as the coating material on the inner wall surface of the at least one through-hole.
9. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the coating material on the surface of the top part on the inner side is connected with the coating material on the inner wall surface of the at least one through-hole.
10. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the coating material on the surface of the top part on the outer side is formed from the same material as the coating material on the inner wall surface of the at least one through-hole and the coating material on the surface of the top part on the inner side.
11. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the coating material on the inner wall surface of the at least one through-hole is connected with the coating material on the surface of the top part on the inner side and the coating material on the surface of the top part on the outer side.
12. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the inner wall surface of the at least one through-hole is coated with the coating material which consists of the heat-resistant metal carbide.
13. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the inner wall surface of the at least one through-hole is coated with the coating material which consists of the heat-resistant metal nitride.
14. The SiC single crystal manufacturing apparatus according to claim 1 , wherein
the surface of the top part on the inner side is coated with the coating material which consists of the heat-resistant metal carbide, and
the surface of the top part on the outer side is coated with the coating material which consists of the heat-resistant metal carbide.
15. The SiC single crystal manufacturing apparatus according to claim 1 , wherein
the surface of the top part on the inner side is coated with the coating material which consists of the heat-resistant metal nitride, and
the surface of the top part on the outer side is coated with the coating material which consists of the heat-resistant metal nitride.
16. The SiC single crystal manufacturing apparatus according to claim 1 , wherein
the lid is located between the source loading portion and the at least one through-hole,
the at least one through-hole is located on the lid, and
the insulating material contacts with an entire outer surface of the crystal growth vessel except for where the at least one through-hole is located.
17. The SiC single crystal manufacturing apparatus according to claim 1 , wherein the coating material on the inner wall surface of the at least one through-hole consists of TaC.
18. A SiC single crystal manufacturing apparatus, comprising:
a crystal growth vessel which has a source loading portion to hold a SiC source, and a lid which is provided with a seed crystal support to hold a seed crystal;
an insulating material which has at least one through-hole and covers the crystal growth vessel;
a heater which is configured to heat the crystal growth vessel; and
a temperature measuring instrument which is configured to measure a temperature of the crystal growth vessel through the at least one through-hole,
wherein the insulating material has
a top part which has the at least one through-hole and covers the lid of the crystal growth vessel,
a side part which covers a side surface of the source loading portion, and
a bottom part which covers a bottom surface of the source loading portion,
an inner wall surface of the at least one through-hole of the insulating material is coated with a coating material which contains a heat-resistant metal carbide or a heat-resistant metal nitride,
a surface of the top part on an inner side is coated with a coating material containing a heat-resistant metal carbide or a heat-resistant metal nitride, and
a surface of the top part on an outer side is coated with a coating material containing a heat-resistant metal carbide or a heat-resistant metal nitride,
wherein the surface of the top part on the inner side refers to a surface of the top part which faces the crystal growth vessel, and
the surface of the top part on the outer side refers to a surface of the top part which is located on an opposite side to the crystal growth vessel,
the heat-resistant metal carbide or the heat-resistant metal nitride is a carbide or a nitride of at least one metal selected from the group consisting of tantalum, molybdenum, hafnium, niobium, titanium, zirconium, tungsten, and vanadium,
the side part of the insulating material directly contacts with the side surface of the source loading portion, and
the bottom part of the insulating material directly contacts with the bottom surface of the source loading portion.