Heterogeneous antenna in fan-out package

1. A method comprising:

pre-forming an antenna substrate as an integrated entity, wherein the pre-forming the antenna substrate comprises:

forming through-holes in a blanket substrate, wherein the blanket substrate comprises a dielectric core, and metal films on opposite sides of the dielectric core;

filling the through-holes to form through-vias;

etching the metal films to form redistribution lines connecting to the through-vias, wherein the integrated entity comprises the dielectric core, the through-vias penetrating through the dielectric core, and the redistribution lines;

after the antenna substrate is pre-formed, bonding the antenna substrate to a redistribution structure, wherein the antenna substrate comprises a first part of a first antenna, and the redistribution structure comprises a second part of the first antenna;

encapsulating the antenna substrate in an encapsulant; and

bonding a package component to the redistribution structure, wherein one of the redistribution structure and the antenna substrate comprises a third part of a second antenna, and the package component comprises a fourth part of the second antenna.

2. The method of claim 1 , further comprising bonding a Radio-Frequency Integrated Circuit (RFIC) die to the redistribution structure, wherein the RFIC die is electrically coupled to at least one of the first antenna and the second antenna.

3. The method of claim 2 , further comprising adhering an adhesive film on the RFIC die, wherein the adhesive film has opposite surfaces contacting the RFIC die and the antenna substrate.

4. The method of claim 1 , wherein the antenna substrate and the package component are bonded to opposite sides of the redistribution structure.

5. The method of claim 1 , wherein the first part of the first antenna comprises a patch, and the second part of the first antenna comprises a grounded reflector.

6. The method of claim 1 , wherein the third part of the second antenna comprises a patch, and the fourth part of the second antenna comprises a grounded reflector.

7. The method of claim 1 , further comprising forming the redistribution structure comprising:

forming a plurality of redistribution lines, with the first part of the first antenna and the third part of the second antenna being in the plurality of redistribution lines; and

forming a metal pillar on one of the plurality of redistribution lines, wherein the antenna substrate is bonded to the metal pillar.

8. A method comprising:

bonding a Radio-Frequency Integrated Circuit (RFIC) die to a redistribution structure;

bonding an antenna substrate to the redistribution structure through a solder region, wherein the solder region electrically connects the antenna substrate to the redistribution structure; and

bonding a printed circuit board to the redistribution structure, wherein each of the redistribution structure, the antenna substrate, and the printed circuit board comprises at least one component of one or both of a first antenna and a second antenna, wherein the first antenna comprises a first patch and a first reflector having a first spacing therebetween, and the second antenna comprises a second patch and a second reflector having a second spacing therebetween, with the first spacing being different from the second spacing.

9. The method of claim 8 , further comprising distributing first components of the first antenna to both of the redistribution structure and the antenna substrate, and distributing second components of the second antenna to both of the redistribution structure and the printed circuit board.

10. The method of claim 8 further comprising encapsulating the RFIC die and the antenna substrate in an encapsulant.

11. The method of claim 10 , further comprising forming a metal pillar protruding higher than a plurality of redistribution lines in the redistribution structure, wherein a conductive feature in the antenna substrate is bonded to the metal pillar.

12. The method of claim 8 further comprising:

before the bonding the antenna substrate to the redistribution structure, forming the antenna substrate as a discrete component, wherein the antennal substrate as the discrete component is bonded to the redistribution structure.

13. The method of claim 8 , wherein the redistribution structure is bonded to the printed circuit board through a plurality of solder regions, and a component in the second antenna is in the printed circuit board, and is connected to the RFIC die through one of the plurality of solder regions.

14. A package comprising:

a redistribution structure;

an antenna substrate bonded to the redistribution structure;

a printed circuit board bonded to the redistribution structure, wherein the redistribution structure, the antenna substrate, and the printed circuit board in combination form a first antenna and a second antenna, with each of the redistribution structure, the antenna substrate, and the printed circuit board comprising at least one component of one or both of the first antenna and the second antenna;

a Radio-Frequency Integrated Circuit (RFIC) die bonded to the redistribution structure, wherein the RFIC die is electrically connected to at least one of the first antenna and the second antenna;

an adhesive film comprising a first surface contacting the RFIC die, and an opposite second surface contacting the antenna substrate; and

an encapsulant encapsulating the antenna substrate and the RFIC die therein.

15. The package of claim 14 , wherein the first antenna comprises a first patch and a first reflector having a first spacing therebetween, and the second antenna comprises a second patch and a second reflector having a second spacing therebetween, and the first spacing is different from the second spacing.

16. The package of claim 14 , wherein a top surface of the encapsulant is substantially coplanar with a top surface of the antenna substrate.

17. The package of claim 14 , wherein the first antenna comprises a patch antenna, with the antenna substrate comprising a patch of the patch antenna, and one of the redistribution structure and the printed circuit board comprises a reflector of the patch antenna.