Method for producing plated shaped structure and photosensitive resin composition for production of plated shaped structures
A method for producing a plated shaped structure, includes applying a photosensitive resin composition on a substrate to form a photosensitive resin coating film. The photosensitive resin composition includes: (A) a resin whose solubility in alkali is capable of being increased by an action of an acid; (B) a photoacid generator; and (C) a compound which is capable of being decomposed by an action of an acid to form a primary or secondary amine. The photosensitive resin coating film is exposed to light. The photosensitive resin coating film is developed after the exposing to light to form a resist pattern. A plating process is performed using the resist pattern as a mask.
1. A method for producing a plated shaped structure, comprising:
applying a photosensitive resin composition on a substrate to form a photosensitive resin coating film, the photosensitive resin composition comprising: (A) a resin whose solubility in alkali is capable of being increased by an action of an acid; (B) a photoacid generator; and (C) a compound which is capable of being decomposed by an action of an acid to form a primary or secondary amine;
exposing the photosensitive resin coating film to light;
decomposing the compound (C) to dissociate an acid-dissociable group therein and form a primary or secondary amine in the exposed region;
developing the photosensitive resin coating film after the exposing to light to form a resist pattern; and
performing a plating process using the resist pattern as a mask,
wherein the compound (C) is an amine compound in which the acid-dissociable group is bonded to a nitrogen atom, and
wherein the plating process is a copper plating process using copper sulfate.
2. The method for producing a plated shaped structure according to claim 1 , wherein the resin (A) has a phenolic hydroxyl group.
3. The method for producing a plated shaped structure according to claim 2 , wherein the compound (C) is an alkoxycatbonylated amine.
4. The method for producing a plated shaped structure according to claim 3 , wherein the alkoxycarbonylated amine is an isopentaoxycarbonylated amine.
5. The method for producing a plated shaped structure according to claim 1 , wherein the compound (C) is an alkoxycarbonylated amine.
6. The method for producing a plated shaped structure according to claim 5 , wherein the alkoxycarbonylated amine is an isopentaoxycarbonylated amine.
7. The method for producing a plated shaped structure according to claim 1 , further comprising removing the resist pattern.
8. The method for producing a plated shaped structure according to claim 1 , wherein the compound (C) is selected from the group consisting of N-(alkoxycarbonyl)piperidine, N-(alkoxycarbonyl)-4-hydroxypiperidine, N-(alkoxycarbonyl)imidazole, N-(alkoxycarbonyl)benzimidazole, N-(alkoxycarbonyl)-2-phenylbenzimidazole, N-(alkoxycarbonyl)dioctylamine, N-(alkoxycarbonyl)diethanolamine, N-(alkoxycarbonyl)dicyclohexylamine, and N-(alkoxycarbonyl) diphenylamine.
9. The method for producing a plated shaped structure according to claim 1 , wherein the compound (C) is selected from the group consisting of:
10. The method for producing a plated shaped structure according to claim 1 , wherein when a positive-type resist film is exposed, in the exposed region, dissociation of the acid-dissociable group in the compound (C) caused by the action of the acid forms the primary or secondary amine which leads to an acid diffusion controlling action, and in the non-exposed region, the compound (C) does not undergo the action of the acid and remains in the positive-type resist pattern in a state where the compound (C) still has an acid-dissociable group.