Reticle pod with spoiler structure
A reticle pod with a spoiler structure includes a body and a cover. A reticle allocation area is centrally disposed at the body. The cover covers the body. A peripheral area of the cover and a peripheral area of the body are fitted together by a protruding portion and a dented portion. The dented portion and the protruding portion jointly form a spoiler structure surrounding the reticle allocation area. The spoiler structure includes a spoiler passage between the dented portion and the protruding portion. The body has at least one sidewall corresponding in position to the spoiler passage to form a particle-collecting space. Particles carried by external air current which enters the spoiler passage end up in the particle-collecting space and thus are denied entry into the reticle allocation area.
1. A reticle pod with a spoiler structure, comprising:
a body which a reticle allocation area is centrally disposed at; and
a cover for covering the body, wherein a peripheral area of the cover and a peripheral area of the body are fitted together by a protruding portion and a dented portion, and the spoiler structure surrounding the reticle allocation area is jointly formed by the dented portion and the protruding portion,
wherein the spoiler structure comprises a spoiler passage disposed between the dented portion and the protruding portion, and the body has at least one sidewall in the spoiler passage, and the sidewall is at an acute angle of less than 90 degree and sloping at an inward incline slope to form a particle-collecting space, and
wherein the protruding portion is received in the dented portion, and the spoiler passage extends continuously along the protruding portion to the cover at both ends of the spoiler passage.
2. The reticle pod with a spoiler structure according to claim 1 , wherein the dented portion is flanked by the sidewall from two sides.
3. The reticle pod with a spoiler structure according to claim 1 , wherein the dented portion is disposed at the cover, the protruding portion is disposed at the body, and the protruding portion is flanked by a sidewall from one side.
4. The reticle pod with a spoiler structure according to claim 3 , wherein the protruding portion is flanked by the sidewall from two sides.
5. The reticle pod with a spoiler structure according to claim 1 , wherein the protruding portion has a rectangular cross section.
6. The reticle pod with a spoiler structure according to claim 1 , wherein the protruding portion has an arcuate cross section.
7. The reticle pod with a spoiler structure according to claim 1 , wherein the retreated sidewall has an acute angle.
8. The reticle pod with a spoiler structure according to claim 1 , wherein the sidewall has a fillet.