IP Library › Granted Patent US 10,783,906
Granted Patent B2
US 10,783,906 · App. 16/565,955 · Granted Sep 22, 2020

Magnetoresistive effect element, magnetic head, sensor, high-frequency filter, and oscillator

Inventors: Kazuumi Inubushi (Tokyo, JP); Katsuyuki Nakada (Tokyo, JP)
Assignee: TDK CORPORATION
G11B5/3906G01R33/093G11B5/3133H01L43/08H01L43/10H01L43/12H03B15/006H03H2/00
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,783,906
App. No.
16/565,955
Granted
Sep 22, 2020
Kind
B2
Abstract

A nonmagnetic spacer layer in a magnetoresistive effect element includes a nonmagnetic metal layer that is formed of Ag and at least one of a first insertion layer that is disposed on a bottom surface of the nonmagnetic metal layer and a second insertion layer that is disposed on a top surface of the nonmagnetic metal layer. The first insertion layer and the second insertion layer include an Fe alloy that is expressed by Fe γ X 1-γ . Here, X denotes one or more elements selected from a group consisting of O, Al, Si, Ga, Mo, Ag, and Au, and γ satisfies 0<γ<1.

Claims (105)

1. A magnetoresistive effect element comprising:

a first ferromagnetic layer;

a second ferromagnetic layer; and

a spacer layer that is disposed between the first ferromagnetic layer and the second ferromagnetic layer,

wherein the spacer layer includes:

a nonmagnetic metal layer including Ag, and

at least one of

a first insertion layer that is disposed on a bottom surface of the nonmagnetic metal layer and

a second insertion layer that is disposed on a top surface of the nonmagnetic metal layer, and

wherein the first insertion layer and the second insertion layer include an Fe alloy that is expressed by General Formula (1):

Fe γ X 1-γ   (1),

where X denotes one or more elements selected from a group consisting of O, Al, Si, Ga, Mo, Ag, and Au, and

γ satisfies 0<γ<1,

wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer includes a Heusler alloy that is expressed by General formula (2):

Co 2 L α M β   (2),

where L denotes one or more elements selected from a group consisting of Mn and Fe,

M denotes one or more elements selected from a group consisting of Si, Al, Ga, and Ge,

0.7≤α≤1.6, and

0.65≤β≤1.35,

wherein α and β in General formula (2) satisfy 2<α+β.

2. The magnetoresistive effect element according to claim 1 , wherein

γ in General Formula (1) satisfies 0.6≤γ≤0.9.

3. The magnetoresistive effect element according to claim 2 , wherein X in General formula (1) is one or more elements selected from a group consisting of Al, Si, and Ga.

4. The magnetoresistive effect element according to claim 3 , wherein α and β in General formula (2) satisfy:

0.85≤α≤1.55, and

0.75≤β≤1.25.

5. The magnetoresistive effect element according to claim 3 , wherein 1≤α.

6. The magnetoresistive effect element according to claim 5 ,

wherein 0.2 nm≤t 1 ≤10 nm is satisfied where t 1 denotes a thickness of the first insertion layer, and

wherein 0.2 nm≤t 2 ≤10 nm is satisfied where t 2 denotes a thickness of the second insertion layer.

7. The magnetoresistive effect element according to claim 1 , wherein α and β in General formula (2) satisfy:

0.85≤α≤1.55, and

0.75≈β≤1.25.

8. The magnetoresistive effect element according to claim 1 ,

wherein 0.2 nm≤t 1 ≤10 nm is satisfied where t 1 denotes a thickness of the first insertion layer, and

wherein 0.2 nm≤t 2 ≤10 nm is satisfied where t 2 denotes a thickness of the second insertion layer.

9. The magnetoresistive effect element according to claim 1 ,

wherein α and β in General formula (2) further satisfy

α+β2.75.

10. A magnetic head comprising the magnetoresistive effect element according to claim 1 .

11. A sensor comprising the magnetoresistive effect element according to claim 1 .

12. A high-frequency filter comprising the magnetoresistive effect element according to claim 1 .

13. An oscillator comprising the magnetoresistive effect element according to claim 1 .

14. A magnetoresistive effect element comprising:

a first ferromagnetic layer;

a second ferromagnetic layer; and

a spacer layer that is disposed between the first ferromagnetic layer and the second ferromagnetic layer,

wherein the spacer layer includes:

a nonmagnetic metal layer, and at least one of

a first insertion layer that is disposed on a bottom surface of the nonmagnetic metal layer and

a second insertion layer that is disposed on a top surface of the nonmagnetic metal layer,

wherein the first insertion layer and the second insertion layer include an Fe alloy that is expressed by General Formula (1):

Fe γ X 1-γ   (1),

where X denotes one or more elements selected from a group consisting of Al, Ga and Ag, and

γ satisfies 0.6≤γ≤0.9,

wherein the first insertion layer is continued from one side to the other side of the magnetoresistive effect element in a transverse direction of the magnetoresistive effect element,

wherein the second insertion layer is continued from one side to the other side of the magnetoresistive effect element in a transverse direction of the magnetoresistive effect element,

wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer includes a Heusler alloy that is expressed by General formula (2):

Co 2 L α M β   (2)

where L denotes one or more elements selected from a group consisting of Mn and Fe,

M denotes one or more elements selected from a group consisting of Si, Al, Ga, and Ge,

1≤α,

0.65≤β≤1.35, and

2≤α+β.

15. The magnetoresistive effect element according to claim 14 ,

wherein 0.2 nm≤t 1 ≤10 nm is satisfied where t 1 denotes a thickness of the first insertion layer, and

wherein 0.2 nm≤t 2 ≤10 nm is satisfied where t 2 denotes a thickness of the second insertion layer.

16. The magnetoresistive effect element according to claim 14 ,

wherein α and β in General formula (2) further satisfy

α+β≤2.75.

17. A magnetic head comprising the magnetoresistive effect element according to claim 14 .

18. A sensor comprising the magnetoresistive effect element according to claim 14 .

19. A high-frequency filter comprising the magnetoresistive effect element according to claim 14 .

20. An oscillator comprising the magnetoresistive effect element according to claim 14 .

21. A magnetoresistive effect element comprising:

a first ferromagnetic layer;

a second ferromagnetic layer; and

a spacer layer that is disposed between the first: ferromagnetic layer and the second ferromagnetic layer,

wherein the spacer layer includes:

a nonmagnetic metal layer, and

at least one of

a first insertion layer that is disposed on a bottom surface of the nonmagnetic metal layer and

a second insertion layer that is disposed on a top surface of the nonmagnetic metal layer, and

wherein the first insertion layer and the second insertion layer include an Fe alloy that is expressed by General Formula (1):

Fe γ X 1-γ   (1),

where X denotes one or more elements selected from a group consisting of Mo and Au, and

γ satisfies 0.6≤γ≤0.9, and

wherein at least one of the first ferromagnetic layer and the second ferromagnetic layer includes a Heusler alloy that is expressed by General formula (2):

Co 2 LαMβ  (2),

where L denotes one or more elements selected from a group consisting of Mn and Fe,

M denotes one or more elements selected from a group consisting of Si, Al, Ga, and Ge,

0.7≤α≤1.6,

0.65≤β≤1.35, and

2<α+β.

22. The magnetoresistive effect element according to claim 21 , wherein 1≤α.

23. The magnetoresistive effect element according to claim 22 ,

wherein 0.2 nm≤t 1 ≤10 nm is satisfied where t 1 denotes a thickness of the first insertion layer, and

wherein 0.2 nm≤t 2 ≤10 nm is satisfied where t 2 denotes a thickness of the second insertion layer.

24. The magnetoresistive effect element according to claim 21 ,

wherein α and β in General formula (2) further satisfy

α+β≤2.75.

25. A magnetic head comprising the magnetoresistive effect element according to claim 21 .

26. A sensor comprising the magnetoresistive effect element according to claim 21 .

27. A high-frequency filter comprising the magnetoresistive effect element according to claim 21 .

28. An oscillator comprising the magnetoresistive of according to claim 21 .

Priority Claims (1)
JP 2017-104745 · May 26, 2017 · national
Continuity (2)
Continuation 15988707 · May 24, 2018
Related Publication 20200027476A1 · Jan 23, 2020