Multi-threshold voltage non-planar complementary metal-oxtde-semiconductor devices
View Patent ↗A device is provided. The device includes an interfacial layer on a semiconductor device channel. The device further includes a dipole layer on the interfacial layer, and a gate dielectric layer on the dipole layer. The device further includes a first work function layer associated with a first field effect transistor device; and a second work function layer associated with a second field effect transistor device, such that the first field effect transistor device and second field effect transistor device each have a different threshold voltage than a first field effect transistor device and second field effect transistor device without a dipole layer.
1. A device, comprising:
an interfacial layer on a first semiconductor device channel;
a dipole layer on the interfacial layer;
a gate dielectric layer on the dipole layer; and
a first work function layer on the gate dielectric layer, wherein the dipole layer shifts the threshold voltage of a first field effect transistor device including the first work function layer.
2. The device of claim 1 , wherein the dipole layer is aluminum oxide (AlO).
3. The device of claim 1 , further comprising a second work function layer on the first work function layer of the first field effect transistor device.
4. The device of claim 1 , wherein the first field effect transistor device is a nanosheet type transistor device.
5. The device of claim 1 , wherein the first field effect transistor device is a vertical transport field effect transistor device.
6. A plurality of field effect transistor devices, comprising:
a gate structure on each of the plurality of field effect transistors, wherein each gate structure includes an interfacial layer on a semiconductor device channel of each of field effect transistor devices, wherein a first set of the plurality of field effect transistor devices are n-type field effect transistor devices and a second set of the plurality of field effect transistor devices are p-type field effect transistor devices;
a first dipole layer on the interfacial layer on at least one of the n-type field effect transistor devices, and a second dipole layer on at least one of the p-type field effect transistor devices;
a gate dielectric layer on each of the interfacial layers;
a first work function layer on the gate dielectric layer on the first set of the plurality of field effect transistor devices; and
a second work function layer on the gate dielectric layer on the second set of the plurality of field effect transistor devices, wherein the first work function layer is a work function material (WFM) different from the second work function layer, and wherein the first dipole layer shifts the threshold voltage of the first field effect transistor device having the first work function layer, and the second dipole layer shifts the threshold voltage of the second field effect transistor device having the second work function layer.
7. The plurality of field effect transistor devices of claim 6 , wherein the plurality of field effect transistor devices includes at least four field effect transistor devices.
8. The plurality of field effect transistor devices of claim 7 , wherein the first set of the plurality of field effect transistor devices includes at least two field effect transistor devices, and the second set of the plurality of field effect transistor devices includes at least two field effect transistor devices.
9. The plurality of field effect transistor devices of claim 8 , wherein the first dipole layer is layers are on at least two of the first set of the plurality of field effect transistor devices, and the second dipole layer is on at least two of the second set of the plurality of field effect transistor devices.
10. The plurality of field effect transistor devices of claim 9 , wherein one field effect transistor device of the first set of the plurality of field effect transistor devices has a threshold voltage higher than another field effect transistor device of the first set of the plurality of field effect transistor devices.
11. The plurality of field effect transistor devices of claim 9 , wherein one of the second set of the plurality of field effect transistor devices has a threshold voltage lower than another of the second set of the plurality of field effect transistor devices.
12. A pair of field effect transistor devices each having a gate structure, comprising:
an interfacial layer on each semiconductor device channel of the pair of field effect transistor devices;
a dipole layer on the interfacial layer on each of the pair of field effect transistor devices;
a gate dielectric layer on the dipole layers;
a first work function layer on a first field effect transistor device of the pair of transistor devices; and
a second work function layer on a second field effect transistor device of the pair of transistor devices.
13. The pair of field effect transistor devices of claim 12 , wherein the dipole layer is aluminum oxide (AlO).
14. The pair of field effect transistor devices of claim 12 , wherein the second work function layer is also on the first work function layer on the first field effect transistor device.
15. The pair of field effect transistor devices of claim 12 , wherein the first field effect transistor device and the second field effect transistor device are both nanosheet type transistor devices.
16. The pair of field effect transistor devices of claim 12 , wherein the first field effect transistor device and the second field effect transistor device are both vertical transport field effect transistor devices.
17. The pair of field effect transistor devices of claim 12 , wherein the first field effect transistor device is a n-type field effect transistor device and the second field effect transistor device is a p-type field effect transistor devices.