Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging

1. A method for generating a super-resolution image for a specimen through a super-resolution system based on a low resolution image of the specimen comprising:

obtaining the low resolution image of the specimen using a low resolution objective of a microscopy inspection system;

detecting one or more artifacts in the low resolution image;

identifying a suitability of the one or more artifacts for generation of the super-resolution image of at least a portion of the specimen from the low resolution image, wherein the suitability of the one or more artifacts is identified by a suitability classifier trained from a first group of known artifacts suitable for super-resolution imaging and a second group of known artifacts unsuitable for the super-resolution imaging;

generating the super-resolution image of the at least the portion of the specimen from the low resolution image of the specimen using a super-resolution image simulation;

identifying an accuracy assessment of the super-resolution image based on one or more degrees of equivalence between the super-resolution image and one or more actually scanned high resolution images of at least a portion of one or more related specimens identified using a simulated image classifier;

determining whether to further process the super-resolution image based on the accuracy assessment of the super-resolution image and the suitability of the one or more artifacts; and

further processing the super-resolution image if it is determined to further process the super-resolution image.

2. The method of claim 1 , further comprising:

obtaining one or more high resolution images of the at least the portion of the specimen using a high resolution objective of the microscopy inspection system, if it is determined to further process the super-resolution image based on the accuracy assessment of the super-resolution image; and

assembling the super-resolution image and the one or more high resolution images of the at least the portion of the specimen to form a single coherent image of the at least the portion of the specimen as part of further processing the super-resolution image.

3. The method of claim 2 , wherein the one or more high resolution images of the at least the portion of the specimen obtained using the high resolution objective are high resolution images of the one or more artifacts in the low resolution image.

4. The method of claim 1 , wherein the one or more artifacts in the low resolution image are identified as unsuitable for generating the super-resolution image.

5. The method of claim 4 , further comprising:

obtaining one or more high resolution images of the one or more artifacts using a high resolution objective of the microscopy inspection system, if it is determined to further process the super-resolution image based on the suitability of the one or more artifacts for generation of the super-resolution image; and

assembling the super-resolution image and the one or more high resolution images of the one or more artifacts to form a single coherent image of the at least the portion of the specimen as part of further processing the super-resolution image.

6. The method of claim 1 , wherein the one or more artifacts in the low resolution image are identified as suitable for generating the super-resolution image, the method further comprising generating the super-resolution image of the at least the portion of the specimen from the low resolution image using the super-resolution image simulation in response to an identification that the one or more artifacts are suitable for generating the super-resolution image.

7. The method of claim 6 , wherein the super-resolution image is generated from at least the one or more artifacts in the low resolution image identified as suitable for generating the super-resolution image.

8. The method of claim 1 , wherein the simulated image classifier is trained using a plurality of known super-resolution images at two or more different image confidence determinations.

9. A super-resolution system comprising:

a microscopy inspection system for inspecting a specimen comprising:

a low resolution objective;

a high resolution objective;

one or more processors; and

at least one computer-readable storage medium having stored therein instructions which, when executed by the one or more processors, cause the one or more processors to perform operations comprising:

obtaining a low resolution image of the specimen using the low resolution objective of a microscopy inspection system;

detecting one or more artifacts in the low resolution image;

identifying a suitability of the one or more artifacts for generation of a super-resolution image of at least a portion of the specimen from the low resolution image, wherein the suitability of the one or more artifacts is identified by a suitability classifier trained from a first group of known artifacts suitable for super-resolution imaging and a second group of known artifacts unsuitable for super resolution imaging;

generating a super-resolution image of the at least the portion of the specimen from the low resolution image of the specimen using a super-resolution image simulation;

identifying an accuracy assessment of the super-resolution image based on one or more degrees of equivalence between the super-resolution image and one or more actually scanned high resolution images of at least a portion of one or more related specimens;

determining whether to further process the super-resolution image based on the accuracy assessment of the super-resolution image and the suitability of the one or more artifacts; and

further processing the super-resolution image if it is determined to further process the super-resolution image.

10. The system of claim 9 , wherein the instructions which, when executed by the one or more processors, further cause the one or more processors to perform operations comprising:

obtaining one or more high resolution images of the at least the portion of the specimen using the high resolution objective of the microscopy inspection system, if it is determined to further process the super-resolution image based on the accuracy assessment of the super-resolution image; and

assembling the super-resolution image and the one or more high resolution images of the at least the portion of the specimen to form a single coherent image of the at least the portion of the specimen as part of further processing the super-resolution image.

11. The system of claim 10 , wherein the one or more high resolution images of the at least the portion of the specimen obtained using the high resolution objective are high resolution images of the one or more artifacts in the low resolution image.

12. The system of claim 9 , wherein the one or more artifacts are identified as unsuitable for generating the super-resolution image.

13. The system of claim 12 , wherein the instructions which, when executed by the one or more processors, further cause the one or more processors to perform operations comprising:

obtaining one or more high resolution images of the one or more artifacts using the high resolution objective of the microscopy inspection system, if it is determined to further process the super-resolution image based on the suitability of the one or more artifacts for generation of the super-resolution image; and

assembling the super-resolution image and the one or more high resolution images of the one or more artifacts to form a single coherent image of the at least the portion of the specimen as part of further processing the super-resolution image.

14. The system of claim 9 , wherein the one or more artifacts in the low resolution image are identified as suitable for generating the super-resolution image and the instructions which, when executed by the one or more processors, further cause the one or more processors to perform operations comprising generating the super-resolution image of the at least the portion of the specimen from the low resolution image using the super-resolution image simulation in response to an identification that the one or more artifacts are suitable for generating the super-resolution image.

15. The system of claim 9 , wherein the accuracy assessment of the super-resolution image is identified by a simulated image classifier trained using a plurality of known super-resolution images at two or more different image confidence determinations.

16. A non-transitory computer-readable storage medium having stored therein instructions which, when executed by one or more processors, cause the one or more processors to perform operations for generating a super-resolution image for a specimen based on a low resolution image of the specimen comprising:

receiving the low resolution image of the specimen captured by a low resolution objective of a microscopy inspection system;

detecting one or more artifacts in the low resolution image;

identifying a suitability of the one or more artifacts for generation of the super-resolution image of at least a portion of the specimen from the low resolution image, wherein the suitability of the one or more artifacts is identified by a suitability classifier trained from a first group of known artifacts suitable for super-resolution imaging and a second group of known artifacts unsuitable for super resolution imaging;

generating the super-resolution image of the at least the portion of the specimen from the low resolution image of the specimen using a super-resolution image simulation;

identifying an accuracy assessment of the super-resolution image based on one or more degrees of equivalence between the super-resolution image and one or more actually scanned high resolution images of at least a portion of one or more related specimens identified using a simulated image classifier;

determining whether to further process the super-resolution image based on the accuracy assessment of the super-resolution image and the suitability of the one or more artifacts; and

further processing the super-resolution image if it is determined to further process the super-resolution image.

17. The non-transitory computer-readable storage medium of claim 16 , wherein the operations for generating the super-resolution image for the specimen based on the low resolution image of the specimen further comprise:

obtaining one or more high resolution images of the at least the portion of the specimen using a high resolution objective of the microscopy inspection system, if it is determined to further process the super-resolution image based on the accuracy assessment of the super-resolution image; and

assembling the super-resolution image and the one or more high resolution images of the at least the portion of the specimen to form a single coherent image of the at least the portion of the specimen as part of further processing the super-resolution image.

18. The non-transitory computer-readable storage medium of claim 17 , wherein the one or more high resolution images of the at least the portion of the specimen obtained using the high resolution objective are high resolution images of the one or more artifacts in the low resolution image.

19. The non-transitory computer-readable storage medium of claim 16 , wherein the one or more artifacts in the low resolution image are identified as unsuitable for generating the super-resolution image.

20. The non-transitory computer-readable storage medium of claim 16 , wherein the accuracy assessment of the super-resolution image is identified by a simulated image classifier trained using a plurality of known super-resolution images at two or more different image confidence determinations.