Semiconductor device with a radiation sensing region and method for forming the same
A semiconductor device includes a semiconductor substrate, a radiation-sensing region, at least one isolation structure, and a doped passivation layer. The radiation-sensing region is present in the semiconductor substrate. The isolation structure is present in the semiconductor substrate and adjacent to the radiation-sensing region. The doped passivation layer at least partially surrounds the isolation structure in a substantially conformal manner.
1. A method comprising:
forming a radiation-sensing region in a semiconductor substrate, the radiation-sensing region comprising a doped region of the semiconductor substrate having first dopants, a first surface of the radiation-sensing region being level with a first surface of the semiconductor substrate, a second surface of the radiation-sensing region being spaced apart from a second surface of the semiconductor substrate, the second surface of the semiconductor substrate being opposite to the first surface of the semiconductor substrate, the second surface of the radiation-sensing region being opposite to the first surface of the radiation-sensing region;
forming an interconnect structure in physical contact with the first surface of the radiation-sensing region;
forming a trench in the semiconductor substrate, the trench extending from the second surface of the semiconductor substrate into the radiation-sensing region;
forming a passivation layer along sidewalls and a bottom of the trench, the passivation layer comprising a doped region of the radiation-sensing region having second dopants, the first dopants and the second dopants being of opposite types; and
forming an isolation structure in the trench.
2. The method of claim 1 , wherein forming the radiation-sensing region in the semiconductor substrate comprises implanting the first dopants into the semiconductor substrate.
3. The method of claim 1 , wherein forming the passivation layer along the sidewalls and the bottom of the trench comprises implanting the second dopants into the sidewalls and the bottom of the trench.
4. The method of claim 1 , wherein forming the trench in the semiconductor substrate comprises performing a dry etching process on the semiconductor substrate.
5. The method of claim 1 , further comprising, before forming the trench in the semiconductor substrate, performing a thinning process on the semiconductor substrate.
6. The method of claim 1 , wherein the trench exposes a dielectric material of the interconnect structure.
7. The method of claim 1 , wherein a portion of the passivation layer extends along the second surface of the semiconductor substrate.
8. A method comprising:
doping a semiconductor substrate to form a radiation-sensing region in the semiconductor substrate, a first surface of the radiation-sensing region being level with a first surface of the semiconductor substrate;
forming an interconnect structure in physical contact with the first surface of the semiconductor substrate;
patterning the semiconductor substrate to form a trench, the trench extending from a second surface of the semiconductor substrate into the radiation-sensing region, the second surface of the semiconductor substrate being opposite to the first surface of the semiconductor substrate;
doping a portion of the radiation-sensing region exposed by sidewalls and a bottom of the trench to form a passivation layer along the sidewalls and the bottom of the trench, the passivation layer and the radiation-sensing region having dopants of opposite types; and
depositing a dielectric material in the trench.
9. The method of claim 8 , further comprising performing a polishing process on the dielectric material, wherein an exposed surface of the dielectric material is substantially level with an exposed surface of the passivation layer after performing the polishing process.
10. The method of claim 8 , wherein a width of the trench decreases as the trench extends from the second surface of the semiconductor substrate into the radiation-sensing region.
11. The method of claim 8 , wherein the bottom of the trench is spaced apart from the first surface of the semiconductor substrate.
12. The method of claim 8 , wherein a portion of the passivation layer is in physical contact with the interconnect structure.
13. The method of claim 8 , wherein the dielectric material is a high-k dielectric material.
14. The method of claim 8 , wherein a depth of the trench is in a range from approximately 0.25 μm to approximately 4 μm.
15. A method comprising:
implanting first dopants into a first side of a semiconductor substrate to form a radiation-sensing region in the semiconductor substrate;
forming an interconnect structure on the first side of the semiconductor substrate;
etching a second side of the semiconductor substrate to form a trench in the semiconductor substrate, the trench extending into the radiation-sensing region, the second side of the semiconductor substrate being opposite to the first side of the semiconductor substrate;
implanting second dopants into sidewalls and a bottom of the trench, the first dopants and the second dopants being of opposite types; and
filling the trench with a dielectric material.
16. The method of claim 15 , wherein implanting the second dopants into the sidewalls and the bottom of the trench is performed without using a mask.
17. The method of claim 15 , wherein a dosage of the second dopants is in a range from about 1E11 ions/cm 2 to about 1E13 ions/cm 2 .
18. The method of claim 15 , wherein an implantation depth of the second dopants is in a range from about 10 nm to about 2.5 μm.
19. The method of claim 15 , wherein implanting the second dopants into the sidewalls and the bottom of the trench comprises performing a plasma-immersion ion implantation process.
20. The method of claim 15 , further comprising, before etching the second side of the semiconductor substrate to form the trench in the semiconductor substrate, thinning the second side of the semiconductor substrate.