Micro detector
A micro detector includes a substrate, a fin structure, a floating gate, a sensing gate, a reading gate and an antenna layer. The fin structure is located on the substrate. The floating gate is located on the substrate, and the floating gate is vertically and crossly arranged with the fin structure. The sensing gate is located at one side of the fin structure. The reading gate is located at the other side of the fin structure. The antenna layer is located on the sensing gate and is connected with the sensing gate. An induced charge is generated when the antenna layer is contacted with an external energy source, and the induced charge is stored in the floating gate.
1. A micro detector, comprising:
a substrate;
a fin structure located on the substrate;
a floating gate located on the substrate, wherein the floating gate is vertically and crossly arranged with the fin structure;
a sensing gate located at one side of the fin structure;
a reading gate located at the other side of the fin structure;
a connecting contact; and
an energy sensing film connected with the sensing gate via the connecting contact, wherein the energy sensing film is spaced apart from the sensing gate in a vertical direction, the vertical direction being substantially along a direction normal to an upper surface of the energy sensing film, the connecting contact has a length along the vertical direction, the connecting contact extends between the energy sensing film and the sensing gate and interconnects the energy sensing film and the sensing gate, and the energy sensing film is a single piece and comprises an open end that is spaced apart from the reading gate in the vertical direction;
wherein an induced charge is generated when the energy sensing film is contacted with an external energy source, and the induced charge is stored in the floating gate by a coupling effect.
2. The micro detector of claim 1 , further comprising:
a shallow trench isolation layer, wherein the shallow trench isolation layer is formed on the substrate, and the fin structure is disposed through the shallow trench isolation layer.
3. The micro detector of claim 1 , wherein the connecting contact has a shape of a flat, a column or a dot.
4. The micro detector of claim 1 , wherein the energy sensing film has a shape of a flat, a palisade or a fork.
5. The micro detector of claim 1 , wherein the energy sensing film is made of a metal.
6. The micro detector of claim 1 , wherein the energy sensing film is made of a photosensitive material.
7. The micro detector of claim 1 , wherein a thickness of the energy sensing film is from 500 Å to 12000 Å.