MEMS actuation system
A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator including a multi-morph piezoelectric actuator; an optoelectronic device coupled to the in-plane MEMS actuator; and a lens barrel assembly coupled to the out-of-plane MEMS actuator.
1. A multi-axis MEMS assembly comprising:
a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including:
an in-plane MEMS actuator, and
an out-of-plane MEMS actuator including a multi-morph piezoelectric actuator, wherein the multi-morph piezoelectric actuator includes a moveable stage configured to be affixed to the lens barrel assembly, a rigid frame assembly and a plurality of rigid intermediate stages, and a plurality of deformable piezoelectric portions configured to couple the moveable stage to the rigid frame assembly, wherein a first portion of the plurality of deformable piezoelectric portions is configured to couple a first rigid intermediate stage of the plurality of rigid intermediate stages directly to the movable stage, and wherein a second portion of the plurality of deformable piezoelectric portions is configured to couple the first rigid intermediate stage of the plurality of rigid intermediate stages directly to the rigid frame assembly;
an optoelectronic device coupled to the in-plane MEMS actuator; and
a lens barrel assembly coupled to the out-of-plane MEMS actuator.
2. The multi-axis MEMS assembly of claim 1 wherein the lens barrel assembly includes a plurality of discrete lenses.
3. The multi-axis MEMS assembly of claim 1 wherein the in-plane MEMS actuator is an image stabilization actuator.
4. The multi-axis MEMS assembly of claim 1 wherein the in-plane MEMS actuator is configured to provide linear X-axis movement and linear Y-axis movement.
5. The multi-axis MEMS assembly of claim 4 wherein the in-plane MEMS actuator is further configured to provide rotational Z-axis movement.
6. The multi-axis MEMS assembly of claim 1 wherein the out-of-plane MEMS actuator is an autofocus actuator.
7. The multi-axis MEMS assembly of claim 1 wherein the out-of-plane MEMS actuator is configured to provide linear Z-axis movement.
8. The multi-axis MEMS assembly of claim 1 wherein the multi-morph piezoelectric actuator includes a bending piezoelectric actuator.
9. The multi-axis MEMS assembly of claim 1 wherein the rigid frame assembly of the multi-morph piezoelectric actuator of the out-of-plane MEMS actuator is configured to be coupled to a support assembly.
10. A multi-axis MEMS assembly comprising:
a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including:
an in-plane MEMS actuator, and
an out-of-plane MEMS actuator including a multi-morph piezoelectric actuator, wherein the multi-morph piezoelectric actuator includes a moveable stage configured to be affixed to the lens barrel assembly, a rigid frame assembly and a plurality of rigid intermediate stages, and a plurality of deformable piezoelectric portions configured to couple the moveable stage to the rigid frame assembly, wherein a first portion of the plurality of deformable piezoelectric portions is configured to couple a first rigid intermediate stage of the plurality of rigid intermediate stages directly to the movable stage, and wherein a second portion of the plurality of deformable piezoelectric portions is configured to couple the first rigid intermediate stage of the plurality of rigid intermediate stages directly to the rigid frame assembly;
an optoelectronic device coupled to the in-plane MEMS actuator; and
a lens barrel assembly coupled to the out-of-plane MEMS actuator;
wherein the in-plane MEMS actuator is an image stabilization actuator and the out-of-plane MEMS actuator is an autofocus actuator.
11. The multi-axis MEMS assembly of claim 10 wherein the in-plane MEMS actuator is configured to provide linear X-axis movement and linear Y-axis movement.
12. The multi-axis MEMS assembly of claim 11 wherein the in-plane MEMS actuator is further configured to provide rotational Z-axis movement.
13. The multi-axis MEMS assembly of claim 10 wherein the out-of-plane MEMS actuator is configured to provide linear Z-axis movement.
14. A multi-axis MEMS assembly comprising:
a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including:
an in-plane MEMS actuator, and
an out-of-plane MEMS actuator including a multi-morph piezoelectric actuator;
an optoelectronic device coupled to the in-plane MEMS actuator; and
a lens barrel assembly coupled to the out-of-plane MEMS actuator;
wherein the multi-morph piezoelectric actuator includes:
a moveable stage configured to be affixed to the lens barrel assembly,
a rigid frame assembly, and
at least one deformable piezoelectric portion configured to couple the moveable stage to the rigid frame assembly, wherein the multi-morph piezoelectric actuator further includes a plurality of deformable piezoelectric portions configured to couple the moveable stage to the rigid frame assembly, wherein a first portion of the plurality of deformable piezoelectric portions is configured to couple a first rigid intermediate stage of the plurality of rigid intermediate stages directly to the movable stage, and wherein a second portion of the plurality of deformable piezoelectric portions is configured to couple the first rigid intermediate stage of the plurality of rigid intermediate stages directly to the rigid frame assembly.
15. The multi-axis MEMS assembly of claim 14 wherein the rigid frame assembly of the multi-morph piezoelectric actuator of the out-of-plane MEMS actuator is configured to be coupled to a support assembly.