MEMS actuation system
A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator; wherein the in-plane MEMS actuator includes an electromagnetic actuator portion.
1. A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
a MEMS actuator configured to provide linear three-axis movement, the MEMS actuator including:
an in-plane MEMS actuator, and
an out-of-plane MEMS actuator; and
an optoelectronic device coupled to the MEMS actuator;
wherein the in-plane MEMS actuator includes hybrid actuator including:
an in-plane MEMS actuator portion including at least two motion stages including a respective polarized magnetic material/magnet associated with each motion stage and having differing polarizations:
an in-plane electromagnetic actuator portion including a magnetic plate assembly to which at least two magnetic assemblies are attached, including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly, the magnetic assemblies configured to interact with a respective polarized magnetic material/magnet.
2. The multi-axis MEMS assembly of claim 1 wherein the optoelectronic device is coupled to one or more of:
the in-plane MEMS actuator; and
the out-of-plane MEMS actuator.
3. The multi-axis MEMS assembly of claim 1 wherein the in-plane MEMS actuator is an image stabilization actuator.
4. The multi-axis MEMS assembly of claim 1 wherein the in-plane MEMS actuator is configured to provide linear X-axis movement and linear Y-axis movement.
5. The multi-axis MEMS assembly of claim 4 wherein the in-plane MEMS actuator is further configured to provide rotational Z-axis movement.
6. The multi-axis MEMS assembly of claim 1 wherein the out-of-plane MEMS actuator is an autofocus actuator.
7. The multi-axis MEMS assembly of claim 1 wherein the out-of-plane MEMS actuator is configured to provide linear Z-axis movement.
8. The multi-axis MEMS assembly of claim 1 wherein the at least two magnetic assemblies are configured to enable in-plane displacement of the optoelectronic device.
9. The multi-axis MEMS assembly of claim 8 wherein the at least two magnetic assemblies include more than two magnetic assemblies.
10. The multi-axis MEMS assembly of claim 9 wherein the more than two magnetic assemblies are configured to enable at least one of X-axis and Y-axis displacement of the optoelectronic device.
11. A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
a MEMS actuator configured to provide linear three-axis movement, the MEMS actuator including:
an in-plane MEMS actuator including an electromagnetic actuator portion, and
an out-of-plane MEMS actuator; and
an optoelectronic device coupled to the MEMS actuator;
wherein the in-plane MEMS actuator is a hybrid actuator including:
at least two respective polarized magnetic material/magnets each associated with a respective motion stage of a MEMS actuator portion of the in-plane MEMS actuator, wherein the at least two respective polarized magnetic material/magnets have a differing polarizations; and
a magnetic plate assembly having at least two magnetic assemblies of the electromagnetic actuator portion configured to interact with a respective polarized magnetic material/magnet, the at least magnetic assemblies including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly.
12. The multi-axis MEMS assembly of claim 11 wherein the at least two magnetic assemblies are configured to enable in-plane displacement of the optoelectronic device.
13. The multi-axis MEMS assembly of claim 12 wherein the at least two magnetic assemblies include more than two magnetic assemblies.
14. The multi-axis MEMS assembly of claim 13 wherein the more than two magnetic assemblies are configured to enable at least one of X-axis and Y-axis displacement of the optoelectronic device.
15. A multi-axis micro-electrical-mechanical system (MEMS) assembly comprising:
a MEMS actuator configured to provide linear multi-axis movement, the MEMS actuator including:
a hybrid in-plane MEMS actuator portion including at least two motion stages including a respective polarized magnetic material/magnet associated with each motion stage and having differing polarizations; and
an in-plane electromagnetic actuator portion including a magnetic plate assembly having at least two magnetic assemblies configured to interact with a respective polarized magnetic material/magnet, the at least two magnetic assemblies including a first magnetic assembly and a second magnetic assembly positioned orthogonal to the first magnetic assembly; and
an optoelectronic device coupled to the MEMS actuator.
16. The multi-axis MEMS assembly of claim 15 wherein the at least two magnetic assemblies are configured to enable in-plane displacement of the optoelectronic device.
17. The multi-axis MEMS assembly of claim 16 wherein the at least two magnetic assemblies include more than two magnetic assemblies.
18. The multi-axis MEMS assembly of claim 17 wherein the more than two magnetic assemblies are configured to enable at least one of X-axis and Y-axis displacement of the optoelectronic device.
19. The multi-axis MEMS assembly of claim 18 wherein the more than two magnetic assemblies are further configured to provide rotational Z-axis movement.