IP Library Granted Patent US 11,201,028
Granted Patent B2
US 11,201,028 · App. 16/589,348 · Granted Dec 14, 2021

Traveling wave tube amplifier having a helical slow-wave structure supported by a cylindrical scaffold

Inventors: Max G. Lagally (Madison, WI); Matthew McLean Dwyer (Madison, WI); Francesca Cavallo (Albuquerque, NM); Daniel Warren van der Weide (Madison, WA); Abhishek Bhat (Madison, WI)
Assignees: Wisconsin Alumni Research Foundation; The Regents of the University of New Mexico
H01J23/26H01J9/14H01J23/24H01J25/34H01J25/44H03F3/58H01J2209/012
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Quick Facts
Patent No.
US 11,201,028
App. No.
16/589,348
Granted
Dec 14, 2021
Kind
B2
Abstract

Traveling-wave tube amplifiers for high-frequency signals, including terahertz signals, and methods for making a slow-wave structure for the traveling-wave tube amplifiers are provided. The slow-wave structures include helical conductors that are self-assembled via the release and relaxation of strained films from a sacrificial growth substrate.

Claims (19)

1. A traveling wave tube amplifier comprising:

a slow-wave structure comprising:

a cylindrical scaffold comprising a dielectric film, the cylindrical scaffold having an interior surface; and

an electrically conductive helix on the interior surface of the cylindrical scaffold, the electrically conductive helix comprising a plurality of electrically conductive strips connected end-to-end;

an electron gun positioned to direct one or more beams of electrons axially through the electrically conductive helix or around the periphery of the electrically conductive helix; and

an electron collector positioned opposite the electron gun.

2. The amplifier of claim 1 , wherein the cylindrical scaffold comprises silicon nitride, silicon oxide, aluminum oxide, or diamond.

3. The amplifier of claim 1 , wherein the electrically conductive helix has an inner diameter in the range from 1 μm to 50 μm.

4. The amplifier of claim 1 , wherein each electrically conductive strip corresponds to one coil of the electrically conductive helix.

5. The amplifier of claim 1 , further comprising a dielectric support membrane, wherein the slow-wave structure is attached to the dielectric support membrane along the length of the slow-wave structure.

6. The amplifier of claim 5 , wherein the dielectric support membrane comprises diamond or silicon nitride.

7. The amplifier of claim 6 , wherein the electrically conductive helix comprises a material that can be electroplated.

8. The amplifier of claim 7 , wherein the electrically conductive helix comprises gold, copper, nickel, or silver.

9. The amplifier of claim 8 , wherein the cylindrical scaffold comprises silicon nitride, the dielectric support membrane comprises diamond, and the electrically conductive helix comprises gold.

10. The amplifier of claim 8 , wherein the electrically conductive helix has an inner diameter in the range from 1 μm to 50 μm.

11. The amplifier of claim 5 , further comprising a device substrate, wherein the portion of the dielectric support membrane to which the slow-wave structure is attached is suspended over the device substrate.

12. The amplifier of claim 1 , wherein the cylindrical scaffold comprises diamond, has a thickness in the range from 10 nm to 20 nm, and has an inside diameter in the range from 0.5 μm to 2 μm.

13. The amplifier of claim 1 , wherein the cylindrical scaffold comprises silicon nitride, has a thickness in the range from 20 nm to 40 nm, and has an inside diameter in the range from 1 μm to 5 μm.

14. The amplifier of claim 1 , wherein the cylindrical scaffold has an inside diameter in the range from 0.5 μm to 30 μm.

Assignments (4)
CONFIRMATORY LICENSE Recorded Aug 21, 2025
From: WISCONSIN ALUMNI RESEARCH FOUNDATION
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 072506/0555 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 23, 2022
From: CAVALLO, FRANCESCA
To: THE REGENTS OF THE UNIVERSITY OF NEW MEXICO
Reel/Frame 059378/0685 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 23, 2022
From: THE REGENTS OF THE UNIVERSITY OF NEW MEXICO
To: UNM RAINFOREST INNOVATIONS
Reel/Frame 059378/0783 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 8, 2020
From: LAGALLY, MAX; DWYER, MATTHEW; VAN DER WEIDE, DANIEL; BHAT, ABHISHEK
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 052863/0537 →
Continuity (1)
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